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公开(公告)号：JPS6234132B2
公开(公告)日：1987-07-24
申请号：JP9466382
申请日：1982-06-02
Applicant: YOKOGAWA HYUURETSUTO PATSUKAADO KK
Inventor： JON KERII , FUEI PEI KUO , BAANAADO EMU ORIBAA , JATSUKU DEII FUOSUTAA , UEIN SHII HATSUSE
IPC: G01R31/302 , H01J3/26 , H01J37/04 , H01J37/09 , H01J37/153 , H01L21/027 , H01L21/30 , H01L21/66
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