公开(公告)号：NL1008352C2

公开(公告)日：1999-08-20

申请号：NL1008352

申请日：1998-02-19

Applicant: STICHTING TECH WETENSCHAPP

Inventor： SHMAENOK LEONID

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/203 ,  G21K1/02 ,  H01J37/09 ,  H05H1/22

Abstract: The invention relates to an apparatus comprising a radiation source and a processing organ for processing the radiation from the radiation source, wherein a filter is placed between the radiation source and the processing organ which filter comprises a plurality of foils or plates that are positioned oblique with respect to a virtual axis connecting the radiation source with the processing organ, whereby each foil or plate essentially points in the radial direction when viewed from the radiation source, such that the foils or plates share a virtual point of intersection located approximately at the radiation source.