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公开(公告)号：DE59107982D1
公开(公告)日：1996-08-14
申请号：DE59107982
申请日：1991-02-27
Applicant: TENCOR INSTRUMENTS
Inventor： MALIN COSMAS , SAWATZKI HARRY
IPC: B65G49/07 , B65G1/00 , H01L21/677 , H01L21/687 , H01L21/00
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