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1.Micro-electromechanical structure, in particular accelerometer, with improved insensitivity to thermomechanical stresses 有权
Title translation: 一种微机电结构,特别是加速度传感器,具有改进的不敏感性热和机械应力公开(公告)号:EP1626283B1
公开(公告)日:2011-03-23
申请号:EP04425630.3
申请日:2004-08-13
Applicant: STMicroelectronics Srl
Inventor: Merassi, Angelo , Murari, Bruno , Zerbini, Sarah
IPC: G01P15/125 , G01P15/00 , B81B3/00
CPC classification number: G01P15/125 , B81B7/0048 , B81B2201/0235 , G01P1/006 , G01P2015/082