公开(公告)号：EP4261592A9

公开(公告)日：2024-01-10

申请号：EP23164580.5

申请日：2023-03-28

Applicant: STMicroelectronics S.r.l.

Inventor： BONI, Nicolo' ,  CARMINATI, Roberto ,  MERLI, Massimiliano ,  PRELINI, Carlo Luigi ,  AFIFI AFIFI, Tarek

IPC: G02B26/08

Abstract: A microelectromechanical mirror device (20) has, in a die (1') of semiconductor material: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting region (2'), elastically suspended above the cavity (3) and having a main extension in a horizontal plane (xy); at least one first pair of driving arms (12a, 12b), carrying respective piezoelectric structures (13) which can be biased to generate a driving force such as to cause a rotation of the tiltable structure (2) about a rotation axis (X) parallel to a first horizontal axis (x) of the horizontal plane; elastic suspension elements (6a, 6b), which elastically couple the tiltable structure (2) to the fixed structure (4) at the rotation axis (X) and are rigid to movements out of the horizontal plane (xy) and compliant to torsion about the rotation axis (X). In particular, the driving arms (12a, 12b) of the first pair are magnetically coupled to the tiltable structure (2) so as to cause its rotation about the rotation axis (X) by magnetic interaction, following biasing of the respective piezoelectric structures (13) .

公开(公告)号：EP4261592A1

公开(公告)日：2023-10-18

申请号：EP23164580.5

申请日：2023-03-28

Applicant: STMicroelectronics S.r.l.

Inventor： BONI, Nicolo' ,  CARMINATI, Roberto ,  MERLI, Massimiliano ,  PRELINI, Carlo Luigi ,  AFIFI AFIFI, Tarek

IPC: G02B26/08

Abstract: A microelectromechanical mirror device (20) has, in a die (1') of semiconductor material: a fixed structure (4) defining a cavity (3); a tiltable structure (2) carrying a reflecting region (2'), elastically suspended above the cavity (3) and having a main extension in a horizontal plane (xy); at least one first pair of driving arms (12a, 12b), carrying respective piezoelectric structures (13) which can be biased to generate a driving force such as to cause a rotation of the tiltable structure (2) about a rotation axis (X) parallel to a first horizontal axis (x) of the horizontal plane; elastic suspension elements (6a, 6b), which elastically couple the tiltable structure (2) to the fixed structure (4) at the rotation axis (X) and are rigid to movements out of the horizontal plane (xy) and compliant to torsion about the rotation axis (X). In particular, the driving arms (12a, 12b) of the first pair are magnetically coupled to the tiltable structure (2) so as to cause its rotation about the rotation axis (X) by magnetic interaction, following biasing of the respective piezoelectric structures (13) .