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公开(公告)号：DE69921086D1
公开(公告)日：2004-11-18
申请号：DE69921086
申请日：1999-02-26
Applicant: ST MICROELECTRONICS SRL , WAFERSCALE INTEGRATION INC
Inventor： POZZONI PIERANTONIO , BRAMBILLA CLAUDIO , CEREDA MANLIO SERGIO , CAPRARA PAOLO , IRANI RUSTON
IPC: H01L21/8247
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