公开(公告)号：EP1400798A1

公开(公告)日：2004-03-24

申请号：EP02425556.4

申请日：2002-09-10

Applicant: STMicroelectronics S.r.l.

Inventor： Somboli, Fabio

IPC: G01M3/20 ,  G01M3/22

CPC classification number: G01M3/223 ,  G01M3/20

Abstract: System for the automatic detection of leaks in a vacuum installation comprising air-tightness measurement points (11, 21), a measurement gas source (10), means for conveying the measurement gas to the measurement points and means (14) for detecting the presence of the measurement gas inside the vacuum installation. The means for conveying the measurement gas to the measurement points comprise ducts (1, 2, 3, 4, 5, 6, 7, 8) that connect the measurement gas source to the measurement points. The system also comprises means (18, 19, 20) for controlling the flow of the measurement gas in the ducts.
The leak detection becomes more accurate if the air-tightness measurement points of the vacuum installation comprise joints of a new type between tubes. Each joint comprises two juxtaposable flanges, each integral with an end of a tube, means for fixing the two juxtaposed flanges and sealing means interposed between the two juxtaposed flanges. At least one of the two flanges comprises an internal duct (30) of which an input end (29) can be connected to a measurement gas source (10) and at least one output end (31) that opens into a zone of the flange outside the sealing means.

Abstract translation: 用于在包括气密性测量点（11,21）的真空设备中自动检测泄漏的系统，测量气体源（10），用于将测量气体输送到测量点的装置和用于检测存在的装置（14） 的真空安装中的测量气体。 用于将测量气体输送到测量点的装置包括将测量气体源连接到测量点的管道（1,2,3,4,5,6,7,8）。 该系统还包括用于控制管道中的测量气体的流动的装置（18,19,20）。 如果真空装置的气密性测量点包括管之间的新型接头，则泄漏检测变得更加准确。 每个接头包括两个可并置的凸缘，每个凸缘与管的一端成一体，用于固定两个并置的凸缘的装置和插在两个并置凸缘之间的密封装置。 两个凸缘中的至少一个包括内部管道（30），输入端（29）可连接到测量气体源（10）和至少一个输出端（31），所述至少一个输出端（31）通向凸缘区域 在密封装置外面。

公开(公告)号：EP1394835A1

公开(公告)日：2004-03-03

申请号：EP02425536.6

申请日：2002-08-29

Applicant: STMicroelectronics S.r.l.

Inventor： Ciovacco, Francesco ,  Somboli, Fabio ,  Fazio, Giuseppe ,  Alba, Simone

IPC: H01J37/32

CPC classification number: H01J37/3244

Abstract: A method (300) and a corresponding apparatus for detecting a leak of external air into a plasma reactor are proposed. The method of the invention includes the steps of: establishing (340) a plasma inside the reactor, the plasma having a composition suitable to generate at least one predetermined compound when reacting with the air, detecting (345) a light emission of the plasma, and analyzing (350-375) the light emission to identify the presence of the at least one predetermined compound.

Abstract translation: 的方法（300），以及用于检测外部空气的漏入等离子体反应器中的相应设备的提议。 本发明的方法包括以下步骤：建立（340）一个反应器内的等离子体中，具有适合于产生至少一个预定的化合物当与空气反应生成的组合物的等离子体，检测（345）的等离子体的发光， 和分析（350-375）的光发射以识别至少一个预定的化合物的存在。