APPARATUS AND METHOD FOR CHARACTERIZING LIBRARIES OF DIFFERENT MATERIALS USING X-RAY SCATTERING
    3.
    发明申请
    APPARATUS AND METHOD FOR CHARACTERIZING LIBRARIES OF DIFFERENT MATERIALS USING X-RAY SCATTERING 审中-公开
    利用X射线散射来表征不同材料的文库的装置和方法

    公开(公告)号:WO0036405A3

    公开(公告)日:2000-11-16

    申请号:PCT/US9930161

    申请日:1999-12-17

    Abstract: An apparatus for characterizing a library is provided in which the library contains an array of elements and each element contains a different combination of materials. The apparatus includes an x-ray beam directed at the library, a chamber which houses the library and a beam line for directing the x-ray beam onto the library in the chamber. The chamber may include a translation stage that holds the library and that is programmable to change the position of the library relative to the x-ray beam and a controller that controls the movement of the translation stage to expose an element to the x-beam in order to rapidly characterize the element in the library. During the characterization, the x-ray beam scatters off of the element and a detector detects the scattered x-ray beam in order to generate characterization data for the element.

    Abstract translation: 提供了用于表征库的设备,其中库包含元素数组,并且每个元素包含不同的材料组合。 该设备包括指向库的X射线束,容纳库的室和用于将X射线束引导到室中的库上的束线。 该腔室可以包括平移台,该平台保持该库并且可编程以相对于该X射线束改变该库的位置,以及控制器,该控制器控制该平移台的移动以将元件暴露于 为了快速表征库中的元素。 在表征过程中,X射线束散射离开元件,检测器检测散射的X射线束,以便为元件生成特征数据。

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