公开(公告)号：EP0775669B1

公开(公告)日：2001-05-02

申请号：EP96118275.5

申请日：1996-11-14

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Smith, Douglas M. ,  Johnston, Gregory P. ,  Ackerman, William C. ,  Jeng, Shin-Puu ,  Gnade, Bruce E. ,  Stoltz, Richard A. ,  Maskara, Alok ,  Ramos, Teresa

IPC: C01B13/32 ,  B01J13/00 ,  C01B33/158

CPC classification number: H01L21/02126 ,  B01J13/0091 ,  C01B33/1585 ,  C03C1/008 ,  C03C17/25 ,  C03C2217/213 ,  C03C2218/113 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/02359 ,  H01L21/31695

公开(公告)号：EP0775669A2

公开(公告)日：1997-05-28

申请号：EP96118275.5

申请日：1996-11-14

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Smith, Douglas M. ,  Johnston, Gregory P. ,  Ackerman, William C. ,  Jeng, Shin-Puu ,  Gnade, Bruce E. ,  Stoltz, Richard A. ,  Maskara, Alok ,  Ramos, Teresa

IPC: C01B13/32 ,  B01J13/00

CPC classification number: H01L21/02126 ,  B01J13/0091 ,  C01B33/1585 ,  C03C1/008 ,  C03C17/25 ,  C03C2217/213 ,  C03C2218/113 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/02359 ,  H01L21/31695

Abstract: An aerogel precursor sol is disclosed herein. This aerogel precursor sol comprises a metal-based aerogel precursor reactant and a first solvent comprising a polyol; wherein, the molar ratio of the first solvent molecules to the metal atoms in the reactant is at least 1 : 16 . Preferably, the first solvent is glycerol. Preferably, the aerogel precursor reactant may selected from the group consisting of metal alkoxides, at least partially hydrolyzed metal alkoxides, particulate metal oxides, and combinations thereof. Typically, the molar ratio of the first solvent molecules to the metal atoms in the reactant is no greater than 12 : 1, and preferably, the molar ratio of the first solvent molecules to the metal atoms in the reactant is between 1 : 2 and 12 : 1. In some embodiments, the molar ratio of the first solvent molecules to the metal atoms in the reactant is between 2.5 :1 and 12:1. In some embodiments, the first solvent comprises a glycol. In some embodiments, the reactant is tetraethoxysilane that may be at least partially hydrolyzed. In some embodiments, the first polyol is selected from the group consisting of 1,2,4-butanetriol; 1,2,3- butanetriol; 2 methyl-propanetriol; and 2-(hydroxymethyl)-1,3-propanediol; 1-4, 1-4, butanediol; and 2-methyl-1,3-propanediol, and combinations thereof. This invention allows controlled porosity thin film nanoporous aerogels to be deposited, gelled, aged, and dried without atmospheric controls. In another aspect, this invention allows controlled porosity thin film nanoporous aerogels to be deposited, gelled, rapidly aged at an elevated temperature, and dried with only passive atmospheric controls, such as limiting the volume of the aging chamber.

Abstract translation: 本文公开了一种气凝胶前体溶胶。 该气凝胶前体溶胶包括金属基气凝胶前体反应物和包含多元醇的第一溶剂; 其中，反应物中第一溶剂分子与金属原子的摩尔比为至少1:16。 优选地，第一溶剂是甘油。 优选地，气凝胶前体反应物可以选自金属醇盐，至少部分水解的金属醇盐，颗粒金属氧化物及其组合。 通常，反应物中第一溶剂分子与金属原子的摩尔比不大于12:1，并且优选地，反应物中第一溶剂分子与金属原子的摩尔比在1:2和12之间 在一些实施方案中，反应物中第一溶剂分子与金属原子的摩尔比为2.5:1至12:1。 在一些实施方案中，第一溶剂包含二醇。 在一些实施方案中，反应物可以是至少部分水解的四乙氧基硅烷。 在一些实施方案中，第一多元醇选自1,2,4-丁三醇; 1,2,3-丁三醇; 2甲基 - 丙三醇; 和2-（羟甲基）-1,3-丙二醇; 1-4,1-4，丁二醇; 和2-甲基-1,3-丙二醇及其组合。 本发明允许控制孔隙率的薄膜纳米多孔气凝胶沉积，凝胶化，老化和干燥而无需大气控制。 另一方面，本发明允许控制的孔隙率薄膜纳米多孔气凝胶沉积，凝胶化，在​​高温下快速老化，并且仅用无源大气控制干燥，例如限制老化室的体积。

公开(公告)号：EP0775669A3

公开(公告)日：1997-08-13

申请号：EP96118275.5

申请日：1996-11-14

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Smith, Douglas M. ,  Johnston, Gregory P. ,  Ackerman, William C. ,  Jeng, Shin-Puu ,  Gnade, Bruce E. ,  Stoltz, Richard A. ,  Maskara, Alok ,  Ramos, Teresa

IPC: C01B13/32 ,  B01J13/00

CPC classification number: H01L21/02126 ,  B01J13/0091 ,  C01B33/1585 ,  C03C1/008 ,  C03C17/25 ,  C03C2217/213 ,  C03C2218/113 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02343 ,  H01L21/02359 ,  H01L21/31695

Abstract: An aerogel precursor sol is disclosed herein. This aerogel precursor sol comprises a metal-based aerogel precursor reactant and a first solvent comprising a polyol; wherein, the molar ratio of the first solvent molecules to the metal atoms in the reactant is at least 1 : 16 . Preferably, the first solvent is glycerol. Preferably, the aerogel precursor reactant may selected from the group consisting of metal alkoxides, at least partially hydrolyzed metal alkoxides, particulate metal oxides, and combinations thereof. Typically, the molar ratio of the first solvent molecules to the metal atoms in the reactant is no greater than 12 : 1, and preferably, the molar ratio of the first solvent molecules to the metal atoms in the reactant is between 1 : 2 and 12 : 1. In some embodiments, the molar ratio of the first solvent molecules to the metal atoms in the reactant is between 2.5 :1 and 12:1. In some embodiments, the first solvent comprises a glycol. In some embodiments, the reactant is tetraethoxysilane that may be at least partially hydrolyzed. In some embodiments, the first polyol is selected from the group consisting of 1,2,4-butanetriol; 1,2,3- butanetriol; 2 methyl-propanetriol; and 2-(hydroxymethyl)-1,3-propanediol; 1-4, 1-4, butanediol; and 2-methyl-1,3-propanediol, and combinations thereof. This invention allows controlled porosity thin film nanoporous aerogels to be deposited, gelled, aged, and dried without atmospheric controls. In another aspect, this invention allows controlled porosity thin film nanoporous aerogels to be deposited, gelled, rapidly aged at an elevated temperature, and dried with only passive atmospheric controls, such as limiting the volume of the aging chamber.