公开(公告)号：JPH09133521A

公开(公告)日：1997-05-20

申请号：JP29132095

申请日：1995-11-09

Applicant: TOSHIBA CORP

Inventor： UYAMA KIICHIRO ,  FUJII MASAJI ,  TAMAKI KIYOHIDE ,  MIZUGUCHI HIROSHI ,  YOSHIDA MASAYA

IPC: G01B15/00

Abstract: PROBLEM TO BE SOLVED: To measure the internal dimensions of a specimen in a short time by receiving an X-ray fan beam passed through the specimen by means of an X-ray line sensor and then determining the internal structure of specimen at an image processing section based on the detected values. SOLUTION: X-rays radiated from an X-ray tube 51 is passed through a specimen collimator 53 (53a, 53b) to produce an X-ray fan beam 54. A specimen 55 is carried in the direction substantially orthogonal to the X-ray fan beam 54 by a carrying means 57. The X-ray fan beam 54 is received by an X-ray line sensor 56 which then produces a detection value of X-ray. An image processing section 59 determines the internal structure of specimen 55 based on the detection values from X-ray line sensor 56.

公开(公告)号：JPH0950777A

公开(公告)日：1997-02-18

申请号：JP20084795

申请日：1995-08-07

Applicant: TOSHIBA CORP

Inventor： UYAMA KIICHIRO ,  YASUI SUKEYUKI ,  FUJII MASAJI ,  SUZUKI HIROKATSU

IPC: H01J35/10 ,  H01J35/06 ,  H01J35/26 ,  H01J37/075

Abstract: PROBLEM TO BE SOLVED: To provide a plasma electron gun and a X-ray device, in which the burden for maintenance can be reduced, by leading the hydrogen gas into an ionizing chamber so that the hydrogen ion collides with a negative electrode to generate the electron beam. SOLUTION: Plasma is generated by a high voltage between a positive electrode wire 1 of an ionizing chamber 2, into which the hydrogen gas from a hydrogen gas bomb 20 is led, and a negative electrode 6 through a high voltage cable 8 of a high voltage chamber 4, and the hydrogen ion passing through an extraction grid 3 collides with the negative electrode 6 so as to emit the electron beam from the negative electrode 6, and the electron beam is taken from an electron beam take-out port 5 of the ionizing chamber 2. With this structure that the hydrogen ion is used with the helium ion, the generation of damage of the surface of the negative electrode 6 is restricted, and since the hydrogen ion is easy to be discharged, the applying voltage can be lowered. A plasma electron gun and a X-ray device, in which the burden for maintenance can be reduced, are thereby obtained.

公开(公告)号：JPH08327563A

公开(公告)日：1996-12-13

申请号：JP13675195

申请日：1995-06-02

Applicant: TOSHIBA CORP

Inventor： UYAMA KIICHIRO ,  FUJII MASAJI

IPC: G01N23/04 ,  G01T1/00 ,  G21K4/00 ,  H05K3/46

Abstract: PURPOSE: To provide a laminograph which is focused well on a focusing plane only. CONSTITUTION: Radiation is generated from an X-ray tube 13 and emitted toward a subject 17 for inspection, and the radiation transmitted through the subject 17 for inspection is detected on the detecting plane 21 of an image pickup tube 19 at substantially two-dimensional spatial resolution. Rotational movement is imparted by means of a rotating mechanism 25 to the subject 17 for inspection, and output images are electronically rotated by an image pickup tube controller 29 in synchronism with the rotational movement, and during the rotational movement, the output images are collected as a plurality of transmitted images and added together, after which a laminogram, i.e., a transmitted image focused on a focusing plane within the subject for inspection, is obtained.

公开(公告)号：JPH08233752A

公开(公告)日：1996-09-13

申请号：JP3838295

申请日：1995-02-27

Applicant: TOSHIBA CORP

Inventor： FUJII MASAJI ,  UYAMA KIICHIRO

IPC: G01N23/04

Abstract: PURPOSE: To obtain a highly accurate tomographic image having no geometrical distortion by fixing the geometrical conditions of each perspective image. CONSTITUTION: X-ray perspective images are acquired in multiple directions by moving a specimen S to traverse X-rays spreading in pyramid shape and then the perspective images are mutually shifted and added to configure a tomographic image. A projection image is detected several times by an area detection means 2 comprising a plurality of scanning lines having a detection surface in the area for projecting the perspective image. The X-ray projection image is then split into sections for every one or a plurality of scanning lines by image conversion means 7, 16, 21 which converts the X-ray projection images into X-ray perspective images in multiple directions by arranging the image signal in time series for each section. Finally, the X-ray perspective image in multiple directions are added after being shifted mutually, through image reconfiguration means 22, 23, depending on the tomographic position and the moving speed of the specimen.

公开(公告)号：JPH0862161A

公开(公告)日：1996-03-08

申请号：JP19931394

申请日：1994-08-24

Applicant: TOSHIBA CORP

Inventor： TSUCHIYA TAKEO ,  FUJII MASAJI ,  UYAMA KIICHIRO ,  MORI MIKI ,  SUZUKI HIROKATSU

IPC: G01N23/18

Abstract: PURPOSE: To provide a radiation inspecting apparatus which can suitably obtain the sectional image of a specimen to be inspected by utilizing the difference of radiation energy distribution by the radiation absorption of the specimen to be inspected. CONSTITUTION: X-ray beams 3 of X-ray energies E1, E2 varying at each time generated from an X-ray tube 2 at moving positions are projected to a specimen 4 to be inspected while slightly moving the tube 2, the specimen 4 to be inspected and an X-ray detector 6 in the relative positional relationship. The X-ray transmitted through the specimen to be detected is detected by the detector 6, and the process of storing the detected X-ray transmitted data corresponding to the energies E1, E2 in the image memory 13 of an image processor 11 is conducted at each moved position. The data stored in the memory 13 is added for every energy level, superposed, and calculated to obtain a signal and to hence obtain an X-ray laminography image based on the signal.

公开(公告)号：JPH06138252A

公开(公告)日：1994-05-20

申请号：JP28988292

申请日：1992-10-28

Applicant: TOSHIBA CORP

Inventor： KOSUGE HIDEO ,  UYAMA KIICHIRO

IPC: B07C5/346 ,  G01N23/04 ,  G01V5/00 ,  G21K1/02

Abstract: PURPOSE:To equalize inspection resolution over the whole scanning range of X-ray beams. CONSTITUTION:An opening formed by a fixed slit 2 and a rotating slit 3 makes a round trip in the longitudinal direction of the slit 3 as a rotary disc 4 rotates within the whole range of the angle of deflection of X-ray beams. At a position where the angle of rotation of the disc 4 is different by phi0 in + or - direction, the X-rays pass the same position of the slit 3. The inside surface of the slit 3 is formed into two slopes 3a, 3b of inclination matching the distance from the center O of the disc 4 so that the apparent area of the opening is always uniform relative to changes in the angle theta of deflection of the X-rays, and the slopes 3a, 3b are in symmetry with respect to the center of the slit 3. Therefore, the apparent area of the opening is changed in such a way as to be held constant relative to changes in the angle theta of deflection of the beams and so inspection resolution can be equalized over the whole scanning range of the X-ray beams.

公开(公告)号：JPH05306972A

公开(公告)日：1993-11-19

申请号：JP11101592

申请日：1992-04-30

Applicant: TOSHIBA CORP

Inventor： FUJII MASAJI ,  UYAMA KIICHIRO ,  ARAI KENJI

IPC: G01N1/00 ,  G01N23/04

Abstract: PURPOSE:To obtain a tomographic device which can put out an object to be inspected from a radiation shielding room so that the object can be easily put in and put out from the radiation shielding room. CONSTITUTION:A sample door 27 is formed at part of an X-ray shielding room 25 and an object to be inspected put on a turntable 1 mounted on a traverse traveling frame 7 is put out from the room 25 through the door 27 by moving the turntable 1 on rails 3.

公开(公告)号：JPH05172764A

公开(公告)日：1993-07-09

申请号：JP33746391

申请日：1991-12-20

Applicant: TOSHIBA CORP

Inventor： FUJII MASAJI ,  UYAMA KIICHIRO

IPC: G01N23/207

Abstract: PURPOSE:To obtain the title device capable of collecting the scattered beam data from a subject generated by irradiating the stationary subject with radiation. CONSTITUTION:The X-rays generated from an X-ray tube 1 are throttled to pencil beam through the slit 12 of a rotary collimator 2a and the slit 13 of a linear collimator 2c to be emitted to a subject as flying spot radiation. The flying spot radiation is subjected to surface scanning with respect to the scanning region of the subject by the rotation of the rotary collimator 2a and the linear motion of the linear collimator 2c and the scattered beams from the subject are detected and the detected scattered beam data are collected to be formed into an image.

公开(公告)号：JPH05168620A

公开(公告)日：1993-07-02

申请号：JP34341191

申请日：1991-12-25

Applicant: TOSHIBA CORP

Inventor： UYAMA KIICHIRO

IPC: A61B6/03 ,  G03C5/16

Abstract: PURPOSE:To obtain an image of a good quality in a short period by providing a sequential approximating means for comparing an integral value of an initial image with transmission data of the corresponding examinee body, and constituting a cross-sectional image by repeating a processing for correcting successively the initial image, based on a difference or a ratio of both of them. CONSTITUTION:A sequential approximating device 21 integrates an initial image stored in an initial image memory 22 by a setting processing of an initial image setting device 25, along each transmission X-ray passage corresponding to each raw data. Subsequently, this integral value is compared with the corresponding raw data, respectively, and by subtracting its difference along the corresponding transmission X-ray passage, a correction is applied successively to the initial image, and by executing repeatedly such a processing with regard to all the X-ray passages, the correction is achieved, and a correct cross-sectional image is reconstituted. In such a way, the cross-sectional image constituted in the sequential approximating device 21 is sent to a current image memory 23 and stored, supplied to a display device 16 therefrom and displayed.

公开(公告)号：JPH0291553A

公开(公告)日：1990-03-30

申请号：JP24251288

申请日：1988-09-29

Applicant: TOSHIBA CORP

Inventor： ARAI KENJI ,  UYAMA KIICHIRO

IPC: G01N23/04

Abstract: PURPOSE:To obtain a beautiful tomographic image by forming an opening part eccentrically to a large rotatable table, providing a small table opposite the opening part, and mounting a body to be inspected on the small table. CONSTITUTION:A small inspected body mode is selected with a table selection switch 47 and a rotary driving device 25 is driven through a mechanism controller 45 to rotate the large table 7 so that the position of the small table 17 is the position where the radiation beam width of radiation from a radiation generator 1 is minimum, thereby positioning the small table 17 at the closest position to a radiation generator 1. Then the rotary driving device 25 is fixed and the small body 21 to be inspected is mounted on the small table 17 so that the center of the body 21 to be inspected comes to the center of rotation of the small table 17.