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1.发明专利System, method and apparatus for micromachined interferometer using optical splitting 有权使用光学分割的微型干涉仪的系统，方法和装置
公开(公告)号：JP2008102132A
公开(公告)日：2008-05-01
申请号：JP2007248525
申请日：2007-09-26
Applicant: Si-Ware Systems , サイ−ウエア・システムズSi−Ware Systems
CPC classification number: G01J3/02 , G01B9/02051 , G01J3/0256 , G01J3/4535 , G02B26/0841
Abstract: PROBLEM TO BE SOLVED: To obtain a micromachined interferometer that uses a half plane beam splitter. SOLUTION: The beam splitter is optically coupled so as to receive an incident beam I and operates so as to split the incident beam into two interfering beams L1 and L2 that respectively propagates inside different media. A fixed mirror M2, embedded in one of such media, reflects the interfering beam L2 and returns this interfering beam back toward the half plane beam splitter through a medium; while a movable mirror M1, which is controlled by an actuator, reflects the interfering beam L1 and returns this interfering beam back toward the half plane beam splitter, passing through the other medium. A detection plane D1 or D2 detects the interference pattern, produced as a result of the interference between the reflected interfering beams L3 and L4. COPYRIGHT: (C)2008,JPO&INPIT
Abstract translation: 要解决的问题：获得使用半平面分束器的微加工干涉仪。 解决方案：光束分离器被光学耦合以便接收入射光束I并且操作以将入射光束分成分别在不同介质内传播的两个干涉光束L1和L2。 嵌入在这种介质之一中的固定镜M2反射干涉光束L2并通过介质将该干涉光束返回到半平面分束器; 而由致动器控制的可移动反射镜M1反射干涉光束L1，并将该干涉光束返回到半平面分束器，通过另一介质。 检测平面D1或D2检测作为反射干涉光束L3和L4之间的干涉而产生的干涉图案。 版权所有（C）2008，JPO＆INPIT
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公开(公告)号：AT457062T
公开(公告)日：2010-02-15
申请号：AT07301406
申请日：2007-09-28
Applicant: SI WARE SYSTEMS
IPC: G01J3/453
Abstract: A micromachined interferometer (10) is achieved using a half plane beam splitter. The beam splitter is optically coupled to receive an incident beam (I) and operates to split the incident beam into two interfering beams (L1 and L2), each propagating in a different medium. A fixed mirror (M2) embedded in one of the mediums reflects one of the interfering beams (L2) back towards the half plane beam splitter through such medium, while a moveable mirror (M1), which is controlled by an actuator (40), reflects the other interfering beam (L1) back towards said half plane beam splitter through the other medium. A detection plane (D1 or D2) detects an interference pattern produced as a result of interference between the reflected interfering beams (L3 and L4).
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公开(公告)号：DE602007004659D1
公开(公告)日：2010-03-25
申请号：DE602007004659
申请日：2007-09-28
Applicant: SI WARE SYSTEMS
IPC: G01J3/453
Abstract: A micromachined interferometer (10) is achieved using a half plane beam splitter. The beam splitter is optically coupled to receive an incident beam (I) and operates to split the incident beam into two interfering beams (L1 and L2), each propagating in a different medium. A fixed mirror (M2) embedded in one of the mediums reflects one of the interfering beams (L2) back towards the half plane beam splitter through such medium, while a moveable mirror (M1), which is controlled by an actuator (40), reflects the other interfering beam (L1) back towards said half plane beam splitter through the other medium. A detection plane (D1 or D2) detects an interference pattern produced as a result of interference between the reflected interfering beams (L3 and L4).
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