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    System for detecting and measuring acceleration
    1.
    发明公开
    System for detecting and measuring acceleration 失效
    系统zur Feststellung und Messung von Beschleunigung。

    公开(公告)号：EP0613009A2

    公开(公告)日：1994-08-31

    申请号：EP94105604.6

    申请日：1991-09-30

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Boysel, Robert M. ,  Sampsell, Jeffrey B.

    IPC: G01P15/08

    CPC classification number: G01P15/135 ,  B81B3/0002 ,  B81B2201/0235 ,  B81C1/00246 ,  G01P15/0802

    Abstract: It is possible to determine acceleration using an array of micro-machined elements. The invention described herein details how to do so by fabricating an array of structures with a substrate (610), addressing circuitry (612), a spacer layer (604) forming a well over the addressing circuitry, and a deflection element (606) over the well. The deflection elements are configured so each element is deflected by a higher acceleration. The invention also shows one embodiment of the invention.

    Abstract translation: 可以使用微加工元件阵列来确定加速度。 本文描述的本发明详细描述了如何通过用衬底（610），寻址电路（612），在寻址电路上形成阱的间隔层（604）和偏转元件（606）的结构阵列 那个井 偏转元件被配置成使得每个元件被较高的加速度偏转。 本发明还示出了本发明的一个实施例。

    Improvements in or relating to micromechanical devices
    4.
    发明公开
    Improvements in or relating to micromechanical devices 失效
    VerbesserungenfürmikromechanischeGeräte

    公开(公告)号：EP0713117A1

    公开(公告)日：1996-05-22

    申请号：EP95117185.9

    申请日：1995-10-31

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Smith, Gregory C. ,  Gove, Robert J. ,  Boysel, Robert M. ,  Markandey, Vishal ,  Hornbeck, Larry J.

    IPC: G02B26/08

    CPC classification number: B81C1/00111 ,  B81B2201/042 ,  B81C2201/014 ,  G02B26/0841 ,  G06K15/1252 ,  G09G3/20 ,  G09G3/2022 ,  G09G2340/0407 ,  G09G2340/0414 ,  G09G2340/0421 ,  G09G2340/0442 ,  G09G2360/02 ,  H04N1/1934 ,  H04N5/4401 ,  H04N5/7458 ,  H04N7/01

    Abstract: A support pillar 408 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 404 supported by a substrate 400 and covered with a metal layer 406. The support pillar 408 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 408, and depositing a metal layer 406 over the support pillar 408 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 410 over the pillars 408. After applying the spacer layer 410, holes 414 are patterned into the spacer layer to remove any spacer material that is covering the pillars. The spacer layer is then reflowed to fill the holes and lower the surface of the spacer layer such that the surface is coplanar with the tops of the support pillars 408.

    Abstract translation: 用于微机械装置，特别是数字微镜装置的支撑柱408，其包括由衬底400支撑并被金属层406覆盖的支柱材料404.支撑柱408通过将柱材料层沉积在 衬底400，图案化柱层以限定支撑柱408，以及在包围支撑柱的支撑柱408上沉积金属层406。 可以通过在柱408上施加间隔层410来产生甚至具有柱顶部的平面。在施加间隔层410之后，将孔414图案化成间隔层，以移除覆盖柱的任何间隔物材料。 然后将间隔层回流以填充孔并降低间隔层的表面，使得表面与支撑柱408的顶部共面。图像

    Improved accelerometers
    6.
    发明公开
    Improved accelerometers 失效
    Verbesserte Beschleunigungsmesser

    公开(公告)号：EP0691542A1

    公开(公告)日：1996-01-10

    申请号：EP95109996.9

    申请日：1995-06-27

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Boysel, Robert M.

    IPC: G01P15/08 ,  G01P15/125 ,  G01P15/13

    CPC classification number: G01P15/093 ,  C04B33/13 ,  G01P15/08 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0831

    Abstract: An apparatus for measuring acceleration using micro-mechanical elements (20, 30, 60, 70, 120). One embodiment has one or more acceleration elements (10) wherein each element includes a mass (12) suspended at the ends thereof with a flexible hinge (13). The mass (12) may deflect in a first and second rotational direction about an axis in response to acceleration. Each element (10) further has electrodes (15) operable to sense deflection of the mass (12) when the mass (12) is deflected in either direction. Detection circuits (25, 65, 125) operate differently depending on whether the deflection is contacting, non-contacting, or feedback.

    Abstract translation: 一种使用微机械元件（20,30,60,70,120）测量加速度的装置。 一个实施例具有一个或多个加速元件（10），其中每个元件包括在其端部处悬挂有柔性铰链（13）的质量块（12）。 质量块（12）可以响应于加速度在围绕轴线的第一和第二旋转方向上偏转。 每个元件（10）还具有电极（15），当所述质量块（12）沿任一方向偏转时，所述电极（15）可操作以感测质量块（12）的偏转。 检测电路（25,65,125）根据偏转是否接触，非接触或反馈而不同地运行。

    Printer using an array of deformable mirror devices (DMD)
    7.
    发明公开
    Printer using an array of deformable mirror devices (DMD) 失效
    Drucker mit verformbarer Matrixspiegelvorrichtung（DMD）。

    公开(公告)号：EP0556591A1

    公开(公告)日：1993-08-25

    申请号：EP93100994.8

    申请日：1993-01-22

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Nelson, William E. ,  Sampsell, Jeffrey B. ,  Urbanus, Paul M. ,  Boysel, Robert M.

    IPC: G06K15/12

    CPC classification number: G06K15/1252 ,  H05K3/0082

    Abstract: A method for printing or exposing photosensitive media is disclosed herein. The method uses standard spatial light modulators (10) with standard addressing circuitry. The data is written to the device (10) for the first row, the photosensitive media is exposed to the light reflected from the device, and the device is turned off. The data from the first row is then written to the second line of the device (14), and new data is loaded into the first line (12) of the device. The media is again exposed. This is repeated until the entire region of the drum is completely exposed. The device (10) can be repositioned to cover a different region of the drum and the process would be repeated.

    Abstract translation: 本文公开了用于印刷或曝光光敏介质的方法。 该方法使用具有标准寻址电路的标准空间光调制器（10）。 将数据写入用于第一行的设备（10），光敏介质暴露于从设备反射的光，并且该设备被关闭。 然后将来自第一行的数据写入设备（14）的第二行，并将新数据加载到设备的第一行（12）中。 媒体再次曝光。 重复该步骤直到滚筒的整个区域完全暴露。 装置（10）可以重新定位以覆盖滚筒的不同区域，并且该过程将被重复。

    Integrated-optic waveguide devices and method
    8.
    发明公开
    Integrated-optic waveguide devices and method 失效
    Integrierte optische Wellenleitervorrichtungen und Herstellungsverfahren。

    公开(公告)号：EP0505844A2

    公开(公告)日：1992-09-30

    申请号：EP92104292.5

    申请日：1992-03-12

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Boysel, Robert M. ,  Magel, Gregory A.

    IPC: G02B26/00 ,  G02B26/02 ,  G02B6/12 ,  G02F1/01

    CPC classification number: G02B6/122 ,  G02B26/02 ,  G02F1/011 ,  G02F1/3132 ,  G02F2001/0142 ,  G02F2201/06 ,  G02F2203/07 ,  G02F2203/22

    Abstract: It is possible to utilize changes in the complex effective refractive index caused by bringing a metal membrane in close proximity to the core of an optical waveguide to form many devices. The invention described herein provides structures and processes that do 50, the structure comprising a substrate (10), a lower cladding (14), a waveguide core (16), a removable upper cladding (18) which supports a metal membrane (22), and an electrode (12) for deflecting said membrane.
    Switchable devices using this structure include, but are not limited to, polarizers, mode converters, optical switches, Bragg devices, directional couplers and channel waveguides.

    Abstract translation: 可以利用通过使金属膜紧邻光波导的芯而引起的复合有效折射率的变化，以形成许多器件。 本文描述的本发明提供的结构和过程为50，该结构包括衬底（10），下包层（14），波导芯（16），支撑金属膜（22）的可移除上包层（18） ，以及用于偏转所述膜的电极（12）。 使用该结构的可切换装置包括但不限于偏振器，模式转换器，光开关，布拉格器件，定向耦合器和沟道波导。

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