公开(公告)号：DE3678146D1

公开(公告)日：1991-04-18

申请号：DE3678146

申请日：1986-12-23

Applicant: TOSOH CORP

Inventor： TSUTSUMI YOSHITAKA ,  MATSUMURA KOUSABUROU ,  SEITA TORU ,  NAKAZAWA KYOKO ,  SHUYAMA HIDEO

IPC: C08F20/22 ,  G03F7/039 ,  G03F7/004

Abstract: A halogen-containing polyacrylate derivative having the formula: wherein A is a structural unit derived from a copolymerizable monomer having a double bond; R is wherein each of R1 and R2 is a hydrogen atom or a fluorinated methyl group, provided R1 and R2 are not hydrogen atoms at the same time, and R3 is a hydrogen atom or a lower alkyl group; X is a halogen atom or a methyl group; and m is a positive integer, n is 0 or a positive integer, and n/m is from 0 to 2, preferably from 0 to 1.

公开(公告)号：JPH05107767A

公开(公告)日：1993-04-30

申请号：JP29658591

申请日：1991-10-17

Applicant: TOSOH CORP

Inventor： TSUTSUMI YOSHITAKA ,  KAMIMURA TERUHISA ,  MATSUMURA KOUSABUROU ,  HASEGAWA MASAZUMI

IPC: G03F7/004 ,  G03F7/022 ,  G03F7/038 ,  G03F7/11 ,  H01L21/027 ,  H01L21/302 ,  H01L21/3065

Abstract: PURPOSE:To obtain the coating soln. which is good in coatability on level differences, imparts a high degree of flatness to a substrate having ruggedness and has high safety by using specific org. compds. as the essential component of a solvent. CONSTITUTION:The essential components of the solvent of the coating liquid for level difference substrates consisting of a resin and the solvent or the resin, additives and the solvent are formed of the org. compds. expressed by formula I or formula II. In the formulas I, II, R1, denotes hydrogen or-C(=O)CH3; R2, R3, denote a methyl group or ethyl group. The org. compds. expressed by the formulas I, II include a propylene glycol ethyl ether; alkyl alkoxy propionate system, etc. The propylene glycol ethyl ether system in such a case include propylene glycol ethyl ether, etc. Or the alkyl alkoxy propionate system includes ethyl-3-ethoxy propionate, etc.