Method for producing optically transparent noble metal films
    1.
    发明公开
    Method for producing optically transparent noble metal films 有权
    Verfahren zur Abscheidung von optisch transparenten Metallbeschichtungen

    公开(公告)号:EP1717334A1

    公开(公告)日:2006-11-02

    申请号:EP06009092.5

    申请日:2006-05-02

    CPC classification number: C23C14/185

    Abstract: Method for producing a noble metal film (1.2, 18), comprising the step of sputtering a noble metal on a substrate (14) thus obtaining a film (16). The method further comprises the step of subjecting said film (16) to a thermal treatment, thus obtaining said noble metal film (12, 18).

    Abstract translation: 贵金属膜(1.2,18)的制造方法,包括在基板(14)上溅射贵金属从而获得膜(16)的步骤。 该方法还包括对所述薄膜(16)进行热处理的步骤,从而获得所述贵金属薄膜(12,18)。

    Method for producing optically transparent noble metal films
    2.
    发明公开
    Method for producing optically transparent noble metal films 审中-公开
    一种用于光学透明金属涂层的分离处理

    公开(公告)号:EP2275586A3

    公开(公告)日:2011-06-22

    申请号:EP10182108.0

    申请日:2006-05-02

    CPC classification number: C23C14/185

    Abstract: Method for producing a noble metal film (12, 18), comprising the step of sputtering a noble metal on a substrate (14) thus obtaining a film (16) of noble metal. The method further comprises the step of subjecting said film (16) to a thermal treatment, thus obtaining said noble metal film (12, 18), the thermal treatment in turn comprising a step of annealing said film (16) of noble metal.

    Method for producing optically transparent noble metal films
    3.
    发明公开
    Method for producing optically transparent noble metal films 审中-公开
    制造光学透明贵金属膜的方法

    公开(公告)号:EP2275586A2

    公开(公告)日:2011-01-19

    申请号:EP10182108.0

    申请日:2006-05-02

    CPC classification number: C23C14/185

    Abstract: Method for producing a noble metal film (12, 18), comprising the step of sputtering a noble metal on a substrate (14) thus obtaining a film (16) of noble metal. The method further comprises the step of subjecting said film (16) to a thermal treatment, thus obtaining said noble metal film (12, 18), the thermal treatment in turn comprising a step of annealing said film (16) of noble metal.

    Abstract translation: 一种用于生产贵金属膜(12,18)的方法,该方法包括在衬底(14)上溅射贵金属从而获得贵金属膜(16)的步骤。 该方法还包括对所述薄膜(16)进行热处理,从而获得所述贵金属薄膜(12,18)的步骤,所述热处理又包括对所述贵金属薄膜(16)进行退火的步骤。

Patent Agency Ranking