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    Synthetic qurtz glass and method of production
    91.
    发明申请
    Synthetic qurtz glass and method of production 有权
    合成qurtz玻璃和生产方法

    公开(公告)号：US20020038557A1

    公开(公告)日：2002-04-04

    申请号：US09930693

    申请日：2001-08-17

    Applicant: Shin-Etsu Chemical Co., Ltd.

    Inventor： Koji Matsuo ,  Hisatoshi Otsuka ,  Kazuo Shirota ,  Shigeru Maida

    IPC: C03B019/14

    CPC classification number: C03B19/1453 ,  C03B19/1423 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/30 ,  C03B2207/64 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/42 ,  C03C2203/54 ,  Y02P40/57

    Abstract: Fluorine-containing synthetic quartz glass is produced by feeding silica-forming material, hydrogen, and oxygen gases from a burner to a reaction zone, flame hydrolyzing the silica-forming material in the reaction zone to form particles of silica, depositing the silica particles on a rotatable substrate in the reaction zone to form a porous silica matrix, and heating and vitrifying the porous silica matrix in a fluorine compound gas-containing atmosphere. During formation of the porous silica matrix, the angle between the center axes of the silica matrix and the silica-forming reactant flame from the burner is adjusted to 90-120null so that the porous silica matrix has a density of 0.1-1.0 g/cm3 with a narrow distribution within 0.1 g/cm3. The resulting quartz glass has a high transmittance to light in the vacuum ultraviolet region below 200 nm.

    Abstract translation: 含氟合成石英玻璃是通过将二氧化硅形成材料，氢气和氧气从燃烧器送入反应区而产生的，火焰水解反应区中二氧化硅形成材料，形成二氧化硅颗粒，将二氧化硅颗粒沉积在 反应区中的可旋转基底，形成多孔二氧化硅基质，并在含氟化合物气体的气氛中加热和玻璃化多孔二氧化硅基质。 在形成多孔二氧化硅基体期间，将二氧化硅基体的中心轴线与来自燃烧器的形成二氧化硅的反应物火焰之间的角度调节至90-120°，使得多孔二氧化硅基质的密度为0.1-1.0g / cm3，分布在0.1g / cm3以内。 所得的石英玻璃对于低于200nm的真空紫外线区域的光具有高透射率。

    Methods of making preform and optical fiber
    93.
    发明申请
    Methods of making preform and optical fiber 审中-公开
    制造预制棒和光纤的方法

    公开(公告)号：US20020000104A1

    公开(公告)日：2002-01-03

    申请号：US09843838

    申请日：2001-04-30

    Applicant: Sumitomo Electric Industries, Ltd.

    Inventor： Hideyuki Ijiri ,  Kouichi Uchiyama ,  Toshio Danzuka ,  Tomonori Kashiwada

    IPC: C03B037/10

    CPC classification number: C03B37/01228 ,  C03B37/01211 ,  C03B37/0124 ,  C03B37/01248 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2203/22 ,  C03C25/68 ,  G02B6/02261 ,  G02B6/02285 ,  G02B6/03644

    Abstract: The present invention relates to a method of making a preform which can restrain each member from deforming at the time of making, and a method of making an optical fiber with a smaller polarization mode dispersion by utilizing this preform. In the method of making a preform, the collapsing step carried out when making the preform is divided into at least two stages composed of a first step of forming a first collapsed body by collapsing a core rod member and a first cladding tube member, and a second step of forming a new collapsed body by collapsing the first collapsed body and a second cladding tube member. Also, in at least the first step, the collapsed body obtained is elongated, whereas such a plurality of stages of collapsing step and elongation of the resulting collapsed body reduce the outer diameter ratio of the outer member to the inner member to be collapsed, whereby the deformation resulting from the heating at the time of a single collapsing operation and the like is hard to occur. In an optical fiber obtained from thus manufactured preform, the core and cladding are effectively restrained from becoming noncircular, whereby the polarization mode dispersion characteristic, which becomes important in communications based on a WDM system, is improved in particular.

    Abstract translation: 本发明涉及制造能够抑制每个构件在制造时变形的预成型件的方法，以及通过利用该预制件制造具有较小偏振模色散的光纤的方法。 在制造预成型体的方法中，将制造预成型体时的折叠工序分为至少两个阶段，所述至少两个阶段是通过使芯棒部件和第一包层管部件收缩而形成第一折叠体的第一工序， 通过使第一折叠体和第二包层管构件折叠来形成新的收缩体的第二步骤。 此外，在至少第一步骤中，所获得的塌陷体是细长的，而所得到的塌缩体的这种多个塌陷阶段和伸长阶段减小了外部构件与内部构件的外径比，以使其塌缩，由此 在单次的折叠作业等时由加热引起的变形难以发生。 在由这样制造的预成型体获得的光纤中，芯和包层被有效地抑制成非圆形，从而特别地改善了在基于WDM系统的通信中变得重要的偏振模色散特性。

    Fluorine-containing synthetic quartz glass and method of production
    94.
    发明申请
    Fluorine-containing synthetic quartz glass and method of production 有权
    含氟合成石英玻璃及其生产方法

    公开(公告)号：US20010017042A1

    公开(公告)日：2001-08-30

    申请号：US09789744

    申请日：2001-02-22

    Inventor： Shigeru Maida ,  Motoyuki Yamada ,  Hisatoshi Otsuka ,  Kazuo Shirota ,  Koji Matsuo

    IPC: C03B020/00

    CPC classification number: C03B19/1453 ,  C03B19/1415 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/32 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2203/40 ,  C03C2203/46 ,  C03C2203/54 ,  Y02P40/57

    Abstract: Synthetic quartz glass is produced by feeding a silica-forming raw material gas, hydrogen gas, oxygen gas and a fluorine compound gas from a burner to a reaction zone, flame hydrolyzing the silica-forming raw material gas in the reaction zone to form fine particles of fluorine-containing silica, depositing the silica fine particles on a rotatable substrate in the reaction zone so as to create a fluorine-containing porous silica matrix, and heat vitrifying the porous silica matrix in a fluorine compound gas-containing atmosphere. This process enables the low-cost manufacture of a synthetic quartz glass having a higher and more uniform transmittance to light in the vacuum ultraviolet region than has hitherto been achieved.

    Abstract translation: 合成石英玻璃是通过将来自燃烧器的二氧化硅形成原料气体，氢气，氧气和氟化合物气体从反应区域供给到反应区域而进行的，在反应区域中对二氧化硅形成原料气体进行火焰水解而形成微粒子 的含氟二氧化硅，将二氧化硅微粒沉积在反应区中的可旋转基板上，以产生含氟多孔二氧化硅基质，并在含氟化合物气体的气氛中对多孔二氧化硅基质进行玻璃化。 该方法使得能够低成本地制造与迄今为止已经实现的在真空紫外区域中对于光的透射率更高且更均匀的合成石英玻璃。

    Optical member of synthetic quartz glass for excimer lasers and method for producing same
    97.
    发明授权
    Optical member of synthetic quartz glass for excimer lasers and method for producing same 失效
    用于准分子激光的合成石英玻璃的光学元件及其制造方法

    公开(公告)号：US5364433A

    公开(公告)日：1994-11-15

    申请号：US977397

    申请日：1993-05-15

    Applicant: Hiroyuki Nishimura ,  Akira Fujinoki ,  Toshikatsu Matsuya ,  Kyoichi Inaki ,  Toshiyuki Kato ,  Atsushi Shimada

    Inventor： Hiroyuki Nishimura ,  Akira Fujinoki ,  Toshikatsu Matsuya ,  Kyoichi Inaki ,  Toshiyuki Kato ,  Atsushi Shimada

    IPC: C03B8/04 ,  C03B19/14 ,  C03B37/014 ,  C03C3/06 ,  G03F7/20

    CPC classification number: C03B37/014 ,  C03B19/1415 ,  C03B19/1453 ,  C03C3/06 ,  G03F7/70958 ,  C03B2201/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2203/22 ,  C03B2207/32 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  Y02P40/57 ,  Y10S501/90 ,  Y10S65/08

    Abstract: A synthetic quartz glass optical member for an ultraviolet laser, suitably applicable as a stepper lens of a lithographer using an excimer laser beam and other optical members, wherein the quartz glass has a hydroxyl content of 10 to 100 ppm, a chlorine content of 200 ppm or less, a hydrogen content of 1.times.10.sup.16 molecules/cm.sup.3 or less, a homogeneity of refractive index of 5.times.10.sup.-6 or less in terms of .DELTA.n, and a birefringence of 5 nm/cm or less. The optical member can be produced by subjecting a volatile silicon compound to flame hydrolysis with oxyhydrogen flame, depositing the formed particulate silica on a heat-resistant support to prepare a porous silica matrix, heating the matrix in a vacuum as high as 1.times.10.sup.-2 Torr or above to a temperature of 1,400 .degree. C. or above to effect dehydration and degassing, homogenizing the resultant transparent quartz glass into highly homogeneous quartz glass free from striae in at last one direction, molding the highly homogeneous quartz glass, and annealing the molded glass.

    Abstract translation: PCT No.PCT / JP92 / 00821 Sec。 371日期1993年3月15日 102（e）1993年3月15日PCT提交1992年6月29日PCT公布。 公开号WO93 / 00307 日期：1993年1月7日。一种用于紫外线激光的合成石英玻璃光学元件，适用于使用准分子激光束和其它光学部件的平版印刷机的步进透镜，其中石英玻璃的羟基含量为10〜100ppm ，氯含量为200ppm以下，氢含量为1×1016分/ cm 3以下，折射率均匀性为DELTA n为5×10 -6以下，双折射为5nm / cm以下。 光学构件可以通过使挥发性硅化合物用氢氧焰火焰水解，将形成的颗粒二氧化硅沉积在耐热载体上以制备多孔二氧化硅基质来制造，在高达1×10 -2乇的真空中加热基质 以上至1400℃以上的温度进行脱水脱气，将得到的透明石英玻璃均匀化成最后一个方向不含条纹的高度均匀的石英玻璃，成型高度均匀的石英玻璃，退火成型玻璃 。

    Process for thermal treatment of glass fiber preform
    99.
    发明授权
    Process for thermal treatment of glass fiber preform 失效
    玻璃纤维预制件热处理工艺

    公开(公告)号：US5306322A

    公开(公告)日：1994-04-26

    申请号：US924767

    申请日：1992-07-24

    Applicant: Shinji Ishikawa ,  Yuichi Ohga ,  Ichiro Tsuchiya ,  Hiroo Kanamori ,  Hiroshi Yokota ,  Michihisa Kyoto

    Inventor： Shinji Ishikawa ,  Yuichi Ohga ,  Ichiro Tsuchiya ,  Hiroo Kanamori ,  Hiroshi Yokota ,  Michihisa Kyoto

    IPC: G02B6/00 ,  C03B37/014 ,  C03B37/023

    CPC classification number: C03B37/01446 ,  C03B37/0146 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  Y10S65/16 ,  Y10S65/90

    Abstract: The present invention providesa process for the dehydrating and purifying treatment by heating a porous glass preform for an optical fiber comprising passing the porous glass preform through a muffle tube having a SiC layer at least on its inner surface at a high temperature under an atmosphere comprising an inert gas and a silicon halogenide gas;a process for the fluorine-doping treatment by heating a porous glass preform for an optical fiber comprising passing a porous glass preform through a muffle tube having a SiC layer at least on its inner surface at a high temperature under an atmosphere comprising a fluorine compound gas and an inert gas; anda process for the vitrifying treatment by heating a porous glass preform for an optical fiber comprising passing the preform, which has been previously dehydrated and purified, through a muffle tube having a SiC layer at least on its inner surface at a high temperature under an atmosphere gas.

    Abstract translation: 本发明提供了一种通过加热用于光纤的多孔玻璃预制件进行脱水和净化处理的方法，包括使多孔玻璃预制件通过具有SiC层的马弗管至少在其内表面上在高温下在包括 惰性气体和卤化硅气体; 通过加热用于光纤的多孔玻璃预制件进行氟掺杂处理的方法，包括使多孔玻璃预制件通过具有SiC层的马弗管至少在其内表面上在高温下在包含氟化合物气体 和惰性气体; 以及通过加热用于光纤的多孔玻璃预制件进行玻璃化处理的方法，包括使预先脱水和净化的预成型体至少在其内表面上通过具有SiC层的马弗管在高温下 气氛气体。

    Method for producing glass preform for optical fiber
    100.
    发明授权
    Method for producing glass preform for optical fiber 失效
    光纤玻璃预制棒的制造方法

    公开(公告)号：US5145507A

    公开(公告)日：1992-09-08

    申请号：US640556

    申请日：1991-01-14

    Applicant: Michihisa Kyoto ,  Yoichi Ishiguro ,  Akira Urano ,  Hideo Kakuzen

    Inventor： Michihisa Kyoto ,  Yoichi Ishiguro ,  Akira Urano ,  Hideo Kakuzen

    IPC: C03B37/014

    CPC classification number: C03B37/01446 ,  C03B37/0146 ,  C03B2201/075 ,  C03B2201/12 ,  Y10S65/16 ,  Y10S65/90

    Abstract: A glass preform is produced by forming a glass soot composite body having a core portion consisting of a solid glass and a peripheral portion consisting of a porous glass mass, removing trapped gas and water from pores of the soot composite body by heating the soot composite body under a pressure lower than several ten Torr. at a temperature at which the porous glass mass is not vitrified, filling the pores in the porous glass mass of the soot composite body with a gas containing SiF.sub.4, the partial pressure of which is a function of the desired specific difference of refractive index, thus uniformly adding fluorine to the soot glass mass, and vitrifying the fluorine-added soot glass mass into a transparent glass mass to form a glass preform.

    Abstract translation: 通过形成具有由固体玻璃构成的核心部分和由多孔玻璃组成的周边部分的玻璃烟炱复合体制造玻璃预制件，通过加热烟炱复合体，从烟炱复合体的孔中除去捕获的气体和水 在低于几十乇的压力下。 在多孔玻璃体未被玻璃化的温度下，用含有SiF 4的气体填充烟灰复合体的多孔玻璃体中的孔，其分压是期望的折射率差异的函数，因此 向烟灰玻璃块均匀地加入氟，并将氟化烟炱玻璃块玻璃化成透明玻璃块以形成玻璃预制件。

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