公开(公告)号：EP4520715A1

公开(公告)日：2025-03-12

申请号：EP24195113.6

申请日：2024-08-19

Applicant: STMicroelectronics International N.V.

Inventor： NICOLI, Silvia ,  VARISCO, Igor ,  DANIELE, Filippo ,  TENTORI, Lorenzo ,  D'ERCOLI, Filippo ,  CAPRA, Federica

IPC: B81B3/00

Abstract: MEMS device including: a fixed body (14;400) delimiting a cavity (13;413); a suspended structure (27;427) extending cantilevered from the fixed body, above the cavity, and including a suspended semiconductive region (16;416); and a transducer (40) arranged above the suspended structure. The suspended structure further includes a compensation region (31) of thermal oxide, which extends below the suspended semiconductive region.