公开(公告)号：AU2001237064B2

公开(公告)日：2005-11-17

申请号：AU2001237064

申请日：2001-02-16

Applicant: FULLERENE INT CORPORATION

Inventor： LOUTFY RAOUF O ,  WITHERS JAMES C ,  DIMITRIJEVIC STEVAN

IPC: B82B1/00 ,  C01B31/02 ,  H01J1/304 ,  H01J9/02 ,  H01J29/04 ,  H01J31/12 ,  H01J001/304 ,  H01J009/02

Abstract: The present invention is directed to a nanotube coated with diamond or diamond-like carbon, a field emitter cathode comprising same, and a field emitter comprising the cathode. It is also directed to a method of preventing the evaporation of carbon from a field emitter comprising a cathode comprised of nanotubes by coating the nanotube with diamond or diamond-like carbon. In another aspect, the present invention is directed to a method of preventing the evaporation of carbon from an electron field emitter comprising a cathode comprised of nanotubes, which method comprises coating the nanotubes with diamond or diamond-like carbon.

公开(公告)号：AU2003207030B2

公开(公告)日：2005-07-14

申请号：AU2003207030

申请日：2003-07-03

Applicant: UNIV HOKKAIDO

Inventor： SUEOKA KAZUHISA ,  TSUNABUCHI TERUYUKI ,  MUKASA KOICHI

IPC: C01B31/02 ,  D01F9/127 ,  H01J1/304 ,  H01J9/02 ,  C01B031/02 ,  H01J009/02 ,  D01F009/133 ,  D01F009/127

Abstract: A fibrous solid carbon manifold assembly and a method for producing the fibrous solid carbon manifold assembly are provided. The fibrous solid carbon manifold assembly has fibrous bodies carbonized, and a limitless number of superfine graphite filaments grown on surfaces of the carbonized fibrous bodies, in the inside of each of said fibrous bodies and in a gap between adjacent ones of said fibrous bodies. With such a configuration, the number of superfine graphite filaments can be increased more greatly.

公开(公告)号：US20030211803A1

公开(公告)日：2003-11-13

申请号：US10430969

申请日：2003-05-06

Inventor： Ammar Derraa

IPC: H01J009/02

CPC classification number: H01J9/025

Abstract: A method for fabricating row lines and pixel openings of a field emission array that employs only two masks. A first mask is disposed over electrically conductive material and semiconductive material and includes apertures that are alignable between rows of pixels of the field emission array. Row lines of the field emission array are defined through the first mask. A passivation layer is then disposed over at least selected portions of the field emission array. A second mask, including apertures alignable over the pixel regions of the field emission array, is disposed over the passivation layer. The second mask is used in defining openings through the passivation layer and over the pixel regions of the field emission array. Conductive material exposed through the apertures of the second mask may also be removed to expose the underlying semiconductive grid and to further define the pixel openings.

公开(公告)号：US20030044519A1

公开(公告)日：2003-03-06

申请号：US10171773

申请日：2002-06-14

Applicant: Hyperion Catalysis International, Inc.

Inventor： Mikio Takai

IPC: B05D005/12 ,  H01J009/02

CPC classification number: B82Y10/00 ,  H01J1/304 ,  H01J9/025 ,  H01J31/127 ,  H01J2201/30469

Abstract: The present invention relates to a field emission device comprising an anode and a cathode, wherein said cathode includes carbon nanotubes which have been treated with an ion beam. The ion beam may be any ions, including gallium, hydrogen, helium, argon, carbon, oxygen, and xenon ions. The present invention also relates to a field emission cathode comprising carbon nanotubes, wherein the nanotubes have been treated with an ion beam. A method for treating the carbon nanotubes and for creating a field emission cathode is also disclosed. A field emission display device containing carbon nanotube which have been treated with an ion beam is further disclosed.

公开(公告)号：US20030034724A1

公开(公告)日：2003-02-20

申请号：US10204945

申请日：2002-08-27

Inventor： Daichi Imabayashi

IPC: H01J019/02 ,  H01J009/02

CPC classification number: H01J1/28 ,  H01J9/047 ,  Y10T29/49002

Abstract: An impregnated type cathode unit and a manufacturing method therefor wherein a porous metal base and a cup member can be firmly joined together without using any interposition and the occurrence of weld defects can be eliminated to improve the reliability and yield of welding between the porous metal base and the cup member. The impregnated type cathode unit is composed of a porous metal base (11) impregnated with an electron emissive material and a cup member (12) for holding the porous metal base (11) so as to cover the bottom surface and side surface of the porous metal base (11) and expose the front surface of the porous metal base (11). A nonporous dense portion (14) is formed on the bottom surface of the porous metal base (11). The bottom portion of the cup member (12) is pressed to be deformed so as to follow the shape of the dense portion (14), thereby forming a close contact region (16). The bottom portion of the cup member (12) and the dense portion (14) of the porous metal base (11) are welded together at the close contact region (16).

Abstract translation: 一种浸渍型阴极单元及其制造方法，其中多孔金属基底和杯形构件可以牢固地接合在一起而不需要任何插入，并且可以消除焊接缺陷的发生，从而提高多孔金属基底之间的焊接的可靠性和产量 和杯子。 浸渍型阴极单元由浸渍有电子发射材料的多孔金属基底（11）和用于保持多孔金属基底（11）的杯状构件（12）构成，以覆盖多孔金属基底的底表面和侧表面 金属基体（11）并露出多孔金属基底（11）的前表面。 在多孔金属基体（11）的底面形成无孔致密部（14）。 杯部件（12）的底部被按压以使其跟随致密部分（14）的形状变形，从而形成紧密接触区域（16）。 杯状构件（12）的底部和多孔金属基底（11）的致密部分（14）在紧密接触区域（16）处焊接在一起。

公开(公告)号：US20020045398A1

公开(公告)日：2002-04-18

申请号：US09952293

申请日：2001-09-10

Applicant: Matsushita Electric Industrial Co., Ltd.

Inventor： Masahide Yamauchi ,  Satoru Nakagawa ,  Yoshikazu Iwai

IPC: H01J009/02

CPC classification number: H01J1/20 ,  H01J9/042

Abstract: A cathode structure comprises a cylindrical metal sleeve having aperture portions at both ends, a base metal having an aperture portion on one end, which is fitted onto one of the aperture portions of the metal sleeve, and an electron-emitting layer, which is formed on a flat portion of an outside surface of the base metal. After an electron-emitting material is sprayed onto the base metal, its surface is mechanically flattened to form the electron-emitting layer. Thus, the planarity of the surface of the electron-emitting layer can be improved without deterioration of the electron emission characteristics and the moirnull can be decreased without reduction of the resolution.

公开(公告)号：US20020022430A1

公开(公告)日：2002-02-21

申请号：US09888594

申请日：2001-06-26

Inventor： Akihiro Kimura ,  Kazuhiro Ohki

IPC: H01J009/02

CPC classification number: H01J9/027

Abstract: This invention provides an electron source manufacturing apparatus and manufacturing method which facilitate downsizing and operation and are suitable for mass production. The electron source manufacturing apparatus includes a support which supports a substrate having conductors formed on it and has a means for adjusting the temperature of the substrate, a vessel which has a gas inlet port and gas exhaust port and covers a partial region on the surface of the substrate, an unit for introducing and exhausting gas into and from the vessel, and an unit for applying a voltage to the conductors. The support has a groove.

Abstract translation: 本发明提供一种便于小型化和操作的电子源制造装置及制造方法，适用于批量生产。 电子源制造装置包括：支撑体，其具有形成在其上的导体的基板，并且具有用于调节基板的温度的装置;具有气体入口和排气口的容器，并且覆盖表面上的部分区域 衬底，用于将气体引入和排出容器的单元以及用于向导体施加电压的单元。 支架有凹槽。

公开(公告)号：US20010044251A1

公开(公告)日：2001-11-22

申请号：US09860397

申请日：2001-05-17

Inventor： Young-Rae Cho ,  Jin-Ho Lee ,  Yoon-Ho Song ,  Seung-Youl Kang ,  Moon-Youn Jung ,  Kyoung-Ik Cho ,  Do-Hyung Kim ,  Chi-Sun Hwang

IPC: H01J009/02

CPC classification number: H01J9/025 ,  H01J2201/30403

Abstract: A cathode structure for a field emission device, which is an essential component of a field emission device, and a method of fabricating the same are provided. An emitter material for electron emission constituting cathodes is formed in a particulate emitter, the particulate emitter is formed of a material from which electrons can be easily emitted at a low electric field. A significant advantage of the present invention over a conventional art is that the present invention patterns an emitter material to a cathode electrode using a photolithography process or a lift-off process. In the lift-off process, the emitting compound is patterned using a sacrifice layer. Also, in another embodiment of the present invention, there is disclosed a method of easily fabricating cathodes for a triode-type field emission device using a particulate emitter material at a low process temperature. Therefore, the present invention provides a method of fabricating a cathode for a triode-type field emission device using particulate emitter that is synthesized at a high temperature of 600null C. over, as the emitter material.

Abstract translation: 提供了场致发射器件的阴极结构及其制造方法。 用于形成阴极的电子发射用发射体材料形成在颗粒状发射体中，微粒发射体由电子能够以低电场容易地发射的材料形成。 本发明相对于传统技术的显着优点是本发明使用光刻工艺或剥离工艺将发射极材料图案化成阴极电极。 在剥离过程中，使用牺牲层对发光化合物进行图案化。 此外，在本发明的另一个实施例中，公开了一种在低工艺温度下使用颗粒发射体材料容易地制造用于三极管型场致发射器件的阴极的方法。 因此，本发明提供一种使用在600℃的高温下合成的粒子发射体作为发射极材料的三极管型场发射器件的阴极的制造方法。

公开(公告)号：US20010001679A1

公开(公告)日：2001-05-24

申请号：US09754558

申请日：2001-01-04

Applicant: SI Diamond Technology, Inc.

Inventor： Zhidan Li Tolt ,  Zvi Yaniv ,  Richard Lee Fink

IPC: H01J009/02

CPC classification number: B82Y10/00 ,  H01J1/304 ,  H01J9/025

Abstract: A film (carbon and/or diamond) for a field emitter device, which may be utilized within a computer display, is produced by a process utilizing treatment of a substrate and then depositing the film. The treatment step creates nucleation and growth sites on the substrate for the film deposition process and promotes election emission of the deposited film. With this process, a patterned emission can be achieved without post-deposition processing of the film. A field emitter device can be manufactured with such a film.

Abstract translation: 可以在计算机显示器内使用的用于场致发射器件的膜（碳和/或金刚石）通过利用处理衬底然后沉积膜的方法产生。 处理步骤在用于膜沉积工艺的衬底上产生成核和生长位点并促进沉积膜的选择发射。 通过该工艺，可以实现图案化的发射，而不需要对膜进行后期沉积处理。 可以制造具有这种膜的场发射器装置。

公开(公告)号：US20010001225A1

公开(公告)日：2001-05-17

申请号：US09753930

申请日：2001-01-03

Applicant: Yamaha Corporation

Inventor： Atsuo Hattori

IPC: H01J009/02

CPC classification number: H01J9/025

Abstract: A method of manufacturing a field emission element including the steps of: forming a conductive film on an antireflection film; forming a resist pattern on the antireflection film through photolithography; forming holes through the antireflection film and conductive film by using the resist pattern as a mask; removing the resist pattern, depositing a first sacrificial film over a substrate and etching back the first sacrificial film to leave a side spacer on an inner wall of the hole of the conductive film; depositing a second sacrificial film over the substrate and forming a conductive emitter electrode on the second sacrificial film; and partially removing the second sacrificial film to expose a tip portion of the emitter electrode. This method can form a gate hole at a high precision in size.

Abstract translation: 一种制造场发射元件的方法，包括以下步骤：在抗反射膜上形成导电膜; 通过光刻在抗反射膜上形成抗蚀剂图案; 通过使用抗蚀剂图案作为掩模，通过防反射膜和导电膜形成孔; 去除抗蚀剂图案，在衬底上沉积第一牺牲膜并蚀刻第一牺牲膜以在导电膜的孔的内壁上留下侧隔离物; 在所述衬底上沉积第二牺牲膜并在所​​述第二牺牲膜上形成导电发射极; 并且部分地去除第二牺牲膜以暴露发射电极的尖端部分。 该方法可以以高精度形成门孔。