Abstract:
A laminate (1) includes: a base material (4) having a top surface; an under coat layer (3) formed on at least a part of the top surface of the base material, having a membranous shape or a film shape and containing an organic polymer having an OH group; and an atomic layer deposition film (2) formed in a membranous shape to cover an exposed surface of the under coat layer (3), the atomic layer deposition film being formed by a precursor as a material thereof. At least a part of the precursor is coupled to the OH group of the organic polymer.
Abstract:
A rolled film formation apparatus which includes : a first vacuum chamber into which a first precursor is introduced; a second vacuum chamber into which a second precursor is introduced; a third vacuum chamber into which a purge gas for purging the first precursor and the second precursor is introduced; and a conveyance roller part having a roller pair which conveys a windable substrate to the first vacuum chamber, the second vacuum chamber and the third vacuum chamber, the roller pairs having a first roller and a second roller which sandwich the substrate in a thickness direction of the substrate, an uneven shape being formed on an outer peripheral surface of at least one of the first roller and the second roller, wherein an atomic layer deposition film is formed by depositing an atomic layer on a surface of the substrate by moving the substrate back and forth between the first vacuum chamber and the second vacuum chamber using the conveyance roller part.
Abstract:
A laminate body (1) of the present invention includes a base material (2), a film-like or a membrane-like undercoat layer (3 or 103) that is formed in at least a portion of the outer surface of the base material (2), and an atomic layer deposition film (4) that is formed on a surface opposite to a surface coming into contact with the base material (2) among both surfaces of the undercoat layer (3 or 103) in the thickness direction thereof. At least a portion of precursors of the atomic layer deposition film (4) bind to the undercoat layer (3 or 103), and the atomic layer deposition film (4) is formed into a membrane shape covering the undercoat layer (3 or 103).
Abstract:
A roll-to-roll thin film coating machine (1) of the invention includes: a first vacuum chamber (21) into which a first precursor gas is introduced; a second vacuum chamber (22) into which a second precursor gas is introduced; a third vacuum chamber (23) into which a purge gas is introduced, the purge gas discharging the first precursors and the second precursors; and a transfer mechanism (41a, 41b) transferring a windable base member (15) through the first vacuum chamber (21), the second vacuum chamber (22), and the third vacuum chamber (23), the transfer mechanism including a holding unit holding both end portions of the base member (15) in a width direction thereof.
Abstract:
A laminate (1) provided with: a base material (2); an undercoat layer (3), which is formed on at least a portion of the outer surface of the base material (2), contains an organic polymer with a functional group, and is formed in a membrane form or film form; and an atomic layer deposition film (4), which contains a precursor (6) that serves as a starting material, is formed so as to cover the surface of the undercoat layer (3), and in which at least some of the precursor (6) are bonded to the functional groups. The linear expansion coefficient of a layered film provided with the base material (2) and the undercoat layer (3) is 1.0 × 10 -5 /K to 8.0 × 10 -5 /K.
Abstract:
A laminate body (1) of the present invention includes a base material (2), a film-like or a membrane-like undercoat layer (3 or 103) that is formed in at least a portion of the outer surface of the base material (2), and an atomic layer deposition film (4) that is formed on a surface opposite to a surface coming into contact with the base material (2) among both surfaces of the undercoat layer (3 or 103) in the thickness direction thereof. At least a portion of precursors of the atomic layer deposition film (4) bind to the undercoat layer (3 or 103), and the atomic layer deposition film (4) is formed into a membrane shape covering the undercoat layer (3 or 103).
Abstract:
A laminate (1) provided with: a base material (2); an undercoat layer (3), which is formed on at least a portion of the outer surface of the base material (2), contains an organic polymer with a functional group, and is formed in a membrane form or film form; and an atomic layer deposition film (4), which contains a precursor (6) that serves as a starting material, is formed so as to cover the surface of the undercoat layer (3), and in which at least some of the precursor (6) are bonded to the functional groups. The linear expansion coefficient of a layered film provided with the base material (2) and the undercoat layer (3) is 1.0 × 10 -5 /K to 8.0 × 10 -5 /K.
Abstract:
A laminate body of the present invention includes a base material (2), an atomic layer deposition film (4) that is formed along the outer surface of the base material (2), and an overcoat layer (5) that covers the atomic layer deposition film (4) with a film having a mechanical strength higher than that of the atomic layer deposition film (4).