公开(公告)号：EP2692899A1

公开(公告)日：2014-02-05

申请号：EP12765033.1

申请日：2012-03-28

Applicant: Toppan Printing Co., Ltd.

Inventor： KANO Mitsuru ,  SASAKI Yasuhiro

IPC: C23C16/54

CPC classification number: C23C16/545 ,  B65H20/16 ,  B65H23/025 ,  C23C16/45551

Abstract: A roll-to-roll thin film coating machine (1) of the invention includes: a first vacuum chamber (21) into which a first precursor gas is introduced; a second vacuum chamber (22) into which a second precursor gas is introduced; a third vacuum chamber (23) into which a purge gas is introduced, the purge gas discharging the first precursors and the second precursors; and a transfer mechanism (41a, 41b) transferring a windable base member (15) through the first vacuum chamber (21), the second vacuum chamber (22), and the third vacuum chamber (23), the transfer mechanism including a holding unit holding both end portions of the base member (15) in a width direction thereof.

公开(公告)号：EP2692899B1

公开(公告)日：2017-04-19

申请号：EP12765033.1

申请日：2012-03-28

Applicant: Toppan Printing Co., Ltd.

Inventor： KANO, Mitsuru ,  SASAKI Yasuhiro

IPC: C23C16/54 ,  B65H20/02 ,  B65H20/06 ,  B65H20/20 ,  C23C16/455

CPC classification number: C23C16/545 ,  B65H20/16 ,  B65H23/025 ,  C23C16/45551

公开(公告)号：EP2860280A1

公开(公告)日：2015-04-15

申请号：EP13796425.0

申请日：2013-05-23

Applicant: Toppan Printing Co., Ltd.

Inventor： SASAKI Yasuhiro ,  KANO Mitsuru

IPC: C23C16/54 ,  C23C16/44

CPC classification number: B05B13/0221 ,  B65H20/02 ,  B65H2301/51145 ,  C23C14/562 ,  C23C16/45551 ,  C23C16/545

Abstract: A rolled film formation apparatus which includes : a first vacuum chamber into which a first precursor is introduced; a second vacuum chamber into which a second precursor is introduced; a third vacuum chamber into which a purge gas for purging the first precursor and the second precursor is introduced; and a conveyance roller part having a roller pair which conveys a windable substrate to the first vacuum chamber, the second vacuum chamber and the third vacuum chamber, the roller pairs having a first roller and a second roller which sandwich the substrate in a thickness direction of the substrate, an uneven shape being formed on an outer peripheral surface of at least one of the first roller and the second roller, wherein an atomic layer deposition film is formed by depositing an atomic layer on a surface of the substrate by moving the substrate back and forth between the first vacuum chamber and the second vacuum chamber using the conveyance roller part.