公开(公告)号：CN108955889A

公开(公告)日：2018-12-07

申请号：CN201710625449.0

申请日：2017-07-27

Applicant: 应用材料公司

Inventor： 塞缪尔·C·豪厄尔斯

IPC: G01J5/00

CPC classification number: G01J5/0828 ,  G01J3/18 ,  G01J5/0007 ,  G01J5/041 ,  H01L21/67115 ,  H01L21/67248 ,  G01J5/00

Abstract: 一种处理基板的装置和方法包括：探测器歧管，所述探测器歧管用以探测来自腔室主体中的处理区附近的辐射；辐射探测器，所述辐射探测器光耦合至所述探测器歧管；和光谱多陷波滤波器。处理基板的装置和方法包括：探测来自腔室主体中的基板的发射表面的透射辐射；将所探测的辐射的至少一个光谱带传递至光探测器；以及分析在至少一个光谱带中的所探测的辐射以确定基板的推断温度。

公开(公告)号：CN107024282A

公开(公告)日：2017-08-08

申请号：CN201710341341.9

申请日：2017-05-04

Applicant: 金华职业技术学院

Inventor： 赵永建 ,  方晓华 ,  张向平

IPC: G01J5/28 ,  G01J5/08

CPC classification number: G01J5/28 ,  G01J5/0806 ,  G01J5/0825 ,  G01J5/0828 ,  G01J2005/0081

Abstract: 本发明涉及放射性检测技术领域，一种基于声光可调谐滤波器的辐射谱仪，包括孔径光阑、复消色差透镜、光学暗箱、起偏器、视场光阑、准直透镜、分束器、平面镜I、透镜I、光电二极管、跨阻抗放大器、窄带输出信号、Lyot光阑、声光可调谐滤波器AOTF、透镜II、平面镜II、微波发生器、CCD摄像机，由所述透镜II和平面镜II组成光回射系统，所述第一次滤出光通过所述透镜II到达平面镜II、并被所述平面镜II反射后通过所述透镜II再次进入所述声光可调谐滤波器AOTF中，经过第二次折射后其偏振方向不变并形成与原光束传播方向相对的第二次滤出光。本发明可调波长范围宽，带外光透射度低，辐射探测能力强，灵敏度高；使用光回射系统能够使得光损耗更小。

公开(公告)号：CN108195473A

公开(公告)日：2018-06-22

申请号：CN201711434626.3

申请日：2017-12-26

Applicant: 中国工程物理研究院上海激光等离子体研究所

Inventor： 贾果 ,  贺芝宇 ,  张帆 ,  谢志勇 ,  黄秀光 ,  曹兆栋 ,  涂昱淳 ,  熊俊 ,  王琛 ,  方智恒 ,  舒桦 ,  叶君建 ,  郭尔夫 ,  董佳钦 ,  安红海

IPC: G01J5/52 ,  G01J5/54 ,  G01J5/50 ,  G01J5/08

CPC classification number: G01J5/52 ,  G01J5/0828 ,  G01J5/505 ,  G01J5/54

Abstract: 本发明公开了一种用于冲击波实验的多通道冲击温度诊断方法，该方法包括以下步骤：步骤1，搭建冲击波实验诊断光路；步骤2，在高功率激光装置上开展冲击波状态方程实验：步骤3，对所述步骤2中的冲击波状态方程实验中的SOP系统进行标定：步骤4，计算待测靶自发辐射强度：步骤5，多通道拟合冲击温度。本发明基于普朗克灰体辐射理论以及光学高温计系统的测温诊断手段，以激光加载下透明材料冲击温度测量实验为例，在不使用光谱仪和不消耗多通道光纤的条件下实现利用多通道测量材料的冲击温度，并给出多通道拟合得到的冲击温度与发射率。该方法相比较单通道测量冲击温度的方法更为可靠，相比较利用其他多通道测量冲击温度的方法更为简便、高效。

公开(公告)号：US09995628B1

公开(公告)日：2018-06-12

申请号：US15155773

申请日：2016-05-16

Applicant: The Board of Regents of the University of Nebraska

Inventor： Ming Han ,  Guigen Liu ,  Weilin Hou

IPC: G01B9/02 ,  G01J3/45 ,  G02B6/293 ,  G02B6/27 ,  G01J3/26 ,  G01K11/32 ,  G01F1/66 ,  G01P5/26

CPC classification number: G01P5/26 ,  G01F1/6884 ,  G01J3/26 ,  G01J5/0821 ,  G01J5/0828 ,  G01J5/0862 ,  G01J5/0896 ,  G01J5/58 ,  G01J2005/583 ,  G01K11/3206 ,  G01K13/02 ,  G02B6/241 ,  G02B6/29359

Abstract: A fiber optic sensor, a process for utilizing a fiber optic sensor, and a process for fabricating a fiber optic sensor are described, where a double-side-polished silicon pillar is attached to an optical fiber tip and forms a Fabry-Pérot cavity. In an implementation, a fiber optic sensor in accordance with an exemplary embodiment includes an optical fiber configured to be coupled to a light source and a spectrometer; and a single silicon layer or multiple silicon layers disposed on an end face of the optical fiber, where each of the silicon layer(s) defines a Fabry-Pérot interferometer, and where the sensor head reflects light from the light source to the spectrometer. In some implementations, the fiber optic sensor may include the light source coupled to the optical fiber; a spectrometer coupled to the optical fiber; and a controller coupled to the high speed spectrometer.

公开(公告)号：US20180031426A1

公开(公告)日：2018-02-01

申请号：US15225165

申请日：2016-08-01

Applicant: Honeywell International Inc.

Inventor： Barrett E. Cole ,  Christopher Scott Larsen ,  Kwong Wing Au

IPC: G01J5/00 ,  G01J5/08 ,  G01J5/34

CPC classification number: G01J5/0018 ,  G01J5/0014 ,  G01J5/026 ,  G01J5/0806 ,  G01J5/0828 ,  G01J5/0831 ,  G01J5/20 ,  G01J5/34 ,  G01J2005/345

Abstract: A flame detector includes a beam splitter to split mid-wave infrared radiation (MWIR) and long-wave infrared radiation (LWIR) into an MWIR component and an LWIR component. An MWIR detector detects the MWIR component and an LWIR detector detects the LWIR component. The flame detector analyzes the MWIR component to determine the presence of a flame and analyzes the LAIR component to determine whether the system is functioning properly.

公开(公告)号：US20160096236A1

公开(公告)日：2016-04-07

申请号：US14504433

申请日：2014-10-02

Applicant: Industrial Technology Research Institute

Inventor： Chia-Hung Cho ,  Yi-Chen Hsieh ,  Kai-Ping Chuang ,  Sen-Yih Chou ,  Chun-Jen Lin

IPC: B23K26/34 ,  B23K26/067 ,  B23K26/30 ,  G01J5/08 ,  B23K26/03

CPC classification number: B23K26/342 ,  B22F3/1055 ,  B22F2003/1056 ,  B23K26/032 ,  B23K26/034 ,  B23K26/082 ,  B23K26/707 ,  B29C64/153 ,  B29C67/0077 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/0828 ,  G01J5/0846 ,  G01J2005/106 ,  Y02P10/295

Abstract: A temperature sensing apparatus configured to measure a temperature distribution of a surface to be measured is provided. The temperature sensing apparatus includes a lens set, a filtering module, a plurality of sensor arrays, and a processing unit. The lens set is configured to receive radiation from the surface to be measured. The filtering module is configured to filter the radiation from the lens set into a plurality of radiation portions respectively having different wavelengths. The sensor arrays are configured to respectively sense the radiation portions. The processing unit is configured to calculate an intensity ratio distribution of the radiation between the different wavelengths according to the radiation portions respectively sensed by the sensor arrays and determine the temperature distribution according to the intensity ratio distribution. A laser processing system and a temperature measuring method are also provided.

Abstract translation: 提供了一种被配置为测量待测表面的温度分布的温度感测装置。 温度感测装置包括透镜组，滤光模块，多个传感器阵列和处理单元。 透镜组被配置为从待测量的表面接收辐射。 滤波模块被配置为将来自透镜组的辐射滤波成分别具有不同波长的多个辐射部分。 传感器阵列被配置成分别感测辐射部分。 处理单元被配置为根据由传感器阵列分别感测的辐射部分来计算不同波长之间的辐射的强度比分布，并根据强度比分布确定温度分布。 还提供了激光加工系统和温度测量方法。

公开(公告)号：US5755512A

公开(公告)日：1998-05-26

申请号：US637599

申请日：1996-04-25

Applicant: Julian Darryn White

Inventor： Julian Darryn White

IPC: G01K11/12 ,  G01N21/65 ,  G01K11/00

CPC classification number: G01K11/125 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/08 ,  G01J5/0821 ,  G01J5/0828 ,  G01J5/0834 ,  G01J5/0896 ,  G01J5/602 ,  G01J2001/4242

Abstract: This invention relates to apparatus for sensing, remotely, the temperature of a semi-conductor wafer and includes means for shining a single frequency light 11 onto the surface 12 of a semi-conductor wafer 13 so that some of that light is scattered. The scattered light is focused by a lens 15 and the single frequency is filtered out of the scattered light by notch filter 17. The filtered beam is split by beam splitter 18 and the resultant two beams are filtered so that they respectively pass only the Stokes and anti-Stokes frequencies respectively. The intensities of these respective light beams are then measured and from these the temperature of the semi-conductor wafer is calculated.

Abstract translation: 本发明涉及用于远程感测半导体晶片的温度的装置，并且包括用于将单个频率的光11照射到半导体晶片13的表面12上以使得一些光被散射的装置。 散射光被透镜15聚焦，并且单个频率被陷波滤波器17滤出散射光。滤波后的光束被分束器18分离，并且所得到的两个光束被过滤，使得它们分别仅通过斯托克斯和 反斯托克斯频率。 然后测量这些各个光束的强度，并从中计算半导体晶片的温度。

公开(公告)号：US20130043394A1

公开(公告)日：2013-02-21

申请号：US13211413

申请日：2011-08-17

Applicant: James A. Chervenak ,  Ari D. Brown ,  Edward J. Wollack ,  Dominic J. Benford

Inventor： James A. Chervenak ,  Ari D. Brown ,  Edward J. Wollack ,  Dominic J. Benford

IPC: G01J5/10

CPC classification number: G01J3/0227 ,  G01J3/42 ,  G01J5/0828 ,  G01J5/0837 ,  G01J5/20 ,  G01N21/3581

Abstract: An apparatus for ultrasensitive long-wave imaging cameras is provided. In one embodiment, the apparatus includes a filter configured to allow high frequencies of interest to pass through the filter. The apparatus also includes an antenna that is configured to receive the high frequencies of interest. The apparatus further includes a plurality of bolometers that are configured to measure data regarding the high frequencies of interest.

Abstract translation: 提供了一种用于超灵敏长波成像相机的设备。 在一个实施例中，该装置包括被配置为允许感兴趣的高频通过滤波器的滤波器。 该装置还包括被配置为接收感兴趣的高频的天线。 该装置还包括多个测辐射热计，其配置成测量关于感兴趣的高频的数据。

公开(公告)号：US5364186A

公开(公告)日：1994-11-15

申请号：US874829

申请日：1992-04-28

Applicant: Zhihai Wang ,  Bruce Adams

Inventor： Zhihai Wang ,  Bruce Adams

IPC: G01J5/08 ,  G01K11/00

CPC classification number: G01J5/04 ,  G01J5/042 ,  G01J5/048 ,  G01J5/08 ,  G01J5/0821 ,  G01J5/0828 ,  G01J5/0887

Abstract: A blackbody high temperature probe is formed by thermally fusing a coating of composite ceramic material on the tip of a high temperature lightpipe or fiber. The ceramic coating replaces conventional sputtered metallic thin films to form a blackbody optical cavity. The ingredients of the composite ceramic material include a mixture of refractory metal oxides forming the bulk of the material, various pigments and/or refractory metal powders, and binding agents. A firing process is used to thermally fuse the coating onto the lightpipe. Embodiments of the firing process include using a flame or furnace technique, or alternatively using various flame- or plasma- spraying techniques. A thermally fused coating of from 10 to a few hundred micrometers provides a durable blackbody temperature sensor suitable for use in a wide range of applications including measurements in high temperature, high flow rate and abrasive environments such as that encountered in an internal combustion engine, gas turbine or rocket exhaust stream.

Abstract translation: 通过将复合陶瓷材料的涂层热熔融在高温光管或纤维的尖端上形成黑体高温探针。 陶瓷涂层代替常规的溅射金属薄膜以形成黑体光学腔。 复合陶瓷材料的成分包括形成大部分材料的难熔金属氧化物的混合物，各种颜料和/或难熔金属粉末以及粘合剂。 烧制工艺用于将涂层热熔融到光管上。 烧制方法的实施方案包括使用火焰或炉技术，或者使用各种火焰或等离子体喷涂技术。 10至几百微米的热熔涂层提供了耐用的黑体温度传感器，适用于广泛的应用，包括高温，高流量和研磨环境的测量，例如在内燃机，气体 涡轮机或火箭排气流。

公开(公告)号：US10072986B1

公开(公告)日：2018-09-11

申请号：US15655474

申请日：2017-07-20

Applicant: Applied Materials, Inc.

Inventor： Samuel C. Howells

IPC: G01J5/08

CPC classification number: G01J5/0828 ,  G01J3/18 ,  G01J5/0007 ,  G01J5/041 ,  H01L21/67115 ,  H01L21/67248

Abstract: Apparatus and methods of processing substrates include a detector manifold to detect radiation from proximate a processing area in a chamber body; a radiation detector optically coupled to the detector manifold; and a spectral multi-notch filter. Apparatus and methods of processing substrates include detecting transmitted radiation from an emitting surface of a substrate in a chamber body; conveying at least one spectral band of the detected radiation to a photodetector; and analyzing the detected radiation in the at least one spectral band to determine an inferred temperature of the substrate.