公开(公告)号：EP3006606A4

公开(公告)日：2017-03-01

申请号：EP13886011

申请日：2013-05-31

Applicant: SUMCO CORP

Inventor： SUDO TOSHIAKI ,  KITAHARA KEN ,  AIBA AKIHIRO ,  OUSYUYA KAZUSHI ,  YOSHIDA FUMIE ,  HINOOKA MAKIKO ,  KITAHARA ERIKO ,  SATO TADAHIRO

IPC: C30B15/10 ,  C03B19/09 ,  C30B29/06 ,  C30B35/00

CPC classification number: C30B15/10 ,  C03B19/095 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57

Abstract: The present invention provides a vitreous silica crucible which inhibits a deformation even when used under a high temperature condition for a long time, and a method for manufacturing the same. The vitreous silica crucible comprises: a substantially cylindrical straight body portion having an opening on the top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is greater than that of the bottom portion, wherein, the vitreous silica crucible comprises a transparent layer on the inside and a bubble layer on the outside thereof, a compressive stress layer in which compressive stress remains in the inner surface side of the transparent layer, and a tensile stress layer in which tensile stress remains and is adjacent to the compressive stress layer at a gradual rate of change of stress.

公开(公告)号：EP3018468A4

公开(公告)日：2017-01-04

申请号：EP13888555

申请日：2013-06-30

Applicant: SUMCO CORP

Inventor： SUDO TOSHIAKI ,  SATO TADAHIRO ,  KITAHARA KEN ,  HINOOKA MAKIKO

IPC: G01N21/55 ,  C03B19/09 ,  C30B15/10 ,  C30B29/06 ,  G01N15/00 ,  G01N15/08 ,  G01N15/10 ,  G01N33/00

CPC classification number: C03B1/00 ,  C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  G01N15/088 ,  G01N21/55 ,  G01N2015/0015 ,  G01N2015/0096 ,  G01N2033/0091 ,  G02B21/008 ,  Y02P40/57

Abstract: An evaluation method of suitable silica powder for forming a bubble-free layer of a vitreous silica crucible for pulling of a silicon single crystal, includes: a process of measuring a porosity between silica particles in the silica powder, a process of melting the silica powder, a process of measuring a bubble content rate of a vitreous silica block obtained by cooling to harden the melted silica powder, and a process of determining whether the silica powder is suitable from the porosity of the silica powder and the bubble content rate of the vitreous silica block.

Abstract translation: 合适的二氧化硅粉末的用于硅单晶的提拉形成石英玻璃坩埚的无气泡的层的评价方法，包括：测量二氧化硅颗粒之间的孔隙率在该二氧化硅粉末的过程中，熔融二氧化硅粉末的工序 ，测量通过冷却以硬化熔融二氧化硅粉末获得的氧化硅玻璃块的气泡含有率，和确定性采矿的处理的处理是否二氧化硅粉末适合从所述二氧化硅粉末的孔隙率和玻璃体的气泡含有率 二氧化硅块。