公开(公告)号：JPS60132818A

公开(公告)日：1985-07-15

申请号：JP23822683

申请日：1983-12-16

Applicant: TOSHIBA KK

Inventor： TAMAI KOUICHI

IPC: B65G27/04 ,  B65G25/04 ,  B65G47/22

Abstract: PURPOSE:To improve the rate of operation of a base plate conveyor, by pushing a base plate on a guide rail extending in the direction of the conveyance of the base plate, to position the base plate in the direction of its width, and by using a pair of holders displaceable in the direction of the conveyance of the base plate, to pinch-hold the plate at both the front and rear ends to convey the plate. CONSTITUTION:When a base plate 11 is supplied from a base plate feeder to a conveyance stage 25, the motor of a positioning mechanism 30 is driven to thrust a pusher 33 on the base plate through the action of an arm 32 to bring a side edge of the base plate into contact with the wall surface 27 of a guide rail 26 to position the base plate in the direction of its width. At the same time, a vertical motion mechanism for a conveying pin 45 and a clamp pin 46 is driven to move up these pins. A holding beam 49 is thereafter moved by a motor 55 through the action of a pinion 58 and a rack 54 so that the clamp pin 46 on the beam is engaged with the front end of the base plate 11 to pinch-hold the base plate together with the conveying pin 45. A ball screw 66 is then rotated by a pulse motor to convey the base plate 11 through the action of a conveying beam 48.

公开(公告)号：JPS6012290A

公开(公告)日：1985-01-22

申请号：JP11891983

申请日：1983-06-30

Applicant: TOSHIBA KK

Inventor： TAMAI KOUICHI

IPC: B23K26/38 ,  B23K26/40 ,  B23K26/00

Abstract: PURPOSE:To obtain a ribbon crystal having good quality by disposing successively from above a measuring device, cutting device and housing device for the ribbon crystal along the route for feeding the ribbon crystal. CONSTITUTION:A measuring device section 23 which measures the length of a ribbon crystal 21, a cutting device part 27 which cuts the measured ribbon crystal 21 to a set length and a housing device part 52 which houses the cut ribbon crystal in a vertical direction into a magazine 51 fed horizontally and intermittently are successively disposed from above along the route for feeding the crystal 21. A housing device 40 for a sample ribbon crystal which houses the sample ribbon crystal is further provided between the part 27 and the part 52.

公开(公告)号：JPS613417A

公开(公告)日：1986-01-09

申请号：JP12368884

申请日：1984-06-18

Applicant: TOSHIBA KK

Inventor： CHIBA KOUICHI ,  KANEDA KATSUHIKO ,  YAMAGUCHI MASAYOSHI ,  NEMOTO TOSHIYA ,  SUEMATSU MUTSUMI ,  FUJITA NOBUYUKI ,  TAMAI KOUICHI

IPC: H01L21/52 ,  H01L21/58 ,  H01L21/60

Abstract: PURPOSE:To effect bonding to the plural bonding positions having differences in height automatically with accuracy at a high speed by focusing a TV camera so as to make a quantity of discrepancy of focus zero which is calculated by collation of an image pick-up output signal with a reference signal. CONSTITUTION:A pattern recognition circuit 23 collates a binary signal pattern of an image of a substance to be bonded 16 picked up by a TV camera 11 with a reference pattern which is stored previously and calculates a quantity of discrepancy in position. From this quantity, a real position is detected and bonding is effected automatically. In this case, the control process is included which includes the program that a quantity of position discrepancy is calculated by collating an image pick-up output signal of the predetermined position of substrance 16 with the previously stored reference signal at a time of when an image of substance to be bonded 16 is picked up and positioning of the TV camera in Z-axis direction and focusing of an optical lens of the TV camera 11 are carried out so that the above quantity becomes zero.

公开(公告)号：JPS60167335A

公开(公告)日：1985-08-30

申请号：JP2267184

申请日：1984-02-09

Applicant: TOSHIBA KK

Inventor： TAMAI KOUICHI

IPC: B65G59/06 ,  B65G1/07 ,  B65G47/08 ,  B65H7/06 ,  H01L21/50 ,  H01L21/67 ,  H01L21/677

Abstract: PURPOSE:To contrive to improve the yield of a substrate feeding device by a method wherein an overload condition and other abnormal conditions in the device at the operating time of substrate feed are detected by the sensor, and failure and so forth of substrates are prevented by the detection. CONSTITUTION:A magazine 14 is made to descend to a prescribed amount by a vertically moving mechanism having not been indicated by the diagram and the tip of a feeding pawl 26 is made to oppose to one end side of a substrate 11 in the magazine 14. In this condition, a driving gear having not been shown by the diagram is actuated and a conveying stage 27 is made to shift to the right direction of the diagram along a guide shaft 28 by a driving wire 42. By this operation, the feeding pawl 26 having been supported by the conveying stage 27 is made to abut on the end side of the substrate 11 and feeds the substrate 11 to the right direction indicated by the diagram. At this time, such abnormal troubles that the substrate 11 has not been lined up at the regular position in the magazine 14 or the magazine 14 overruns for some reason or other may generate. In such a case, the feeding pawl 26 descends against the tension of a tension spring 34 or rotates right and left and the lower end part thereof shields an optical axis 46, which is emitted from a sensor 44. For this reason, the sensor 44 judges the condition as abnormal and stops the vertically moving unit of the magazine 14 immediately.

公开(公告)号：JPS6095301A

公开(公告)日：1985-05-28

申请号：JP20256383

申请日：1983-10-31

Applicant: TOSHIBA KK

Inventor： TAMAI KOUICHI

IPC: G01B5/20 ,  G01B5/213 ,  G01B21/20

Abstract: PURPOSE:To make a titled device small-sized and inexpensive by providing a table which can move up and down, upper and lower measuring instruments for outputting a displacement of a thickness and a warp as an electric signal, a carrying device for carrying an object to be measured to a measuring position, and a driving device for lifting the lower measuring instrument. CONSTITUTION:When a wafer 2 carried from the previous process by a round belt 14 contacts to a stopper pin 15, the belt 14 is stopped by a detection of a wafer detector (omitted in the figure). Also, a table 5 is lifted by a carrying device 26 consistng of a motor 18, a cam 19, a cam follower 20, and a slide plate 21, and a warp is measured by making an upper measuring instrument 8-1 contact to the wafer 2. Moreover, a lower measuring instrument 8-2 is lifted by a driving device 22 consisting of a holder 23, a slide plate 24 and a cylinder 25, and a thickness is measured by placing the wafer 2 between both the measuring instruments 8-1, 2.

公开(公告)号：JPS5997593A

公开(公告)日：1984-06-05

申请号：JP20648782

申请日：1982-11-25

Applicant: TOSHIBA KK

Inventor： TAMAI KOUICHI

IPC: C30B15/24 ,  C30B15/00 ,  C30B15/34

Abstract: PURPOSE:To obtain long-sized crystals of high quality by changing the forward direction of a long-sized crystal and by cutting the crystal at a position shifted from the pulling axis of a pulling device so as to prevent the contamination of the long-sized crystal and the pulling device with splash, vapor, etc. produced during cutting. CONSTITUTION:A starting material 37 in a vessel 38 is fed to a crucible 43 through a trough 39 and a pipe 40, and it is melted. The melt 45 reach the top of a die 47 by capillarity in a central slit 46 cut in the die 47. A ribbonlike seed crystal is dipped in the melt 45, and it is moved upward with rolls 50 to start the growth of a crystal. After relieving the thermal strain of a grown crystal 52 by annealing, the crystal is led onto the reversal roll 56 of a direction changing device, it is turned by 180 deg., and the length is measured with a ribbon measuring roll. When the long-sized crystal 52 is passed by a prescribed length, it is cut with laser beams 66 emitted from the laser scanner 67 of a ribbon cutting device in a dust collecting chamber 68. Produced splash and vapor are collected through a pipe 73 connected to a vacuum source, and cut crystals 69 are stored in the magazine 70 of a ribbon storing vessel.