公开(公告)号：JP2004200400A

公开(公告)日：2004-07-15

申请号：JP2002367110

申请日：2002-12-18

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： HASEGAWA MAKOTO

IPC: H01L21/3065 ,  H01L21/60 ,  H01L21/768 ,  H01L21/8242 ,  H01L23/522

CPC classification number: H01L27/10855 ,  H01L21/76897 ,  H01L27/10888 ,  H01L27/10891

Abstract: PROBLEM TO BE SOLVED: To provide a semiconductor device capable of preventing an SAC connected to a semiconductor substrate through adjoining wirings from shorting with the wirings.
SOLUTION: A semiconductor device 100 comprises a plurality of wirings 120 formed on the surface of a semiconductor substrate 110, a first upper surface protective layer 130 provided on each upper surface of the wiring 120, a second upper surface protective layer 200 which is made of such a material as the etching speed of which is higher than that of the first upper surface protective layer and is provided on each upper surface of the first upper surface protective layer, wiring 120, a side surface protective film 150 provided on the side surfaces of the first and second upper surface protective layers, an interlayer insulating film 160 which is made of such a material as the etching speed of which is higher than that of the first upper surface protective layer and fills a space between the wirings 120 while covering the second upper surface protective layer, and a contact hole 180 which reaches the upper surface of the semiconductor substrate through the interlayer insulating film between the wirings 120 and comprises on the inner wall a step 180b where the side surface protective film protrudes.
COPYRIGHT: (C)2004,JPO&NCIPI

公开(公告)号：JP2002214796A

公开(公告)日：2002-07-31

申请号：JP2001009239

申请日：2001-01-17

Applicant: TOSHIBA CORP

Inventor： OSADA HIROYUKI ,  KAMATA YOSHITAKA ,  YAMAGUCHI TAKASHI ,  HASEGAWA MAKOTO ,  HARUHARA KAZUYUKI ,  YAMAMOTO TAKESHI

IPC: G02F1/1339 ,  G02F1/1335 ,  G02F1/1337 ,  G03F7/20

Abstract: PROBLEM TO BE SOLVED: To provide a method for producing liquid crystal display device which suppresses a variation of the cell gap in spite of using a light shielding spacer. SOLUTION: This method for producing liquid crystal display device is a producing method of a liquid crystal display device 1 which is provided with a pair of substrates 7, 18 which are disposed to face oppositely, spacers 5 which are formed on the opposing surface of one side of the substrates 7, 18 and keep the gap between substrates 7, 18 constant and a liquid crystal layer 4 which is held between the substrates 7, 18. This method for producing liquid crystal display device comprises a process of forming an organic film which contains photosensitive resin and color material and has optical density of >=1.6 for the light of 365 nm wavelength on the opposing surface of one side of the substrates 7, 18, a process of disposing an exposure mask apart 50 to 150 μm from the organic film and exposing the organic film via the exposure mask and a process of forming a light shielding pattern which is used as the spacer 5 by developing the organic film after the exposure with a developer.

公开(公告)号：JPH08114795A

公开(公告)日：1996-05-07

申请号：JP25045194

申请日：1994-10-17

Applicant: TOSHIBA CORP

Inventor： HASEGAWA MAKOTO ,  SHOJI MASAHITO ,  HISATAKE YUZO

IPC: G02F1/13 ,  G02F1/1335

Abstract: PURPOSE: To realize a display device constituted so that information is offered with respect to only an observer being in the direction of a specified visual field angle. CONSTITUTION: The display device is provided with a liquid crystal display element being as a display panel emitting display light and an optical control panel 1 which is a plate-like optical control element used by being superposed on the display panel, which is provided with an absorbing axis selectively absorbing the light advancing in a specified direction among the incident light 2a provided with the plural advancing directions and which selectively emits the light advancing in the specified direction among the light being at a 10 deg.

公开(公告)号：JPH05335283A

公开(公告)日：1993-12-17

申请号：JP21834692

申请日：1992-07-23

Applicant: TOKYO ELECTRON LTD ,  TOSHIBA CORP ,  TEL YAMANISHI KK

Inventor： HASEGAWA MAKOTO ,  ISHIKAWA YOSHIO ,  HIRATSUKA MASATO

IPC: C23C14/34 ,  C23C16/50 ,  C23C16/509 ,  C23F4/00 ,  H01L21/302 ,  H01L21/3065

Abstract: PURPOSE:To improve in-plane uniformity of the etching rate. CONSTITUTION:A magnetron plasma etching apparatus includes a susceptor 12 which places thereon a silicon wafer and serves as an electrode. Around the susceptor 12 there is disposed a carbon ring 22 having a larger outer diameter than the wafer and having lower electric resistance than the same. The carbon ring 22 is electrically connected with the susceptor 12. The carbon ring 22 improves wafer in-plane uniformity of etching.

公开(公告)号：JPH05127147A

公开(公告)日：1993-05-25

申请号：JP28680391

申请日：1991-10-31

Applicant: TOSHIBA CORP

Inventor： HASEGAWA MAKOTO ,  OTAGURO HIROSHI ,  TAKATO TAKAKI

IPC: G02F1/1333

Abstract: PURPOSE:To obtain the liquid crystal display element which is thin and light, is simple in production process and is high economicity by disposing two sheets of electrodes, at least one of which are transparent, on both sides of a thin-film substrate consisting of a ferroelectric high-polymer liquid crystal. CONSTITUTION:This liquid crystal display element is constituted by disposing two sheets of the electrodes 2a, 2b, at least one of which are transparent, on both sides of the thin-film substrate 1 consisting of the ferroelectric high-polymer liquid crystal. This ferroelectric high-polymer liquid crystal refers to a high-polymer liquid crystal which has spontaneous polarization and inverts the direction of the spontaneous polarization by impression of an external electric field. Above all, the ferroelectric high- polymer liquid crystal obtd. by bonding such a mesogen group having asymmetric carbon and dipole moments and forming a chiral smectic C liquid crystal layer mainly as a side chain to the main chain of the high polymer is more adequate. The ferroelectric liquid crystal of the side chain does not receive much restraining force from the main chain and the liquid crystal regularity is maintained if the high-polymer liquid crystal which is the main chain of the ferroelectric high-polymer liquid crystal formed by introducing the ferroelectric low-polymer liquid crystal to the side chain of the high-polymer liquid crystal is highly resilient.

公开(公告)号：JPH0529269A

公开(公告)日：1993-02-05

申请号：JP20740891

申请日：1991-07-23

Applicant: TOKYO ELECTRON LTD ,  TOSHIBA CORP ,  TEL YAMANISHI KK

Inventor： HORIOKA KEIJI ,  HASEGAWA MAKOTO ,  ISHIKAWA YOSHIO ,  HIRATSUKA MASATO

IPC: H01L21/203 ,  H01L21/205 ,  H01L21/285 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31

Abstract: PURPOSE:To provide a magnetron plasma processing device where a process object can be lessened in charge-up damage done to its peripheral part. CONSTITUTION:A conductive ring 22 higher than a wafer in electrical conductivity is provided surrounding the periphery of the wafer 10. Electrons located in the vicinity of the outer periphery of a plasma generating region are taken in by the conductive ring 22 to lessen the vicinity of the periphery of the plasma generating region in electron density. By this setup, ions injected into a processed object can be lessened in number.

公开(公告)号：JPH04356019A

公开(公告)日：1992-12-09

申请号：JP23291591

申请日：1991-09-12

Applicant: TOSHIBA CORP

Inventor： TAKATO TAKAKI ,  SAITO HIROKO ,  SAKAMOTO MASANORI ,  MIYAMURA MASATAKA ,  MORI YASUSHI ,  KAWADA YASUSHI ,  HASEGAWA MAKOTO ,  GOKOCHI TORU

IPC: G02F1/1337

Abstract: PURPOSE:To form oriented films which can uniformly control the orientation state of a liquid crystal in a short period of time without contaminating substrates and without entailing the generation of static electricity and to provide the liquid crystal display element having such oriented films. CONSTITUTION:This display element has a pair of the substrates 11 and 12 disposed to face each other apart a specified distance, the oriented films 28 and 29 coating the opposite surfaces of these substrates and the liquid crystal 10 sealed between the substrates 11 and 12 via the oriented films 28 and 29. At least either of the oriented film 28 or 29 is the high-polymer thin film which is formed by providing the thin film of a photosensitive high polymer on the substrate, selectively exposing the prescribed regions of the thin film and further subjecting the film to development processing. and has the grooves of prescribed patterns on the front surface side in contact with the liquid crystal.

公开(公告)号：JP2005150439A

公开(公告)日：2005-06-09

申请号：JP2003386526

申请日：2003-11-17

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： ISHIDA KATSUHIRO ,  HASEGAWA MAKOTO ,  ITO KATSUYA ,  SUGIURA HIROSHI

IPC: H01L21/4763 ,  H01L21/768 ,  H01L23/48 ,  H01L23/522 ,  H01L23/532

CPC classification number: H01L23/5226 ,  H01L21/76838 ,  H01L23/53223 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

Abstract: PROBLEM TO BE SOLVED: To improve electric characteristics and process stability by suppressing the deterioration of degree of margin of deviation in the mating of lithography treatment of an interlayer wiring structure accompanied by a detailed circuitry designing rule. SOLUTION: The Al-Cu film 12 of a lower layer side wiring layer and the TiN film 13 of a barrier metal are formed on a silicon substrate 11 and the d-TEOS film 15 of an interlayer insulating film is formed thereon as an interlayer wiring layer 14 to bury W plugs 16a, 16b and flatten them. A TiN film 17, an Al-Cu film 18 and a TiN film 19 are formed as an upper layer side wiring layer and patterning is applied thereon. In this case, etching is effected so as to be deeper than the surface of the interlayer wiring layer 14 by a dropping size (f) to form a dropping part P. According to this method, a margin can be kept in the depthwise direction by a size (f) when the deviation of mating A exists whereby an insulating distance can be secured. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：通过抑制伴随着详细的电路设计规则的层间布线结构的光刻处理的配合中的偏差裕度的劣化，来改善电特性和工艺稳定性。 解决方案：在硅衬底11上形成下层侧布线层的Al-Cu膜12和阻挡金属的TiN膜13，在其上形成层间绝缘膜的d-TEOS膜15作为 埋入W插头16a，16b并使它们变平的层间布线层14。 形成TiN膜17，Al-Cu膜18和TiN膜19作为上层侧配线层，并在其上施加图案化。 在这种情况下，通过滴落尺寸（f）进行蚀刻以使其比层间布线层14的表面更深以形成滴下部分P.根据该方法，可以通过以下方式沿着深度方向保留边缘： 当匹配A的偏差存在时尺寸（f），从而可以确保绝缘距离。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2003131236A

公开(公告)日：2003-05-08

申请号：JP2001329533

申请日：2001-10-26

Applicant: TOSHIBA CORP

Inventor： SHOBARA KIYOSHI ,  OSADA HIROYUKI ,  HASEGAWA MAKOTO ,  YAMAMOTO TAKESHI

IPC: G02B5/20 ,  G02F1/1335 ,  G02F1/1337 ,  G02F1/1339

Abstract: PROBLEM TO BE SOLVED: To provide a liquid crystal display device wherein an image quality defect is hardly caused even though the liquid crystal display device is provided with a peripheral light shielding layer. SOLUTION: The liquid crystal display device 1 is provided with a first substrate 7, a first electrode 10 provided on the first substrate 7, the peripheral light shielding layer 12 provided at the peripheral part of the surface of the first substrate 7, on which the first electrode 10 is provided, a first alignment layer 13 with which the surface of the first electrode 10 and the peripheral light shielding layer 12 of the first substrate 7 is coated, a second substrate 15 opposed to the first alignment layer 13, a second electrode 16 provided on the surface opposed to the first alignment layer 13 of the second substrate 15, a second alignment layer 17 with which the surface of the second electrode 16 of the second substrate 15 is coated and a liquid crystal layer 4 interposed between the first alignment layer 13 and the second alignment layer 17. The device 1 is characterized in that at least part of a first part of the first alignment layer 13, with which the peripheral light shielding layer 12 is coated and which comes in contact with the liquid crystal layer 4, is thicker than a second part of the first alignment layer 13, which is positioned on the first electrode 10.

公开(公告)号：JP2002350836A

公开(公告)日：2002-12-04

申请号：JP2001158813

申请日：2001-05-28

Applicant: TOSHIBA CORP

Inventor： HASEGAWA MAKOTO ,  YAMAMOTO TAKESHI

IPC: G02B5/30 ,  G02F1/13 ,  G02F1/1335

Abstract: PROBLEM TO BE SOLVED: To enhance manufacturing yield by preventing the damage of a polarized light reflecting layer due to the impact generated when a flat face display element having the polarized light reflecting layer is cutout in a regulated size and to maintain the durability of a sealing agent by heightening the adhesive strength of the sealing agent of the flat face display element to obtain satisfactory display quality for a long time. SOLUTION: In a counter substrate 12, a cholesteric liquid crystal polymer layer 27 is formed on a glass substrate 24 in such a manner that the end face of the cholesteric liquid crystal polymer layer is positioned in the inner side by 1 mm from the end face of the glass substrate 24, which corresponds to the cutout line 64 when the liquid crystal display element 10 is cutout in the regulated size. The sealing agent 14 is disposed so as to be positioned on the area of the cholesteric liquid crystal polymer layer 27.