公开(公告)号：EP4545927A1

公开(公告)日：2025-04-30

申请号：EP24206565.4

申请日：2024-10-15

Applicant: STMicroelectronics International N.V.

Inventor： DANIELE, Filippo ,  DUQI, Enri ,  BALDO, Lorenzo

IPC: G01L9/00 ,  G01L13/02 ,  G01L19/06

Abstract: A pressure sensor (1) has a body (5) having a first chamber (12) and a second chamber (13) hermetically separated from the first chamber; a first detection structure (18) which is arranged in the first chamber (12), has a first deformable element (25) and a first buried cavity (24) within the first detection structure, wherein the first deformable element is configured to undergo a deformation as a function of a pressure difference between the first chamber and the first buried cavity. The sensor also has a second detection structure (19) which is arranged in the second chamber (13), has a second deformable element (32) and a second buried cavity (30) within the second detection structure, wherein the second deformable element is configured to undergo a deformation as a function of a pressure difference between the second chamber and the second buried cavity. The sensor also has a first channel (40) that extends into the body (5) and is configured to fluidically couple the first buried cavity (24) with the second chamber (13); and a second channel (41) that extends into the body (5) and is configured to fluidically couple the second buried cavity (30) to the first chamber (12).

公开(公告)号：EP4467951A1

公开(公告)日：2024-11-27

申请号：EP24177856.2

申请日：2024-05-24

Applicant: STMicroelectronics International N.V.

Inventor： NICOLI, Silvia ,  ALLEGATO, Giorgio ,  DANIELE, Filippo ,  NOMELLINI, Andrea ,  TURI, Maria Carolina

IPC: G01L9/00 ,  G01L19/00 ,  G01L23/12

Abstract: MEMS pressure transducer (1) including: a semiconductor body (2); a lower dielectric region (4,6), arranged above the semiconductor body (2); a fixed electrode region (12) and a lower anchoring region (14), which are formed by conductive material, are arranged on the lower dielectric region (4,6) and are laterally separated from each other; a membrane (55) of conductive material, which is suspended above the fixed electrode region (12), so as to delimit a cavity (39) upwardly, the fixed electrode region (12) facing the cavity, the membrane (55) being deformable as a function of pressure and forming a variable capacitor together with the fixed electrode region (12); and an upper anchoring region (37") of conductive material, which laterally delimits the cavity (39) and is interposed, in direct contact, between the membrane (55) and the lower anchoring region (14).

公开(公告)号：EP4520715A1

公开(公告)日：2025-03-12

申请号：EP24195113.6

申请日：2024-08-19

Applicant: STMicroelectronics International N.V.

Inventor： NICOLI, Silvia ,  VARISCO, Igor ,  DANIELE, Filippo ,  TENTORI, Lorenzo ,  D'ERCOLI, Filippo ,  CAPRA, Federica

IPC: B81B3/00

Abstract: MEMS device including: a fixed body (14;400) delimiting a cavity (13;413); a suspended structure (27;427) extending cantilevered from the fixed body, above the cavity, and including a suspended semiconductive region (16;416); and a transducer (40) arranged above the suspended structure. The suspended structure further includes a compensation region (31) of thermal oxide, which extends below the suspended semiconductive region.