公开(公告)号：WO2001061400A2

公开(公告)日：2001-08-23

申请号：PCT/US2001/005309

申请日：2001-02-16

Applicant: XROS, INC., NORTEL NETWORKS ,  SLATER, Timothy, G. ,  NEUKERMANS, Armand, P. ,  BAJIKAR, Sateesh, S. ,  DOWNING, James, P. ,  SCHUMAN, Marc, R. ,  CALMES, Sam ,  ROMANSOVSKY, Alexander, B. ,  GREEN, John

Inventor： SLATER, Timothy, G. ,  NEUKERMANS, Armand, P. ,  BAJIKAR, Sateesh, S. ,  DOWNING, James, P. ,  SCHUMAN, Marc, R. ,  CALMES, Sam ,  ROMANSOVSKY, Alexander, B. ,  GREEN, John

IPC: G02B26/00

CPC classification number: G02B26/085 ,  G02B26/0841

Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

Abstract translation: 提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。 在微镜结构中，用于静电偏转的电极设置在被加工，附接或模制成基底的锥形或准圆锥形实体上。 这些电极与旋转轴大致平行或偏移45度，形成象限。 扭转传感器沿旋转轴提供，以控制象限偏转电极的偏转。

公开(公告)号：WO1997026527A1

公开(公告)日：1997-07-24

申请号：PCT/US1997000875

申请日：1997-01-21

Applicant: XROS, INC.

Inventor： XROS, INC. ,  NEUKERMANS, Armand, P. ,  SLATER, Timothy, G.

IPC: G01N11/00

CPC classification number: G01F1/28 ,  G01F1/26

Abstract: A micromachined, monolithic silicon vane-type flow meter (20) includes a vane (28) from which inwardly projects a hinge. The hinge is provided with torsion bars (24). The hinge supports a vane (28) for rotation about the torsion bars (24). A deflection sensing means, consisting of a torsion sensor (42) incorporated into at least one of the torsion bars (24), senses deflection of the vane (28) responsive to fluid impinging thereupon. The frame (22), the torsion bars (24) and the torsion sensor (42) are all monolithically fabricated in a semiconductor single-crystal silicon layer of a substrate.

Abstract translation: 微加工的整体式硅片式流量计（20）包括叶片（28），叶片向内突出铰链。 铰链设有扭杆（24）。 铰链支撑用于围绕扭杆（24）旋转的叶片（28）。 由扭转传感器（42）组成的偏转感测装置包括至少一个扭力杆（24），其响应于流体撞击其上的叶片（28）的偏转。 框架（22），扭力杆（24）和扭转传感器（42）都是整体地制造在衬底的半导体单晶硅层中。

公开(公告)号：WO1997041527A1

公开(公告)日：1997-11-06

申请号：PCT/US1997007230

申请日：1997-05-01

Applicant: XROS, INC.

Inventor： XROS, INC. ,  NEUKERMANS, Armand, P. ,  SLATER, Timothy, G. ,  DOWNING, Philip

IPC: G06K09/00

CPC classification number: G06K9/00046 ,  G02B26/085 ,  G06K9/00013 ,  G06K9/00053 ,  G06K9/2009

Abstract: A beam (38) of electromagnetic radiation deflected by a moving mirror plate (56) of a micromachined scanner (54) produces a two dimensional ("2D") raster (132) on a scanned surface (28) of a block (34). The block (34) is transparent to electro-magnetic radiation of pre-established wavelengths. A radiation inlet-face (36) of the block (34) admits the beam (38) that then inpinges on the scanned surface (28) to exit the block (34) through a radiation outlet-face (42). After exiting the block (34), the beam (38) inpinges upon a radiation detector (142). Total internal reflection ("TIR") of the beam (38) from the scanned surface (28) at fingerprint valleys and frustration of TIR at fingerprint ridges causes the radiation detector (142) to produce a time-varying electrical signal that represents the fingerprint. The scanned surface (28) may be formed by a patch (302) of resilient material, that may be tinted to be transparent only at the pre-established wavelength of the electro-magnetic radiation.

Abstract translation: 由微机械扫描器（54）的移动镜板（56）偏转的电磁辐射束（38）在块（34）的扫描表面（28）上产生二维（“2D”）光栅（132） 。 块（34）对于预先建立的波长的电磁辐射是透明的。 块（34）的辐射入射面（36）允许束（38），然后通过辐射出射面（42）将所述光束（38）插入到扫描表面（28）上以离开块体（34）。 在离开块（34）之后，光束（38）进入辐射探测器（142）。 来自扫描表面（28）的光束（38）在指纹谷处的全内反射（“TIR”）和指纹脊上TIR的挫折使得辐射探测器（142）产生代表指纹的时变电信号 。 扫描表面（28）可以由弹性材料的贴片（302）形成，其可以仅在电磁辐射的预先建立的波长下被着色为透明。

公开(公告)号：EP0912883B1

公开(公告)日：2003-04-16

申请号：EP97904818.8

申请日：1997-01-21

Applicant: Xros, Inc.

Inventor： NEUKERMANS, Armand, P. ,  SLATER, Timothy, G.

IPC: G01N11/00 ,  G01F1/28

CPC classification number: G01F1/28 ,  G01F1/26

Abstract: A micromachined, monolithic silicon vane-type flow meter (20) includes a vane (28) from which inwardly projects a hinge. The hinge is provided with torsion bars (24). The hinge supports a vane (28) for rotation about the torsion bars (24). A deflection sensing means, consisting of a torsion sensor (42) incorporated into at least one of the torsion bars (24), senses deflection of the vane (28) responsive to fluid impinging thereupon. The frame (22), the torsion bars (24) and the torsion sensor (42) are all monolithically fabricated in a semiconductor single-crystal silicon layer of a substrate.

公开(公告)号：EP1121616A2

公开(公告)日：2001-08-08

申请号：EP99970167.5

申请日：1999-09-15

Applicant: Xros, Inc.

Inventor： NEUKERMANS, Armand, P. ,  SLATER, Timothy, G. ,  BAUGHMAN, Tyler, L. ,  DOWNING, James, P. ,  FORKER, John, S. ,  REZNICK, Gregory, A. ,  CALMES, Sam ,  CLARK, Steven, M. ,  FOSTER, Jack, D. ,  SCHUMAN, Marc, R. ,  RAMASWAMI, Rajiv

IPC: G02B6/35

CPC classification number: G02B6/3518 ,  G02B6/32 ,  G02B6/327 ,  G02B6/352 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3636 ,  G02B6/3656 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  H04Q11/0005 ,  H04Q2011/003 ,  H04Q2011/0039 ,  H04Q2011/0043

Abstract: A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) included in the switch (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals received from the deflector (172) and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs of deflectors (172) coupling a beam of light (108) between optical fibers (106).

公开(公告)号：EP0996922A1

公开(公告)日：2000-05-03

申请号：EP98939862.3

申请日：1998-07-23

Applicant: Xros, Inc.

Inventor： NEUKERMANS, Armand, P. ,  DOWNING, James, P. ,  SLATER, Timothy, G.

IPC: G06K7/10

CPC classification number: H04N1/00689 ,  H04N1/00885 ,  H04N1/00891 ,  H04N1/0476 ,  H04N1/107 ,  H04N1/1072 ,  H04N1/1078 ,  H04N1/121 ,  H04N1/193 ,  H04N2201/0096 ,  H04N2201/0471 ,  H04N2201/04732 ,  H04N2201/04737

Abstract: A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.

公开(公告)号：EP1342121A2

公开(公告)日：2003-09-10

申请号：EP01934837.4

申请日：2001-02-16

Applicant: XROS, Inc., Nortel Networks

Inventor： SLATER, Timothy, G. ,  NEUKERMANS, Armand, P. ,  BAJIKAR, Sateesh, S. ,  DOWNING, James, P. ,  SCHUMAN, Marc, R. ,  CALMES, Sam ,  ROMANSOVSKY, Alexander, B. ,  GREEN, John

IPC: G02B26/00

CPC classification number: G02B26/085 ,  G02B26/0841

Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. Torsion sensors (244) are provided along the axes of rotation to control deflection of the quadrant deflection electrodes. The shielded sensor structure (240) includes a silicon layer (241), an insulating layer (242) and a metal layer (243). The structure further includes a sensor implant resistor (244) in the silicon layer (241) and a shield (245) that is applied over the sensor implant resistor (244) to stabilise sensor output and eliminate light sensitivity.

公开(公告)号：EP1012890A1

公开(公告)日：2000-06-28

申请号：EP98915245.9

申请日：1998-04-01

Applicant: Xros, Inc.

Inventor： NEUKERMANS, Armand, P. ,  SLATER, Timothy, G. ,  DOWNING, Philip

IPC: H01L41/08

CPC classification number: B81B3/0078 ,  B81B2203/0109 ,  B81C2201/0167 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  G02B26/101 ,  H02K33/18

Abstract: An improved micromachined structure used for beam scanners, gyroscopes, etc. includes a reference member (154, 54) from which project a first pair of axially aligned torsion bars (156, 56). A first dynamic member (54 or 52), coupled to and supported from the reference member (154, 54) by the torsion bars (156, 56), oscillates in one-dimension about the torsion bar's axis. A second dynamic member (52) may be supported from the first dynamic member (54) by a second pair of axially aligned torsion bars (56) for two-dimensional oscillation. The dynamic members (54, 52) respectively exhibit a plurality of vibrational modes each having a frequency and a Q. The improvement includes means for altering a characteristic of the dynamic member's frequency and Q. Coupling between dynamic members (54, 52) permits altering the second dynamic member's frequency and Q by techniques applied to the first dynamic member (54). Some techniques disclosed also increase oscillation amplitude or reduce driving voltage, and also increase mechanical ruggedness of the structure.

Abstract translation: 用于束扫描仪，陀螺仪等的改进的微机械结构包括参考构件（154,54），第一对轴向对齐的扭杆（156,56）从该参考构件（154,54）突出。 通过扭杆（156,56）联接到参考构件（154,54）并由参考构件（154,54）支撑的第一动态构件（54或52）围绕扭杆的轴线在一维上振动。 第二动态构件（52）可以由第二对轴向对齐的扭杆（56）从第一动态构件（54）支撑以进行二维摆动。 动态元件（54,52）分别具有多个振动模式，每个振动模式具有一个频率和一个Q.改进包括用于改变动态元件的频率和Q的特性的装置。动态元件（54,52）之间的耦合允许改变 第二动态构件的频率和Q通过应用于第一动态构件（54）的技术。 所公开的一些技术还增加了振幅或降低了驱动电压，并且还增加了结构的机械耐用性。

公开(公告)号：EP0912883A1

公开(公告)日：1999-05-06

申请号：EP97904818.0

申请日：1997-01-21

Applicant: Xros, Inc.

Inventor： NEUKERMANS, Armand, P. ,  SLATER, Timothy, G.

IPC: B81B3 ,  G01F1

CPC classification number: G01F1/28 ,  G01F1/26

Abstract: A micromachined, monolithic silicon vane-type flow meter (20) includes a vane (28) from which inwardly projects a hinge. The hinge is provided with torsion bars (24). The hinge supports a vane (28) for rotation about the torsion bars (24). A deflection sensing means, consisting of a torsion sensor (42) incorporated into at least one of the torsion bars (24), senses deflection of the vane (28) responsive to fluid impinging thereupon. The frame (22), the torsion bars (24) and the torsion sensor (42) are all monolithically fabricated in a semiconductor single-crystal silicon layer of a substrate.

公开(公告)号：EP1254479A1

公开(公告)日：2002-11-06

申请号：EP01903124.4

申请日：2001-01-18

Applicant: XROS, Inc., Nortel Networks

Inventor： SLATER, Timothy, G.

IPC: H01L21/20 ,  H01L21/762

CPC classification number: H01L21/2007 ,  H01L21/76251

Abstract: A bonded wafer fabrication mechanism for a micro-mirror structure provides for oxidizing a device wafer instead of a handle wafer or splitting thermal oxidation processing between the device wafer and the handle wafer prior to etching. The flatness of mirrors in micro-mirror structures fabricated according to such a mechanism is substantially improved.