公开(公告)号：AU3376597A

公开(公告)日：1998-01-05

申请号：AU3376597

申请日：1997-06-03

Applicant: TENCOR INSTRUMENTS

Inventor： LESLIE BRIAN C ,  NIKOONAHAD MEHRDAD ,  WELLS KEITH B

IPC: G01N21/956 ,  G01N21/94 ,  G01N21/00

Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface. Different defect maps provided by the output of the detectors can be compared to identify and classify the defects. The imaging function of the array of sensors combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the system.

公开(公告)号：EP0979398A4

公开(公告)日：2000-02-16

申请号：EP97929786

申请日：1997-06-03

Applicant: TENCOR INSTRUMENTS

Inventor： LESLIE BRIAN C ,  NIKOONAHAD MEHRDAD ,  WELLS KEITH B

IPC: G01N21/956 ,  G01N21/94 ,  G01N21/00 ,  G01N21/88

CPC classification number: G01N21/95607 ,  G01N21/94 ,  G01N21/9501

Abstract: In an optical scanning system (200) for detecting particles and pattern defects on a sample surface (240), a light beam (238) is focused to an illuminated spot on the surface and the spot is scanned across a scan line. A detector (11b) is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot.

Abstract translation: 在用于检测样本表面（240）上的粒子和图案缺陷的光学扫描系统（200）中，光束（238）被聚焦到表面上的照亮点，并且该点在扫描线上被扫描。 检测器（11b）定位在表面附近以收集来自检测器包括传感器的一维或二维阵列的点的散射光。 在沿着扫描线的多个位置中的每一个处从照明点散射的光被聚焦到阵列中的相应传感器上。 相对于照明光束对称放置的多个检测器检测来自该点的横向和前向散射光。

公开(公告)号：EP0804722A4

公开(公告)日：1999-03-24

申请号：EP95943798

申请日：1995-12-08

Applicant: TENCOR INSTRUMENTS

Inventor： JORDON JOHN R III ,  NIKOONAHAD MEHRDAD ,  WELLS KEITH B

IPC: G01B11/30 ,  G01B11/02 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01R31/28 ,  G01R31/308 ,  G06T1/00 ,  G06T7/00 ,  H01L21/66 ,  G01N21/00

CPC classification number: G01N21/95623 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/8825 ,  G01R31/2831 ,  G01R31/308 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A high throughput surface inspection system with enhanced detection sensitivity is described. The acquired data is processed in real time at a high rate of below 50 MHZ thereby reducing the cost for data processing. Anomalies are detected and verified by comparing adjacent repeating patterns and the height of the surface (40) is monitored and corrected dynamically to reduce misregistration errors between adjacent repeating patterns. Local thresholds employing neighborhood information are used for detecting and verifying the presence of anomalies. The sampled point spread function of the combined illumination (22) and collection system (90, 92, 111b) is exploited for anomaly detection and verification.

公开(公告)号：EP0804713A4

公开(公告)日：1999-03-24

申请号：EP95916365

申请日：1995-04-13

Applicant: TENCOR INSTRUMENTS

Inventor： NIKOONAHAD MEHRDAD ,  RIGG PHILIP R ,  WELLS KEITH B ,  CALHOUN DAVID S

IPC: G01B11/02 ,  G01B11/30 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66 ,  G01B11/00

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N21/956

Abstract: A surface height detection and positioning device for use in a surface inspection system. A light beam (25) impinges obliquely upon the surface (22), and a position detector (38) with a mechanical window (45) defining an aperture (46) receives specularly reflected light (33) producing a plurality of electrical signals. The aperture's width (46), along a scan direction, is of sufficient size to create a train of signals from each of the plurality of signals, having a frequency equal to the scan frequency. These signals carry information responsive to the position of the reflected beam (33) impinging on the detector and the beam's intensity. To abrogate information responsive to intensity variations at the detector, an electronic circuit (100) determines the sum and the difference of the plurality of signals, producing a summed signal and a difference signal, respectively. The difference signal is divided by the summed signal, thereby producing a normalized signal which represents the height of the surface.