公开(公告)号：WO1997026527A1

公开(公告)日：1997-07-24

申请号：PCT/US1997000875

申请日：1997-01-21

Applicant: XROS, INC.

Inventor： XROS, INC. ,  NEUKERMANS, Armand, P. ,  SLATER, Timothy, G.

IPC: G01N11/00

CPC classification number: G01F1/28 ,  G01F1/26

Abstract: A micromachined, monolithic silicon vane-type flow meter (20) includes a vane (28) from which inwardly projects a hinge. The hinge is provided with torsion bars (24). The hinge supports a vane (28) for rotation about the torsion bars (24). A deflection sensing means, consisting of a torsion sensor (42) incorporated into at least one of the torsion bars (24), senses deflection of the vane (28) responsive to fluid impinging thereupon. The frame (22), the torsion bars (24) and the torsion sensor (42) are all monolithically fabricated in a semiconductor single-crystal silicon layer of a substrate.

Abstract translation: 微加工的整体式硅片式流量计（20）包括叶片（28），叶片向内突出铰链。 铰链设有扭杆（24）。 铰链支撑用于围绕扭杆（24）旋转的叶片（28）。 由扭转传感器（42）组成的偏转感测装置包括至少一个扭力杆（24），其响应于流体撞击其上的叶片（28）的偏转。 框架（22），扭力杆（24）和扭转传感器（42）都是整体地制造在衬底的半导体单晶硅层中。

公开(公告)号：WO1997041527A1

公开(公告)日：1997-11-06

申请号：PCT/US1997007230

申请日：1997-05-01

Applicant: XROS, INC.

Inventor： XROS, INC. ,  NEUKERMANS, Armand, P. ,  SLATER, Timothy, G. ,  DOWNING, Philip

IPC: G06K09/00

CPC classification number: G06K9/00046 ,  G02B26/085 ,  G06K9/00013 ,  G06K9/00053 ,  G06K9/2009

Abstract: A beam (38) of electromagnetic radiation deflected by a moving mirror plate (56) of a micromachined scanner (54) produces a two dimensional ("2D") raster (132) on a scanned surface (28) of a block (34). The block (34) is transparent to electro-magnetic radiation of pre-established wavelengths. A radiation inlet-face (36) of the block (34) admits the beam (38) that then inpinges on the scanned surface (28) to exit the block (34) through a radiation outlet-face (42). After exiting the block (34), the beam (38) inpinges upon a radiation detector (142). Total internal reflection ("TIR") of the beam (38) from the scanned surface (28) at fingerprint valleys and frustration of TIR at fingerprint ridges causes the radiation detector (142) to produce a time-varying electrical signal that represents the fingerprint. The scanned surface (28) may be formed by a patch (302) of resilient material, that may be tinted to be transparent only at the pre-established wavelength of the electro-magnetic radiation.

Abstract translation: 由微机械扫描器（54）的移动镜板（56）偏转的电磁辐射束（38）在块（34）的扫描表面（28）上产生二维（“2D”）光栅（132） 。 块（34）对于预先建立的波长的电磁辐射是透明的。 块（34）的辐射入射面（36）允许束（38），然后通过辐射出射面（42）将所述光束（38）插入到扫描表面（28）上以离开块体（34）。 在离开块（34）之后，光束（38）进入辐射探测器（142）。 来自扫描表面（28）的光束（38）在指纹谷处的全内反射（“TIR”）和指纹脊上TIR的挫折使得辐射探测器（142）产生代表指纹的时变电信号 。 扫描表面（28）可以由弹性材料的贴片（302）形成，其可以仅在电磁辐射的预先建立的波长下被着色为透明。

公开(公告)号：WO1997023800A1

公开(公告)日：1997-07-03

申请号：PCT/US1996020614

申请日：1996-12-24

Applicant: XROS, INC.

Inventor： XROS, INC. ,  NEUKERMANS, Armand, P.

IPC: G02B26/08

CPC classification number: H04N1/1135 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/105 ,  H04N1/00204 ,  H04N1/00236 ,  H04N1/00238 ,  H04N1/0283 ,  H04N1/12 ,  H04N1/193 ,  H04N2201/0063

Abstract: A compact medium scanner (100) scans a surface (132) of a medium (134) with a beam of light (106). A medium transport mechanism (202, 206) advances the surface along a medium transport path through a scanning station. A light source (104) produces a collimated beam of light (106) that impinges upon a mirror plate (112) of a micromachined torsional scanner (108). A pair of coaxially aligned torsion bars (304) support the mirror plate (112) within the torsional scanner (108). A mirror-surface drive means (306, 312) rotates the mirror plate (112) about the torsion bars (304). A single reciprocation of the mirror plate (112) by the drive means (306, 312) deflects the beam of light (106) over a fan-shaped region having a virtually fixed vertex (128) on the mirror plate (112). Scanner optics (116, 122) direct the fan-shaped region beam of light (106) onto the surface (132) of the medium (134) then present in the scanning station to thereby scan across the medium (134) with the beam of light (106).

Abstract translation: 紧凑介质扫描器（100）用光束（106）扫描介质（134）的表面（132）。 中间传送机构（202,206）使表面沿着介质输送路径前进通过扫描台。 光源（104）产生撞击微加工扭转扫描器（108）的镜板（112）的准直光束（106）。 一对同轴对准的扭杆（304）支撑在扭转扫描器（108）内的镜板（112）。 镜面驱动装置（306,312）围绕扭杆（304）旋转镜板（112）。 通过驱动装置（306,312），镜板（112）的单次往复运动将光束（106）偏转在具有实际上固定的顶点（128）的扇形区域在镜板（112）上。 扫描仪光学器件（116,122）将扇形区域光束（106）引导到介质（134）的表面（132）上，然后存在于扫描站中，从而用介质（134）的横梁扫描 光（106）。