Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology
    95.
    发明授权
    Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology 失效
    基于使用多孔密封空腔技术或微通道技术的低功率硅热传感器和微流体装置

    公开(公告)号:US07233000B2

    公开(公告)日:2007-06-19

    申请号:US10502465

    申请日:2003-01-16

    Abstract: This invention provides a miniaturized silicon thermal flow sensor with improved characteristics, based on the use of two series of integrated thermocouples (6, 7) on each side of a heater (4), all integrated on a porous silicon membrane (2) on top of a cavity (3). Porous silicon (2) with the cavity (3) underneath provides very good thermal isolation for the sensor elements, so as the power needed to maintain the heater (4) at a given temperature is very low. The formation process of the porous silicon membrane (2) with the cavity (3) underneath is a two-step single electrochemical process. It is based on the fact that when the anodic current is relatively low, we are in a regime of porous silicon formation, while if this current exceeds a certain value we turn into a regime of electropolishing. The process starts at low current to form porous silicon (2) and it is then turned into electropolishing conditions to form the cavity (3) underneath. Various types of thermal sensor devices, such as flow sensors, gas sensors, IR detectors, humidity sensors and thermoelectric power generators are described using the proposed methodology. Furthermore the present invention provides a method for the formation of microfluidic channels (16) using the same technique of porous silicon (17) and cavity (16) formation.

    Abstract translation: 本发明提供了一种基于在加热器(4)的每一侧上使用两个集成的热电偶(6,7)的系列,具有改进的特性的小型化硅热流量传感器,它们全部集成在顶部的多孔硅膜(2)上 的腔(3)。 具有下面的空腔(3)的多孔硅(2)为传感器元件提供了非常好的热隔离,因此将加热器(4)保持在给定温度所需的功率非常低。 多孔硅膜(2)与下面的腔(3)的形成过程是两步单电化学过程。 这是基于以下事实:当阳极电流相对较低时,我们处于多孔硅形成的状态,而如果该电流超过一定值,则我们变成电解抛光的方式。 该工艺以低电流开始形成多孔硅(2),然后转化为电解抛光条件以形成下面的空腔(3)。 使用所提出的方法描述了各种类型的热传感器装置,例如流量传感器,气体传感器,红外探测器,湿度传感器和热电发电机。 此外,本发明提供了使用与多孔硅(17)和空腔(16)相同的技术形成微流体通道(16)的方法。

    Method of fabricating multi layer MEMS and microfluidic devices
    97.
    发明申请
    Method of fabricating multi layer MEMS and microfluidic devices 审中-公开
    制造多层MEMS和微流体装置的方法

    公开(公告)号:US20070105339A1

    公开(公告)日:2007-05-10

    申请号:US11406848

    申请日:2006-04-19

    Applicant: Sadeg Faris

    Inventor: Sadeg Faris

    Abstract: A method for fabricating multi layer microelectromechanical and microfluidic devices is disclosed. Multi layer microelectromechanical and microfluidic devices are fabricated on a substrate with layers of predetermined weak and strong bond regions where deconstucted layers of devices at or on the weak bond regions. The layers are then peeled and subsequently bonded to produce a multi layer microelectromechanical and microfluidic devices. An arbitrary number of layers can be bonded and stacked to create either microelectromechanical or microfluidic device or a hyrbid type of device. Also disclosed are methods of creating edge interconnects and vias through the substrate to form interconnections between layers and devices thereon.

    Abstract translation: 公开了一种用于制造多层微机电和微流体装置的方法。 多层微机电和微流体装置制造在具有预定的弱和强结合区域的层的衬底上,其中在弱结合区域处或弱结合区上的器件的解构层。 然后将这些层剥离并随后键合以产生多层微机电和微流体装置。 任意数量的层可以被结合和层叠以产生微机电或微流体装置或者高密度类型的装置。 还公开了通过衬底产生边缘互连和通孔以在其上的层和器件之间形成互连的方法。

    Micro-machined nozzles
    100.
    发明授权
    Micro-machined nozzles 失效
    微加工喷嘴

    公开(公告)号:US07158159B2

    公开(公告)日:2007-01-02

    申请号:US11003067

    申请日:2004-12-02

    Abstract: A micro-machined nozzle includes a substrate having a hole formed on a first side that extends partially through a thickness dimension of the substrate and a nozzle orifice formed on a second opposite side that communicates with the hole. The nozzle orifice has at least a portion of its interior wall serrated. A method of fabricating a micro-machined nozzle includes the steps of etching a first side of a silicon substrate to form a hole that extends partially through a thickness dimension of the substrate and etching a second opposite side of the silicon substrate to form a serrated nozzle orifice that communicates with the hole.

    Abstract translation: 微加工喷嘴包括:基板,其具有形成在第一侧上的部分地延伸穿过基板的厚度尺寸的孔;以及形成在与孔连通的第二相对侧上的喷嘴孔。 喷嘴孔具有其内壁的至少一部分锯齿状。 一种制造微加工喷嘴的方法包括以下步骤:蚀刻硅衬底的第一面以形成部分延伸穿过衬底的厚度尺寸并蚀刻硅衬底的第二相对侧以形成锯齿形喷嘴的孔 孔与孔连通。

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