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公开(公告)号：WO2005015697A3
公开(公告)日：2008-10-09
申请号：PCT/US2004024737
申请日：2004-07-29
Applicant: UNIV RUTGERS , SALVERMOSER MANFRED , MURNICK DANIEL E
Inventor： SALVERMOSER MANFRED , MURNICK DANIEL E
IPC: H01S3/134 , H01S20060101
CPC classification number: H01J61/16 , H01J61/0732 , H01J61/28 , H01J61/86 , H05B41/24
Abstract: A method and apparatus are provided for generating light such as ultraviolet light from excimer-forming gases. Gases are excited by radio frequency alternating current powered electrodes (200, 210) to form excimers that will decay and emit vacuum ultraviolet light. The halogen concentration is optimized so as to optimize emissions from halogen excimers (Z 2 *) or mixed rare gas/halogen excimers (RGZ*). Emissions from rare gas excimers (RG 2 *) are maximized by maintaining the gas in the discharge region at a relatively low temperature, desirably below 700 °K, so that the average kinetic energy of gas particles is less than the vibrational excitation energy of the excimer and substantially less than the dissociation energy of the excimer. Relatively large electrodes (202, 204) can be used to cool the plasma.
Abstract translation: 提供了用于产生诸如来自准分子成型气体的紫外光的光的方法和装置。 气体被射频交流电源电极（200,210）激发，以形成将衰减并发射真空紫外光的激发器。 优化卤素浓度以优化来自卤素衍生物（Z 2/2 *）或混合稀有气体/卤素衍生物（RGZ *）的排放。 通过将放电区域中的气体保持在相对较低的温度，优选地低于700°K，使得气体颗粒的平均动能更小，从而使稀有气体激发剂（RG 2 2 *）的排放最大化 比准分子的振动激发能大大小于准分子的解离能。 可以使用较大的电极（202,204）来冷却等离子体。
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Patent Agency Ranking
公开(公告)号：WO2006026596A2
公开(公告)日：2006-03-09
申请号：PCT/US2005030787
申请日：2005-08-30
Applicant: UNIV RUTGERS , SALVERMOSER MANFRED , MURNICK DANIEL E
Inventor： SALVERMOSER MANFRED , MURNICK DANIEL E
IPC: H01T19/04
Abstract: Excimers are formed in a gas (30, 130) by applying a pulsed potential between a first electrode (14, 114) and a counter electrode (26, 126) so that corona discharge occurs, substantially without arcing, when the potential is on. The pulses or on-times of the potential desirably are about 100 microseconds or less. Use of a pulsed potential provides greater efficiency than a constant potential. Where the excimer-forming gas is a pure inert gas, the gas desirably contains less than 10 ppm water vapor.
Abstract translation: 通过在第一电极（14,114）和对电极（26,126）之间施加脉冲电位，使得当电位接通时，基本上没有电弧放电发生电晕放电，在气体（30,130）中形成发光体。 期望的电位的脉冲或导通时间约为100微秒或更短。 使用脉冲电位提供比恒定电位更高的效率。 当准分子产生气体是纯惰性气体时，气体理想地含有小于10ppm的水蒸气。
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公开(公告)号：EP1794856A4
公开(公告)日：2008-01-09
申请号：EP05795116
申请日：2005-08-30
Applicant: UNIV RUTGERS
Inventor： SALVERMOSER MANFRED , MURNICK DANIEL E
IPC: H01J63/00
Abstract: Excimers are formed in a gas (130) by applying a pulsed potential between a first electrode (114) and a counter electrode (126) so that corona discharge occurs, substantially without arcing, when the potential is on. The pulses or on-times of the potential desirably are about 100 microseconds or less. Use of a pulsed potential provides greater efficiency than a constant potential. Where the excimer-forming gas (130) is a pure inert gas, the gas (130) desirably contains less than 10 ppm water vapor.
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公开(公告)号：ES2377217T3
公开(公告)日：2012-03-23
申请号：ES05795116
申请日：2005-08-30
Applicant: UNIV RUTGERS
Inventor： SALVERMOSER MANFRED , MURNICK DANIEL
IPC: H01J63/00
Abstract: Procedimiento para formar excímeros en un gas que comprende la imposición de un campo eléctrico dentro de un gas mediante la aplicación de un potencial eléctrico pulsado que incluye pulsos de 10 a 100 microsegundos de duración entre un primer electrodo (14; 114) dentro del gas y un electrodo contrario (26; 126) alejado del primer electrodo, de modo que los electrones libres pasan hacia dicho electrodo contrario, estando dicho campo eléctrico configurado de modo que durante los pulsos de dicho potencial eléctrico pulsado (i) dentro de una región de dicho campo, dichos electrones libres tienen una distribución de energía de electrones tal que al menos algunos electrones libres tienen energías iguales o mayores que la energía de excitación requerida para formar el excímero; y (ii) dentro de una región de dicho campo, dichos electrones libres tienen una distribución de energía de electrón tal que una mayoría de los electrones libres tienen energías menores que la energía de ionización del gas, de manera que dichos electrones libres excitan el gas y forman excímeros sin causar la formación de arcos.
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公开(公告)号：AT533175T
公开(公告)日：2011-11-15
申请号：AT05795116
申请日：2005-08-30
Applicant: UNIV RUTGERS
Inventor： SALVERMOSER MANFRED , MURNICK DANIEL
IPC: H01J63/00
Abstract: Excimers are formed in a gas ( 30,130 ) by applying a pulsed potential between a first electrode ( 14,114 ) and a counter electrode ( 26, 126 ) so that corona discharge occurs, substantially without arcing, when the potential is on. The pulses or on-times of the potential desirably are about 100 microseconds or less. Use of a pulsed potential provides greater efficiency than a constant potential. Where the excimer-forming gas is a pure inert gas, the gas desirably contains less than 10 ppm water vapor.
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公开(公告)号：AU6534300A
公开(公告)日：2001-03-05
申请号：AU6534300
申请日：2000-08-09
Applicant: UNIV RUTGERS
Inventor： SALVERMOSER MANFRED , MURNICK DANIEL E
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