公开(公告)号：WO1997012226A1

公开(公告)日：1997-04-03

申请号：PCT/US1996015354

申请日：1996-09-25

Applicant: TENCOR INSTRUMENTS

Inventor： TENCOR INSTRUMENTS ,  GROSS, Kenneth, P. ,  ALTENDORFER, Hubert ,  KREN, George

IPC: G01N21/47

CPC classification number: G01N21/9501 ,  G01N21/94

Abstract: A light beam is directed towards a surface (12) along a direction normal to the surface (12). There is a scanning means (114, 116, 118) which causes the surface (12) to move so that the beam scans the surface (12) along a spiral path. Light scattered by the surface (12) within a first range of angles is collected by a first collection means (32, 34) and directed to a first detector (42), and light scattered within a second range is collected by a second collection means (38) and is directed to a second detector (44). The two ranges of collection angles are different, so that the first detector (42) is optimized to detect scattering from large particles, and the second detector (44) is optimized to detect light from small particles and defects.

Abstract translation: 光束沿着垂直于表面（12）的方向指向表面（12）。 存在使得表面（12）移动的扫描装置（114,116,118），使得光束沿着螺旋路径扫描表面（12）。 由第一收集装置（32,34）收集由表面（12）在第一角度范围内散射的光并被引导到第一检测器（42），并且在第二范围内散射的光由第二收集装置 （38）并且被引导到第二检测器（44）。 收集角度的两个范围是不同的，使得第一检测器（42）被优化以检测来自大颗粒的散射，并且第二检测器（44）被优化以检测来自小颗粒和缺陷的光。