公开(公告)号：EP0983610A1

公开(公告)日：2000-03-08

申请号：EP99909091.3

申请日：1999-03-16

Applicant: Surface Technology Systems Limited

Inventor： MCQUARRIE, Andrew, Duncan

IPC: H01L21/3065

CPC classification number: B01J19/088 ,  B01J7/00 ,  B01J12/00 ,  B01J12/002 ,  B01J12/007 ,  B01J19/24 ,  B01J19/2445 ,  B01J19/245 ,  B01J2219/00038 ,  B01J2219/0004 ,  B01J2219/00058 ,  B01J2219/00162 ,  B01J2219/0807 ,  B01J2219/0809 ,  B01J2219/0841 ,  B01J2219/0869 ,  B01J2219/0871 ,  B01J2219/0883 ,  B01J2219/0894 ,  B81C1/00515 ,  B81C2201/0112 ,  B81C2201/0132 ,  C01B7/24 ,  C07C17/00 ,  G01P15/0802 ,  G01P15/125 ,  H01L21/30604 ,  H01L21/3065 ,  H01L21/30655 ,  H01L21/3081

Abstract: There is disclosed a method of manufacturing a micromechanical device. The method comprises the steps of: (a) etching a substrate (1), having a mask (2) thereon, through an opening in the mask to a desired depth to form a trench (6) having a side wall (4) and a base (5) in the substrate (1); (b) depositing a layer of a protecting substance (7) on the exposed surfaces of the substrate and mask; (c) selectively removing the protecting substance (7) from the base (5); and (d) etching the base (5) using a fluorine-containing etchant. Also disclosed is a micromechanical device formed by the method and an apparatus for manufacturing the micromechanical device.