公开(公告)号：FI105598B

公开(公告)日：2000-09-15

申请号：FI974486

申请日：1997-12-10

Applicant: VAISALA OYJ ,  VALTION TEKNILLINEN

Inventor： BLOMBERG MARTTI JUHANI ,  TORKKELI ALTTI KALEVA ,  LEHTO ARI

IPC: G02B1/11 ,  G02B5/22

公开(公告)号：DE69511919T2

公开(公告)日：2000-05-04

申请号：DE69511919

申请日：1995-02-09

Applicant: VAISALA OYJ HELSINKI

Inventor： BLOMBERG MARTTI ,  LEHTO ARI ,  ORPANA MARKKU

IPC: G01B9/02 ,  G01J3/26 ,  G01N21/27 ,  G02B5/28 ,  G02B26/00

Abstract: The invention relates to an electrostatically tunable Fabry-Perot interferometer produced by surface micromechanical techniques for use in optical material analysis as an optical sweeping filter in which the optical measurement wavelength is centered at a wavelength lambda . According to the invention, the Fabry-Perot interferometer based sensor structure comprises a body block (1), two essentially parallel mirrors (41, 26) bonded to said body block (1), of which mirrors at least one (41) is partially transmitting and movable relative to the body block (1), said mirrors (41, 26) being spaced maximally by a few half-wavelengths, lambda /2, from each other, and both of the mirror structures (41, 26) include integral electrode structures (6, 20) capable of effecting an electrostatic force between said mirror structures (41, 26). According to the invention, the movable mirror structure (41) is provided with structurally weakened regions (15) surrounding the optical area (24) of the mirror so as to facilitate keeping the optical area (24) at a maximum degree of flatness, and at least one (20) of the electrode structures is adapted to surround said optical area (24) so as to achieve a mechanical lever action and avoid galvanic contact between the electrode (20) of the movable mirror structure (41) and the electrode (6) of the fixed mirror structure (26).

公开(公告)号：DE69511919D1

公开(公告)日：1999-10-14

申请号：DE69511919

申请日：1995-02-09

Applicant: VAISALA OYJ

Inventor： BLOMBERG MARTTI ,  LEHTO ARI ,  ORPANA MARKKU

IPC: G01B9/02 ,  G01J3/26 ,  G01N21/27 ,  G02B5/28 ,  G02B26/00

Abstract: The invention relates to an electrostatically tunable Fabry-Perot interferometer produced by surface micromechanical techniques for use in optical material analysis as an optical sweeping filter in which the optical measurement wavelength is centered at a wavelength lambda . According to the invention, the Fabry-Perot interferometer based sensor structure comprises a body block (1), two essentially parallel mirrors (41, 26) bonded to said body block (1), of which mirrors at least one (41) is partially transmitting and movable relative to the body block (1), said mirrors (41, 26) being spaced maximally by a few half-wavelengths, lambda /2, from each other, and both of the mirror structures (41, 26) include integral electrode structures (6, 20) capable of effecting an electrostatic force between said mirror structures (41, 26). According to the invention, the movable mirror structure (41) is provided with structurally weakened regions (15) surrounding the optical area (24) of the mirror so as to facilitate keeping the optical area (24) at a maximum degree of flatness, and at least one (20) of the electrode structures is adapted to surround said optical area (24) so as to achieve a mechanical lever action and avoid galvanic contact between the electrode (20) of the movable mirror structure (41) and the electrode (6) of the fixed mirror structure (26).

公开(公告)号：FI110727B

公开(公告)日：2003-03-14

申请号：FI943037

申请日：1994-06-23

Applicant: VAISALA OYJ ,  VALTION TEKNILLINEN ,  INSTRUMENTARIUM OYJ

Inventor： BLOMBERG MARTTI JUHANI ,  ORPANA MARKKU OLAVI ,  LEHTO ARI ,  KATTELUS HANNU PEKKA

IPC: G01J5/52 ,  H01K1/02 ,  H01K7/00 ,  H05B3/12 ,  H05B3/10 ,  H01K1/08 ,  H05B3/26

Abstract: The invention is related to an electrically modulatable radiant source comprising an essentially planar substrate (1), a well (2) or hole formed into the substrate (1), at least one incandescent filament (3) attached to the substrate (1), said filament being aligned at said well (2) or hole, and contact pads (5) formed onto the substrate (1) at both ends of the incandescent filament (3) for feeding electric current to the incandescent filament (3). According to the invention, the incandescent filament (3) is made from a metal and coated with a continuous thin film (32, 36) at least for the parts floating free from the substrate (1).

公开(公告)号：FI106754B

公开(公告)日：2001-03-30

申请号：FI904050

申请日：1990-08-16

Applicant: VAISALA OYJ

Inventor： LEHTO ARI ,  LAHDENPERAE JUHA ,  KUISMA HEIKKI

IPC: H01L20060101 ,  H01L21/60 ,  H01L21/78 ,  H01L23/48

Abstract: This publication describes a contact-furnished pickup 1' with layer structure and a method for creating the contacting of the pickup. According to the invention, the contacts 5' are formed on the side surface 7 of the pickup by utilisation of laser-based metallisation technique, by vaporisation, or by utilisation of another suitable deposition technique. As a result of the new method of contacting, the size of the pickup 1' can be reduced and the pickup 1' can be connected to a circuit card by utilisation of surface mounting technique.