公开(公告)号：WO1996030747A1

公开(公告)日：1996-10-03

申请号：PCT/US1996004273

申请日：1996-03-28

Applicant: TENCOR INSTRUMENTS

Inventor： TENCOR INSTRUMENTS ,  JOHNSON, Ralph ,  WELLS, Keith ,  GALBRAITH, Lee, K.

IPC: G01N21/88

CPC classification number: G01N21/94 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956

Abstract: Light scattered from an illuminated spot (54) on a patterned wafer (56) is first passed through a dielectric filter (74) and then through an optical fiber bundle (76) to a detector (72). The filter (74) controls the aperture of the light that is passed to a desired azimuth angle and the optical fiber bundle (76) further limits the aperture.

Abstract translation: 从图案化晶片（56）上的照明光点（54）散射的光首先通过介质滤光器（74），然后通过光纤束（76）传送到检测器（72）。 滤光器（74）控制被传递到所需方位角的光的孔径，并且光纤束（76）进一步限制光圈。