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公开(公告)号：DE69013958T2
公开(公告)日：1995-03-16
申请号：DE69013958
申请日：1990-03-18
Applicant: USHIO ELECTRIC INC
Inventor： NARITA MITSUO
Abstract: Disclosed is a lighting lamp comprising a light-emitting tube (10) in which lutetium (Lu), lithium (Li) and a halogen are sealed together with mercury and a rare gas. The lighting lamp satisfies the following conditions (1) and (2): (1) the proportion Li/Lu (the ratio in terms of the number of atoms of lithium to lutetium) is 0.5-1.5; and (2) the sealed amount of the halogen is the total amount of a standard amount in which the halogen form halides with lutetium and lithium to be sealed neither too much nor too less and an excess amount of 0.5 x 10 - 4 x 10 molecular mole/cc based on the internal volume of the light-emitting tube. t
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公开(公告)号：DE3632431A1
公开(公告)日：1987-04-09
申请号：DE3632431
申请日：1986-09-24
Applicant: USHIO ELECTRIC INC
Inventor： OHYAMA MASACHIKA , NARITA MITSUO , NOGUCHI KUNIHIRO
Abstract: A metal vapor discharge lamp includes a light-emitting tubing in which a halogen and iron at least 0.005 mg per cc of the internal volume of the light-emitting tubing are filled together with mercury and a rare gas in amounts sufficient to retain a discharge. Magnesium is additionally filled in at a magnesium-to-iron ratio of 1/40-2/3 in terms of gram atom number so as to prevent iron from depositing on the inner wall of the light-emitting tubing and forming a thin film thereon.
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公开(公告)号：DE3621527A1
公开(公告)日：1987-01-08
申请号：DE3621527
申请日：1986-06-27
Applicant: USHIO ELECTRIC INC
Inventor： HIRAMOTO TATSUMI , IWAI IKUO , OHYAMA MASACHIKA , NARITA MITSUO
IPC: H01J61/20 , G03F7/20 , H01J61/88 , H01L21/027
Abstract: A semiconductor wafer can be exposed by arranging a combination of electrodes in an opposed relation with an interelectrode distance of not more than 15 mm in a closed discharge cavity, enclosing, within the cavity, mercury as a light-emitting discharge component in an amount such that the vapor pressure of mercury reaches 0.4-5 atms during discharge lighting, forming a discharge between the combination of electrodes while controlling the discharge current at not less than 10 A, and irradiating light, which has been radiated as a result of the discharge and contains at least one of light components having wave-lengths of 405 nm and 436 nm respectively, onto the surface of a photoresist applied on the semiconductor wafer through a photomask or reticle and a lens which permits transmission of the light having wavelength of 405 nm or 436 nm therethrough.
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公开(公告)号：DE19747803A1
公开(公告)日：1998-05-07
申请号：DE19747803
申请日：1997-10-29
Applicant: USHIO ELECTRIC INC
Inventor： NARITA MITSUO , SUGITANI AKIHIKO , HORIKAWA YOSHIHIRO , ITO TAKASHI , IGARASHI TATSUSHI
Abstract: A metal halogen lamp has a cathode (11) and anode (12) in the discharge chamber of a quartz glass tube (10), separated by less than 2.9 mm. The tube is filled with mercury and a metallic halide. The ratio of the maximum inner diameter to the extent of the cathode from the wall of the discharge chamber is about 1.9. The discharge chamber is ellipsoidal and the centre of the arc is displaced from the geometric centre of the chamber. The tip of the anode is also displaced from this geometric centre. The rated power of the DC supply for the lamp is between 100 and 400 watts. The lamp is used in liquid crystal projectors.
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公开(公告)号：DE69926445T2
公开(公告)日：2006-03-30
申请号：DE69926445
申请日：1999-05-12
Applicant: USHIO ELECTRIC INC
Inventor： NARITA MITSUO
Abstract: A high pressure discharge lamp in which, in the silica glass which comprises the hermetically sealed portion on the cathode side, fractures originating from the contact area with the cathode are prevented from propagating as in a high pressure discharge lamp of the direct current operating type which has: a discharge vessel (1) of silica glass in which opposite sides an arc tube portion are each joined to a respective hermetically sealed portion (1A,1B); a metal foil (2A,2B) is located in each of the hermetically sealed portions; a supply lead is attached in each the hermetically sealed portion with an inner end of the supply lead being connected to a respective one of the metal foils and an outer end projecting outwardly from the discharge vessel; an anode and a cathode are each attached in one of the hermetically sealed portions and have a base which is connected to one of the metal foils and a tip which projects into the arc tube portion; by the outer surface of the cathode-side hermetically sealed portion being surrounded by a conductive component (8) in the area (X) of the cathode (3A), and by the area of the outer surface in which the conductive component is located having microscopically small projecting glass surfaces (11) which do not contact the conductive component.
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Patent Agency Ranking
公开(公告)号：DE69926445D1
公开(公告)日：2005-09-08
申请号：DE69926445
申请日：1999-05-12
Applicant: USHIO ELECTRIC INC
Inventor： NARITA MITSUO
Abstract: A high pressure discharge lamp in which, in the silica glass which comprises the hermetically sealed portion on the cathode side, fractures originating from the contact area with the cathode are prevented from propagating as in a high pressure discharge lamp of the direct current operating type which has: a discharge vessel (1) of silica glass in which opposite sides an arc tube portion are each joined to a respective hermetically sealed portion (1A,1B); a metal foil (2A,2B) is located in each of the hermetically sealed portions; a supply lead is attached in each the hermetically sealed portion with an inner end of the supply lead being connected to a respective one of the metal foils and an outer end projecting outwardly from the discharge vessel; an anode and a cathode are each attached in one of the hermetically sealed portions and have a base which is connected to one of the metal foils and a tip which projects into the arc tube portion; by the outer surface of the cathode-side hermetically sealed portion being surrounded by a conductive component (8) in the area (X) of the cathode (3A), and by the area of the outer surface in which the conductive component is located having microscopically small projecting glass surfaces (11) which do not contact the conductive component.
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公开(公告)号：DE19747803C2
公开(公告)日：2003-03-06
申请号：DE19747803
申请日：1997-10-29
Applicant: USHIO ELECTRIC INC
Inventor： NARITA MITSUO , SUGITANI AKIHIKO , HORIKAWA YOSHIHIRO , ITO TAKASHI , IGARASHI TATSUSHI
Abstract: A metal halide lamp with a distance of less than 3.0 mm between the electrodes, in which in the hermetically sealed portion no cracks occur, which can be produced without difficulty, and which enables advantageous operation is achieved with a halide lamp in which an arc tube made of quartz glass contains a cathode and an anode spaced from each other at a distance of less than or equal to 2.9 mm together with mercury and metal halides, and which is operated with a nominal wattage range of from 100 to 400 W using direct current, by causing the ratio D/H to be greater than or equal to 1.9 when D is the maximum inside diameter in millimeters in a direction which orthogonally intersects the axial direction of the electrodes in the discharge space and H is the length of the cathode projecting within the discharge space, also in millimeters.
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公开(公告)号：DE3632431C2
公开(公告)日：1997-01-16
申请号：DE3632431
申请日：1986-09-24
Applicant: USHIO ELECTRIC INC
Inventor： OHYAMA MASACHIKA , NARITA MITSUO , NOGUCHI KUNIHIRO
Abstract: A metal vapor discharge lamp includes a light-emitting tubing in which a halogen and iron at least 0.005 mg per cc of the internal volume of the light-emitting tubing are filled together with mercury and a rare gas in amounts sufficient to retain a discharge. Magnesium is additionally filled in at a magnesium-to-iron ratio of 1/40-2/3 in terms of gram atom number so as to prevent iron from depositing on the inner wall of the light-emitting tubing and forming a thin film thereon.
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公开(公告)号：DE69013958D1
公开(公告)日：1994-12-15
申请号：DE69013958
申请日：1990-03-18
Applicant: USHIO ELECTRIC INC
Inventor： NARITA MITSUO
Abstract: Disclosed is a lighting lamp comprising a light-emitting tube (10) in which lutetium (Lu), lithium (Li) and a halogen are sealed together with mercury and a rare gas. The lighting lamp satisfies the following conditions (1) and (2): (1) the proportion Li/Lu (the ratio in terms of the number of atoms of lithium to lutetium) is 0.5-1.5; and (2) the sealed amount of the halogen is the total amount of a standard amount in which the halogen form halides with lutetium and lithium to be sealed neither too much nor too less and an excess amount of 0.5 x 10 - 4 x 10 molecular mole/cc based on the internal volume of the light-emitting tube. t
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公开(公告)号：DE3632430A1
公开(公告)日：1987-04-09
申请号：DE3632430
申请日：1986-09-24
Applicant: USHIO ELECTRIC INC
Inventor： OHYAMA MASACHIKA , NARITA MITSUO , NOGUCHI KUNIHIRO
Abstract: A magnesium vapor discharge lamp includes a light-emitting tubing in which magnesium and a halogen are sealed as light-emitting substances together with mercury and a rare gas in amounts sufficient to retain a discharge. Iron is additionally sealed within the light-emitting tubing.
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