公开(公告)号：JPS60135190A

公开(公告)日：1985-07-18

申请号：JP24613183

申请日：1983-12-26

Applicant: TOSHIBA KK

Inventor： FUJITA NOBUYUKI

IPC: B25J9/16 ,  B25J9/22

公开(公告)号：JPS5973288A

公开(公告)日：1984-04-25

申请号：JP18431782

申请日：1982-10-20

Applicant: Toshiba Kk

Inventor： OMATA SATOSHI ,  FUJITA NOBUYUKI

IPC: B25J15/00 ,  B25J13/00 ,  B25J15/02 ,  B25J15/08

公开(公告)号：JPS613417A

公开(公告)日：1986-01-09

申请号：JP12368884

申请日：1984-06-18

Applicant: TOSHIBA KK

Inventor： CHIBA KOUICHI ,  KANEDA KATSUHIKO ,  YAMAGUCHI MASAYOSHI ,  NEMOTO TOSHIYA ,  SUEMATSU MUTSUMI ,  FUJITA NOBUYUKI ,  TAMAI KOUICHI

IPC: H01L21/52 ,  H01L21/58 ,  H01L21/60

Abstract: PURPOSE:To effect bonding to the plural bonding positions having differences in height automatically with accuracy at a high speed by focusing a TV camera so as to make a quantity of discrepancy of focus zero which is calculated by collation of an image pick-up output signal with a reference signal. CONSTITUTION:A pattern recognition circuit 23 collates a binary signal pattern of an image of a substance to be bonded 16 picked up by a TV camera 11 with a reference pattern which is stored previously and calculates a quantity of discrepancy in position. From this quantity, a real position is detected and bonding is effected automatically. In this case, the control process is included which includes the program that a quantity of position discrepancy is calculated by collating an image pick-up output signal of the predetermined position of substrance 16 with the previously stored reference signal at a time of when an image of substance to be bonded 16 is picked up and positioning of the TV camera in Z-axis direction and focusing of an optical lens of the TV camera 11 are carried out so that the above quantity becomes zero.