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公开(公告)号：FI20205318A1
公开(公告)日：2021-10-01
申请号：FI20205318
申请日：2020-03-31
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Inventor： STUNS INGMAR , KESKISAARI AKI , TOIVANEN HANS , HOLMLUND CHRISTER
Abstract: A Fabry-Perot interferometer (300) comprises: - a first mirror plate (100) comprising a first semi-transparent mirror (M1), - a second semi-transparent mirror (M2) to define an optical cavity together with the first mirror (M1), and - one or more first supporting elements (S1) to support the first mirror plate (100), wherein the first mirror plate has a first substantially planar surface (SRF11) and a second substantially planar surface (SRF12) defining the maximum thickness (h100) of the first mirror plate (100), wherein the first mirror plate (100) is bonded to the one or more first supporting elements (S1) by three or more joints (J1), wherein each joint (J1) is bonded to the first mirror plate (100) at a bonding region (REG1), wherein the distance (d1) between each bonding region (REG1) and the first substantially planar surface (SRF11) is greater than 30% of the thickness (h100) of the mirror plate (100), and the distance (d2) between each bonding region (REG1) and the second substantially planar surface (SRF12) is greater than 30% of the thickness (h100) of the mirror plate (100).
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公开(公告)号：FI125762B
公开(公告)日：2016-02-15
申请号：FI20126066
申请日：2012-10-11
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Inventor： SAARI HEIKKI , MÄKYNEN JUSSI , HOLMLUND CHRISTER , KANTOJÄRVI UULA , ANTILA JARKKO , MANNILA RAMI
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公开(公告)号：FI20126066A
公开(公告)日：2014-04-12
申请号：FI20126066
申请日：2012-10-11
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Inventor： SAARI HEIKKI , MÄKYNEN JUSSI , HOLMLUND CHRISTER , KANTOJÄRVI UULA , ANTILA JARKKO , MANNILA RAMI
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公开(公告)号：FI20125495A
公开(公告)日：2013-11-09
申请号：FI20125495
申请日：2012-05-08
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Inventor： ANTILA TAPANI , MAEKYNEN JUSSI , HOLMLUND CHRISTER , ANTILA JARKKO , OLLILA JYRKI , SAARI HEIKKI
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Patent Agency Ranking
公开(公告)号：FI20236129A1
公开(公告)日：2025-04-13
申请号：FI20236129
申请日：2023-10-12
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Inventor： SAARI HEIKKI , HOLMLUND CHRISTER
Abstract: An apparatus (500) for spectral measurements comprises: - a Fabry-Perot interferometer (FP1) having an adjustable mirror gap (dGAP), and - a control unit (CNT1) for controlling the mirror gap (dGAP), wherein the apparatus (500) is arranged to: - set the mirror gap (dGAP) to a first mirror gap value (dGAP,1) to provide a first spectral transmittance peak (P1,A) at a first wavelength (λA), wherein the first spectral transmittance peak (P1,A) has an effective spectral width (Δλ1,A,EFF), - change the mirror gap (dGAP) to a second different mirror gap value (dGAP,2) to provide a second spectral transmittance peak (P2,A) at the first wavelength (λA), and a third spectral transmittance peak (P1,C) at a second wavelength (λC), and - control the position of a mirror (M2) of the Fabry-Perot interferometer (FP1) near the second different mirror gap value (dGAP,2) such that the effective spectral width (Δλ2,A,EFF) of the second spectral transmittance peak (P2,A) is substantially equal to the effective spectral width (Δλ1,A,EFF) of the first spectral transmittance peak (P1,A).
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公开(公告)号：FI125612B
公开(公告)日：2015-12-15
申请号：FI20125495
申请日：2012-05-08
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Inventor： ANTILA TAPANI , MÄKYNEN JUSSI , HOLMLUND CHRISTER , ANTILA JARKKO , OLLILA JYRKI , SAARI HEIKKI
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公开(公告)号：EP3241002A4
公开(公告)日：2018-01-10
申请号：EP15875303
申请日：2015-12-18
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
Inventor： VARPULA AAPO , HOLMLUND CHRISTER , RISSANEN ANNA
CPC classification number: G01J3/26 , B81B7/00 , G01J3/0286 , G01J3/0297 , G02B5/0825 , G02B5/284 , G02B27/142
Abstract: A mirror plate (100) for a Fabry-Perot interferometer (300) comprises: - a substrate (50), which comprises silicon (Si), - a semi-transparent reflective coating (110) implemented on the substrate (50), - a de-coupling structure (DC1) formed on the substrate (50), - a first sensor electrode (G1a) formed on top of the de-coupling structure (DC1), and - a second sensor electrode (G1b), wherein the de-coupling structure (DC1) comprises an electrically insulating layer (60a), and a first stabilizing electrode (G0a), which is located between the first sensor electrode (G1a) and the substrate (50).
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公开(公告)号：EP2414794A4
公开(公告)日：2017-12-20
申请号：EP10758114
申请日：2010-03-31
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT
Inventor： SAARI HEIKKI , HOLMLUND CHRISTER , KANTOJÄRVI UULA , MANNILA RAMI , LAMMINPÄÄ ANTTI , TEPPOLA PEKKA
CPC classification number: G01J3/51 , G01J3/02 , G01J3/0208 , G01J3/0235 , G01J3/12 , G01J3/26 , G01J3/32
Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled into different modes during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.
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9.发明公开
公开(公告)号：EP2847559A4
公开(公告)日：2016-01-06
申请号：EP13787582
申请日：2013-05-08
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT
Inventor： ANTILA TAPANI , MÄKYNEN JUSSI , HOLMLUND CHRISTER , ANTILA JARKKO , OLLILA JYRKI , SAARI HEIKKI
CPC classification number: G02B26/001 , G01B9/02 , G01B2290/25 , G01J3/26 , Y10T29/49826
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