MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF SHEET ROLL BODY

    公开(公告)号:JP2003212409A

    公开(公告)日:2003-07-30

    申请号:JP2002018340

    申请日:2002-01-28

    Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method and a manufacturing apparatus of a sheet roll body providing stable winding while reducing flaws and electrification of a sheet surface. SOLUTION: The manufacturing apparatus of the sheet roll body has at least a plurality of conveying rollers conveying a long sheet, a winding device winding the long sheet conveyed from the conveying rollers, and a contact pressure roller pressing against the sheet roll body formed by the winding device. It is characterized by that at least one roller of the conveying rollers or the contact pressure roller has recessed and projecting parts on a surface, a maximum circumferential length L of the recessed part is ≤100 mm in a contact portion with the sheet, and a boundary between the projecting part and the recessed part is a curved face. COPYRIGHT: (C)2003,JPO

    PLASMA ELECTRODE, PLASMA PROCESSING ELECTRODE, CVD ELECTRODE, PLASMA CVD DEVICE, AND METHOD FOR MANUFACTURING SUBSTRATE WITH THIN FILM
    5.
    发明公开
    PLASMA ELECTRODE, PLASMA PROCESSING ELECTRODE, CVD ELECTRODE, PLASMA CVD DEVICE, AND METHOD FOR MANUFACTURING SUBSTRATE WITH THIN FILM 审中-公开
    等离子电极,等离子处理电极,电极CVD,等离子CVD装置和方法用于生产具有薄膜的基材

    公开(公告)号:EP3073808A4

    公开(公告)日:2017-04-19

    申请号:EP14863952

    申请日:2014-11-12

    CPC classification number: C23C16/50 H01J37/32532 H01J37/34 H01J37/3402

    Abstract: The present invention is a plasma electrode comprising: an electrode main body having a discharge surface on the outer circumference surface thereof, the interior of said electrode main body having a magnet disposed therein for forming a tunnel-shaped magnetic field on the discharge surface; and ground members which face at least a portion of the discharge surface with a gap therebetween and face each other so as to sandwich the electrode main body therebetween. The discharge surface surrounds the outer circumference of the electrode main body, either with or without a gap interposed therebetween. According to the invention, a plasma electrode capable of achieving both improved plasma processing speed and stable discharge is provided.

    Abstract translation: 本发明是一种等离子电极,包括:具有在其外圆周表面上的放电表面的电极主体,具有磁体,所述电极主体的内部,设置在其中用于形成放电表面上的隧道形磁场; 并且其与存在其间的间隙面对至少放电面的一部分,并且面对海誓山盟以夹着电极主体之间的接地构件。 放电表面围绕电极主体的外周,具有或不具有置于其间的间隙。 。根据本发明,提供了一种能够同时实现改进的等离子体处理的速度和稳定的放电的等离子体电极。

Patent Agency Ranking