公开(公告)号：EP1687535A1

公开(公告)日：2006-08-09

申请号：EP04805827.5

申请日：2004-11-12

Applicant: STMicroelectronics S.A.

Inventor： BOUCHE, Guillaume

IPC: F04B43/04 ,  F15C5/00 ,  B81B3/00

CPC classification number: F04B43/043 ,  B81B7/0093 ,  B81B2201/036 ,  B81B2203/0127 ,  B81B2203/0315 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention relates to a pump comprising: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity comprising an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.

公开(公告)号：EP1568129B1

公开(公告)日：2006-06-14

申请号：EP03789511.7

申请日：2003-11-27

Applicant: STMicroelectronics S.A.

Inventor： BOUCHE, Guillaume ,  CARUYER, Grégory ,  ANCEY, Pascal

IPC: H03H9/05

CPC classification number: H03H9/175

Abstract: The invention relates to a support (7) for an acoustic resonator (4), comprising at least one double layer assembly consisting of one layer of a high acoustic impedance material (11) and one layer of a low acoustic impedance material (12) which is made from a material with low electric permittivity.

公开(公告)号：EP1568129A1

公开(公告)日：2005-08-31

申请号：EP03789511.7

申请日：2003-11-27

Applicant: STMicroelectronics S.A.

Inventor： BOUCHE, Guillaume ,  CARUYER, Grégory ,  ANCEY, Pascal

IPC: H03H9/05

CPC classification number: H03H9/175

Abstract: The invention relates to a support (7) for an acoustic resonator (4), comprising at least one double layer assembly consisting of one layer of a high acoustic impedance material (11) and one layer of a low acoustic impedance material (12) which is made from a material with low electric permittivity.