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1.发明授权Micro-electromechanical structure, in particular accelerometer, with improved insensitivity to thermomechanical stresses 有权一种微机电结构，特别是加速度传感器，具有改进的不敏感性热和机械应力
公开(公告)号：EP1626283B1
公开(公告)日：2011-03-23
申请号：EP04425630.3
申请日：2004-08-13
Applicant: STMicroelectronics Srl
Inventor： Merassi, Angelo , Murari, Bruno , Zerbini, Sarah
IPC: G01P15/125 , G01P15/00 , B81B3/00
CPC classification number: G01P15/125 , B81B7/0048 , B81B2201/0235 , G01P1/006 , G01P2015/082
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