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公开(公告)号:JPH0862161A
公开(公告)日:1996-03-08
申请号:JP19931394
申请日:1994-08-24
Applicant: TOSHIBA CORP
Inventor: TSUCHIYA TAKEO , FUJII MASAJI , UYAMA KIICHIRO , MORI MIKI , SUZUKI HIROKATSU
IPC: G01N23/18
Abstract: PURPOSE: To provide a radiation inspecting apparatus which can suitably obtain the sectional image of a specimen to be inspected by utilizing the difference of radiation energy distribution by the radiation absorption of the specimen to be inspected. CONSTITUTION: X-ray beams 3 of X-ray energies E1, E2 varying at each time generated from an X-ray tube 2 at moving positions are projected to a specimen 4 to be inspected while slightly moving the tube 2, the specimen 4 to be inspected and an X-ray detector 6 in the relative positional relationship. The X-ray transmitted through the specimen to be detected is detected by the detector 6, and the process of storing the detected X-ray transmitted data corresponding to the energies E1, E2 in the image memory 13 of an image processor 11 is conducted at each moved position. The data stored in the memory 13 is added for every energy level, superposed, and calculated to obtain a signal and to hence obtain an X-ray laminography image based on the signal.
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公开(公告)号:JPH05323039A
公开(公告)日:1993-12-07
申请号:JP12835192
申请日:1992-05-21
Applicant: TOSHIBA CORP
Inventor: YAMAMOTO TERUO , TSUCHIYA TAKEO
Abstract: PURPOSE:To provide a radiation inspector by which a clear image can be formed without increasing the installation area. CONSTITUTION:A first X-ray scanning mechanism is built on one side of an X-ray tube 1 and a rotary disc 5A, a collimator 9A, a scattered X-ray detector 6A and a transmission X-ray detector 11A are arranged. A second X-ray scanning mechanism is built on the other side of the X-ray tube 1 and a rotary disc 5B, a collimator 9B, a scattered X-ray detector 6B and a transmission X-ray detector 11B are arranged. An arm 10b is provided as attitude changer between conveyors 12A1 and 12A2 and 12B1 and 12B2.
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公开(公告)号:JPS61155755A
公开(公告)日:1986-07-15
申请号:JP27825884
申请日:1984-12-27
Applicant: TOSHIBA CORP
Inventor: TSUCHIYA TAKEO
Abstract: PURPOSE:To achieve a high accuracy of detection of flaws in defects with correction of angle of refraction after the incidence of ultrasonic beams into an body to be tested, by detecting initial echo peak positions of respective beamed ultrasonic wave about each of more than two beamed ultrasonic waves to compute the curvature near the incident point from these positions and direction of scanning by the beamed ultrasonic wave. CONSTITUTION:A sectional flaw detection image obtained by scanning by ultrasonic wave beamed with a phased array probe 1 is memorized into a first frame memory 12. Peak positions of reflected echoes are detected for each of ultrasonic wave beamed in scanning with an echo peak position detecting circuit 15 and the curvature near the incident position is calculated with a computing circuit 16 from the respective echo peak positions of three adjacent or close ultrasonic beams. With such an arrangement, the incident angle of the beamed ultrasonic wave which is incident into the central beamed ultrasonic wave is determined and hence, the angle of refraction is obtained. Based on the angle of refraction, information memorized in the first frame memory 12 can be corrected. Thus, the distortion of the sectional flaw detection image can be minimized by sequentially performing this operation scanning by ultrasonic wave beamed.
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公开(公告)号:JPS5782738A
公开(公告)日:1982-05-24
申请号:JP15770180
申请日:1980-11-11
Applicant: Toshiba Corp
Inventor: TSUCHIYA TAKEO
CPC classification number: G01M3/226
Abstract: PURPOSE:To detect the liquid leakage of a container with high efficiency by charging liquid-tight container with a liquid wherein gas is dissolved, and by detecting its leakage gas under conditions where the dissolved gas evaporates from the liquid when the liquid leaks out of the container. CONSTITUTION:Fluorocarbon gas, e.g., R-12 is applied with 4kg/cm to be dissolved in oil. Oil 10 containing this R-12 with high density is applied with prescribed test pressure from the connection openings 3 and 4 of a hydraulic cylinder 1. In this state, the detection part 21 of a halogen leak detector checks the external circumferential surface of the hydraulic cylinder 1. If the oil leaks from the stroke end part 5 of the cylinder, the leakage oil 10 is decreased in pressure to the atmospheric pressure, so the probe gas R-12 is discharged from the oil by the Henry's law and collected by the detection part 21 to make an indication by a measurement part, thus finding the liquid-leakage position efficiently.
Abstract translation: 目的:通过在液体中溶解气体的方式对液体容器进行充气,并在液体从液体中泄漏出来的情况下,从溶液中从液体中蒸发出来的气体中检测出其泄漏气体,从而高效率地检测出容器的液体泄漏 容器。 构成:将碳氟化合物气体,例如R-12以4kg / cm的量施用于油中。 用液压缸1的连接孔3和4从规定的试验压力施加含有高密度的该R-12的油10。在该状态下,卤素检测器检测部件21检查液压的外周面 气缸1.如果油从气缸的行程端部5泄漏,则泄漏油10的压力降低到大气压力,因此探针气体R-12由亨利定律从油中排出,并由 检测部21进行测量部的指示,从而有效地发现泄漏位置。
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公开(公告)号:JPH04364402A
公开(公告)日:1992-12-16
申请号:JP13879591
申请日:1991-06-11
Applicant: TOSHIBA CORP
Inventor: TSUCHIYA TAKEO
IPC: G01B11/00
Abstract: PURPOSE:To obtain a high-speed eccentricity inspection method with an improved detection capacity in inspection of eccentricity of a plurality of circles which are placed in concentrical shape and are similar one another. CONSTITUTION:A sectional image of a two-piece golf ball 2 to be inspected is taken by an X-rays TV camera, is digitized through a ternary-coding circuit 5, and is stored in an image memory 7. An operation circuit 9 obtains a center of a small circle which is an internal core for this image and then divides a screen into four portions with the center as an origin. The screen is divided into four quadrants and an area Si(i=1-4) of portions S1-S4 which are surrounded by large and small circles which are skins is obtained as the number of picture elements for each quadrant. The maximum and minimum of the area Si of each quadrant are obtained and they are set to Smax and Smin, respectively. PSmax/Smin is calculated from the Smax and Smin and this P becomes a parameter for center deviation. An allowable value is set for this P and it is judged whether the center deviation of an object to be inspected is proper or not.
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公开(公告)号:JPH0861941A
公开(公告)日:1996-03-08
申请号:JP19857194
申请日:1994-08-23
Applicant: TOSHIBA CORP
Inventor: TSUCHIYA TAKEO , FUJII MASAJI , UYAMA KIICHIRO , MORI MIKI , SUZUKI HIROKATSU
Abstract: PURPOSE: To properly provide the cross sectional image of an object to be inspected utilizing the difference of a radiation energy distribution due to the radiation absorption of the object. CONSTITUTION: An X-ray generator 1, an object to be inspected 3, the first X-ray detection fluorescent screen 5a, an X-ray filter 6 and the second X-ray detection fluorescent screen 7a are arranged in series, and the filter 6 laid between the screens 5a and 7a works to change the quality of a transmitted radiation, so as to keep the signal of each X-ray detector corresponding to a different radiation energy distribution. An X-ray beam 2 from the generator 1 through the object 3 is received by the screens 5a and 7a, and the transmitted image data of the object 3 formed thereon is photographed by TV cameras 5b and 7b. Then, the photographed data is supplied to an image processing device 12.
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公开(公告)号:JPH07306165A
公开(公告)日:1995-11-21
申请号:JP9779694
申请日:1994-05-12
Applicant: TOSHIBA CORP
Inventor: FUJII MASAJI , UYAMA KIICHIRO , TSUCHIYA TAKEO , MORI MIKI , SUZUKI HIROKATSU
IPC: G01B15/00 , G01N23/04 , G06T1/00 , G06T3/00 , G06T7/00 , G09G5/36 , G09G5/377 , H01L21/66 , H04N7/18
Abstract: PURPOSE:To accurately inspect an object to be inspected having a relatively wide inspecting area by efficiently controlling the inspecting position of the object. CONSTITUTION:When an object 3 to be inspected is watched through X-rays radiated from an X-ray tube 1 and fluoroscopic pictures are fetched to an X-ray data collecting section 101 while the object 3 is moved by means of a mechanism section 5, fluoroscopic pictures taken from multiple directions are obtained-while the object is moved. The picture memory 107 of a central controller 100 fetches fluoroscopic data through a data I/O 106 and an adding and averaging section 108 obtains the cross-sectional image of a desired focal surface by preparing a fluoroscopic picture to which the shifting amount corresponding to the focal surface and adding pictures to the fluoroscopic picture. The memory 107 fetches the mounting data of a PWB which is the object to be inspected from a CAD 117 and a picture processing section 109 converts the magnification so that the magnification can meet the size of the fluoroscopic picture which varies depending upon the geometry of X-rays. Then a synthesized picture is prepared by adding an obtained lamino picture and the event of a CAD graphic to each other.
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公开(公告)号:JPH07303628A
公开(公告)日:1995-11-21
申请号:JP9779194
申请日:1994-05-12
Applicant: TOSHIBA CORP
Inventor: UYAMA KIICHIRO , FUJII MASAJI , TSUCHIYA TAKEO , MORI MIKI , SUZUKI HIROKATSU
Abstract: PURPOSE:To provide a laminograph in which only a focal point surface is in focus. CONSTITUTION:Between multiple radiation surface sensors 3a, 3b, 3c, 3d that are aligned opposite to a radiation source 1 in x direction of the x and y surface and the radiation source 1, an examined body 4 is moved in x direction, and a radiation which has been transmitted through the examined body 4 is detected by the multiple radiation surface sensors 3a, 3b, 3c, 3d, the detected outputs are sequentially collected to create multiple transparent images. These multiple transparent images are shifted to each other in x direction, and are added and averaged, then an image which is focused on a plane parallel to the x and y plane of the examined body.
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公开(公告)号:JPH04319654A
公开(公告)日:1992-11-10
申请号:JP8815091
申请日:1991-04-19
Applicant: TOSHIBA CORP
Inventor: TSUCHIYA TAKEO
Abstract: PURPOSE:To improve the spatial resolution of a scattered X-ray inspecting device for scattered X-ray pictures by obtaining a scattered X-ray signal from which scattered X rays caused by multiplex scattering from a position other than the spot position of an X-ray beam are removed. CONSTITUTION:X rays radiated from an X-ray generator 1 scan an object 2 to be inspected after the X rays are collimated to an X-ray beam by means of an X-ray beam scanner 4. The scattered X rays scattered backward from the object 2 are made incident to the X-ray receiving surface of an X-ray detector 5 and the detector 5 outputs a scattered X-ray signal. A pulse height analyzer 6 analyzes the energy spectrum of the scattered X rays from the scattered X-ray signal. The analyzer 6 excludes the analyzed low-energy side signal component of the output of the detector 5 from its output by regarding the component as a multiplexly scattered component. The scattered X-ray picture of the surface to be inspected of the object 2 is displayed on the screen of a CRT 10 on the basis of a scattered X-ray dosage signal from the analyzer 6.
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公开(公告)号:JPS59180340A
公开(公告)日:1984-10-13
申请号:JP5379483
申请日:1983-03-31
Applicant: Toshiba Corp
Inventor: TSUCHIYA TAKEO
Abstract: PURPOSE:To measure the leakage of a body to be tested with high precision by correcting a measured value of probe gas concentration obtained by a concentration measuring means by using probe gas whose concentration or leakage is already known. CONSTITUTION:A controller 23 closes a clean-up gas supply valve 17 and also opens a sampling valve 13 to guide some of the gas in a storage container 10 to a leak detector 7 a specific time T after the 1st measurement of the probe gas concentration in the storage container 10 while the sensitivity correction of the leak detector 7 is completed. An arithmetic device 21 inputs the measured value C1' of gas concentration of the supplied gas obtaind by the leak detector 7 and also reads a measured value C0' stored previously to calculate the background value of the containr 10 and the real value of the gas in the container corresponding to the background value, thereby calculating the leakage of the body 3 to be tested by an equation. In the figure, C2 and C3 are different probe gas concentration values which are already known, C2' and C3' are measured values by the leak detectors 7, and V is the actual capacity of the storage container 10.
Abstract translation: 目的:通过使用已知浓度或泄漏的探针气体,通过校正由浓度测量装置获得的探针气体浓度的测量值,以高精度测量被测体的泄漏。 构成:控制器23关闭净化气体供给阀17,并打开采样阀13,以在探针气体浓度的第一次测量之后将特定时间T引导到存储容器10中的一些气体到泄漏检测器7 在泄漏检测器7的灵敏度校正完成的同时在存储容器10中。 运算装置21输入由检漏装置7得到的供给气体的气体浓度的测定值C1',并读取预先存储的测定值C0',计算出容器10的背景值和气体的实际值 容器对应于背景值,从而通过等式计算被测体3的泄漏。 在图中,C2和C3是已知的不同的探针气体浓度值,C2'和C3'是由检漏器7测量的值,V是存储容器10的实际容量。
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