公开(公告)号：WO1997041527A1

公开(公告)日：1997-11-06

申请号：PCT/US1997007230

申请日：1997-05-01

Applicant: XROS, INC.

Inventor： XROS, INC. ,  NEUKERMANS, Armand, P. ,  SLATER, Timothy, G. ,  DOWNING, Philip

IPC: G06K09/00

CPC classification number: G06K9/00046 ,  G02B26/085 ,  G06K9/00013 ,  G06K9/00053 ,  G06K9/2009

Abstract: A beam (38) of electromagnetic radiation deflected by a moving mirror plate (56) of a micromachined scanner (54) produces a two dimensional ("2D") raster (132) on a scanned surface (28) of a block (34). The block (34) is transparent to electro-magnetic radiation of pre-established wavelengths. A radiation inlet-face (36) of the block (34) admits the beam (38) that then inpinges on the scanned surface (28) to exit the block (34) through a radiation outlet-face (42). After exiting the block (34), the beam (38) inpinges upon a radiation detector (142). Total internal reflection ("TIR") of the beam (38) from the scanned surface (28) at fingerprint valleys and frustration of TIR at fingerprint ridges causes the radiation detector (142) to produce a time-varying electrical signal that represents the fingerprint. The scanned surface (28) may be formed by a patch (302) of resilient material, that may be tinted to be transparent only at the pre-established wavelength of the electro-magnetic radiation.

Abstract translation: 由微机械扫描器（54）的移动镜板（56）偏转的电磁辐射束（38）在块（34）的扫描表面（28）上产生二维（“2D”）光栅（132） 。 块（34）对于预先建立的波长的电磁辐射是透明的。 块（34）的辐射入射面（36）允许束（38），然后通过辐射出射面（42）将所述光束（38）插入到扫描表面（28）上以离开块体（34）。 在离开块（34）之后，光束（38）进入辐射探测器（142）。 来自扫描表面（28）的光束（38）在指纹谷处的全内反射（“TIR”）和指纹脊上TIR的挫折使得辐射探测器（142）产生代表指纹的时变电信号 。 扫描表面（28）可以由弹性材料的贴片（302）形成，其可以仅在电磁辐射的预先建立的波长下被着色为透明。

公开(公告)号：EP1012890A1

公开(公告)日：2000-06-28

申请号：EP98915245.9

申请日：1998-04-01

Applicant: Xros, Inc.

Inventor： NEUKERMANS, Armand, P. ,  SLATER, Timothy, G. ,  DOWNING, Philip

IPC: H01L41/08

CPC classification number: B81B3/0078 ,  B81B2203/0109 ,  B81C2201/0167 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  G02B26/101 ,  H02K33/18

Abstract: An improved micromachined structure used for beam scanners, gyroscopes, etc. includes a reference member (154, 54) from which project a first pair of axially aligned torsion bars (156, 56). A first dynamic member (54 or 52), coupled to and supported from the reference member (154, 54) by the torsion bars (156, 56), oscillates in one-dimension about the torsion bar's axis. A second dynamic member (52) may be supported from the first dynamic member (54) by a second pair of axially aligned torsion bars (56) for two-dimensional oscillation. The dynamic members (54, 52) respectively exhibit a plurality of vibrational modes each having a frequency and a Q. The improvement includes means for altering a characteristic of the dynamic member's frequency and Q. Coupling between dynamic members (54, 52) permits altering the second dynamic member's frequency and Q by techniques applied to the first dynamic member (54). Some techniques disclosed also increase oscillation amplitude or reduce driving voltage, and also increase mechanical ruggedness of the structure.

Abstract translation: 用于束扫描仪，陀螺仪等的改进的微机械结构包括参考构件（154,54），第一对轴向对齐的扭杆（156,56）从该参考构件（154,54）突出。 通过扭杆（156,56）联接到参考构件（154,54）并由参考构件（154,54）支撑的第一动态构件（54或52）围绕扭杆的轴线在一维上振动。 第二动态构件（52）可以由第二对轴向对齐的扭杆（56）从第一动态构件（54）支撑以进行二维摆动。 动态元件（54,52）分别具有多个振动模式，每个振动模式具有一个频率和一个Q.改进包括用于改变动态元件的频率和Q的特性的装置。动态元件（54,52）之间的耦合允许改变 第二动态构件的频率和Q通过应用于第一动态构件（54）的技术。 所公开的一些技术还增加了振幅或降低了驱动电压，并且还增加了结构的机械耐用性。

公开(公告)号：EP0950227A1

公开(公告)日：1999-10-20

申请号：EP97922548.0

申请日：1997-05-01

Applicant: Xros,Inc.

Inventor： NEUKERMANS, Armand, P. ,  SLATER, Timothy, G. ,  DOWNING, Philip

IPC: G02B26 ,  G06K9

CPC classification number: G06K9/00046 ,  G02B26/085 ,  G06K9/00013 ,  G06K9/00053 ,  G06K9/2009

Abstract: A beam (38) of electromagnetic radiation deflected by a moving mirror plate (56) of a micromachined scanner (54) produces a two dimensional ('2D') raster (132) on a scanned surface (28) of a block (34). The block (34) is transparent to electro-magnetic radiation of pre-established wavelengths. A radiation inlet-face (36) of the block (34) admits the beam (38) that then inpinges on the scanned surface (28) to exit the block (34) through a radiation outlet-face (42). After exiting the block (34), the beam (38) inpinges upon a radiation detector (142). Total internal reflection ('TIR') of the beam (38) from the scanned surface (28) at fingerprint valleys and frustration of TIR at fingerprint ridges causes the radiation detector (142) to produce a time-varying electrical signal that represents the fingerprint. The scanned surface (28) may be formed by a patch (302) of resilient material, that may be tinted to be transparent only at the pre-established wavelength of the electro-magnetic radiation.