Abstract:
A semiconductor integrated device (51, 81; 91), comprising: a package (50) defining an internal space (8) and having an acoustic-access opening (28; 98b) in acoustic communication with an environment external to the package (50); a MEMS acoustic transducer (21), housed in the internal space (8) and provided with an acoustic chamber (6) facing the acoustic-access opening (28; 98b); and a filtering module (52; 82; 96), which is designed to inhibit passage of contaminating particles having dimensions larger than a filtering dimension (d 1 ; d MAX ) and is set between the MEMS acoustic transducer (21) and the acoustic-access opening (28; 98b). The filtering module defines at least one direct acoustic path between the acoustic-access opening (28; 98b) and the acoustic chamber (6).
Abstract:
A microelectromechanical microphone includes: a substrate (2); a sensor chip (5), integrating a microelectromechanical electroacoustic transducer (35); and a control chip (6) operatively coupled to the sensor chip (5). The sensor chip (5) and the control chip (6) are bonded to the substrate (2), and the sensor chip (5) in part overlies the control chip (6). The sensor chip (5) the has a first portion fixed to a face (6a) of the control chip (6) and comprises a transduction member (37) acoustically communicating with a sound port (11).
Abstract:
A micro-electro-mechanical microphone comprising: a substrate (2); a sensor chip (5), which is coupled to the substrate (2) and integrates a micro-electro-mechanical electro-acoustic transducer (35); a control chip (6), which is joined to the substrate (2) and is operatively coupled to the sensor chip (5); a bonding ring (16), which surrounds the sensor chip (5) and the control chip (6); a cap (3), which is coupled to the substrate (2) via the bonding ring (16) and forms an acoustic chamber (4) that houses the control chip (6) and the sensor chip (5); a barrier (18), which extends between the bonding ring (16) and the sensor chip (5) at a first distance and a second distance, respectively, therefrom, for defining a first trench (19) between the bonding ring (16) and the barrier (18) and a second trench (25) between the barrier (18) and the sensor chip (5).
Abstract:
A micro-electro-mechanical microphone comprising: a substrate (2); a sensor chip (5), which is coupled to the substrate (2) and integrates a micro-electro-mechanical electro-acoustic transducer (35); a control chip (6), which is joined to the substrate (2) and is operatively coupled to the sensor chip (5); a bonding ring (16), which surrounds the sensor chip (5) and the control chip (6); a cap (3), which is coupled to the substrate (2) via the bonding ring (16) and forms an acoustic chamber (4) that houses the control chip (6) and the sensor chip (5); a barrier (18), which extends between the bonding ring (16) and the sensor chip (5) at a first distance and a second distance, respectively, therefrom, for defining a first trench (19) between the bonding ring (16) and the barrier (18) and a second trench (25) between the barrier (18) and the sensor chip (5).
Title translation:VERBESSERTES MIKROELEKTROMECHANISCHES MIKROFON,ELEKTRONISCHES SYSTEM MIT DEM MIKROELEKTROMECHANISCHEN MIKROFON UND HERSTELLUNGSVERFAHREN
Abstract:
A micro-electro-mechanical microphone comprising: a substrate (2); a sensor chip (5), which is coupled to the substrate (2) and integrates a micro-electro-mechanical electro-acoustic transducer (35); a control chip (6), which is joined to the substrate (2) and is operatively coupled to the sensor chip (5); a bonding ring (16), which surrounds the sensor chip (5) and the control chip (6); a cap (3), which is coupled to the substrate (2) via the bonding ring (16) and forms an acoustic chamber (4) that houses the control chip (6) and the sensor chip (5); a barrier (18), which extends between the bonding ring (16) and the sensor chip (5) at a first distance and a second distance, respectively, therefrom, for defining a first trench (19) between the bonding ring (16) and the barrier (18) and a second trench (25) between the barrier (18) and the sensor chip (5).
Abstract:
A microelectromechanical microphone includes: a supporting substrate (2), having a first face (2a) and a second face (2b); a sensor chip (5), bonded to the first face (2a) of the supporting substrate (2) and integrating a microelectromechanical electroacoustic transducer (35); and a control chip (6) operatively coupled to the sensor chip (5), at least one portion of the control chip (6) being comprised between the first face (2a) and the second face (2b) of the supporting substrate (2). The sensor chip (5) is at least partially arranged on top of the control chip (6).
Abstract:
In a microfluidic assembly (20), a microfluidic device (I1) is provided with a body (4) in which at least a first inlet (7) for loading a fluid to analyse and a buried area (8) in fluidic communication with the first inlet (7) are defined. An analysis chamber (10') is in fluidic communication with the buried area (8) and an interface cover (23) is coupled in a fluid-tight manner above the microfluidic device (I1) . The interface cover (23) is provided with a sealing portion (35) in correspondence to the analysis chamber (10')/ adapted to assume a first configuration, at rest, in which it leaves the analysis chamber (10') open, and a second configuration, as a consequence of a stress, in which it closes in a fluid-tight manner the same analysis chamber.
Abstract:
A load-sensing device (10), arranged in a package (12) forming a chamber (24). The package (12) has a deformable substrate (21) configured, in use, to be deformed by an external force. A sensor unit (11) is in direct contact with the deformable substrate (21) and is configured to detect deformations of the deformable substrate. An elastic element (15) is arranged within of the chamber (24) and acts between the package (12) and the sensor unit (11) to generate, on the sensor unit, a force keeping the sensor unit in contact with the deformable substrate. For example, the deformable substrate is a base (21) of the package (12), and the elastic element is a metal lamina (15) arranged between the lid (22) of the package (12) and the sensor unit (11). The sensor unit (11) may be a semiconductor die integrating piezoresistors.