公开(公告)号：JP2000202262A

公开(公告)日：2000-07-25

申请号：JP1060999

申请日：1999-01-19

Applicant: UNITED MICROELECTRONICS CORP

Inventor： YO MEISEI ,  LAI CHIEN-HSIN ,  CHO KAZUI ,  WU JUAN-YUAN

IPC: B24B57/02 ,  B01F5/00 ,  B01F5/06 ,  H01L21/304

Abstract: PROBLEM TO BE SOLVED: To provide a in situ mixing device improved in the mixing degree of slurry and capable of uniformly mixing. SOLUTION: The device has plural 1st tubes 104 each having a 1st diameter and plural 2nd tubes 102 each having a 2nd diameter, and is composed of a cylindrical main body 105 structured by alternately linking the 2nd tubes 102 and the 1st tubes 104 to each other and plural tapered plugs 103, and each of plural tapered plugs 103 is positioned inside each 2nd tube 103 and the tip part of the plug 103 face to the direction opposed to the flowing direction of fluid flowing in the cylindrical main body 105.