公开(公告)号：US20160168010A1

公开(公告)日：2016-06-16

申请号：US14958024

申请日：2015-12-03

Applicant: Corning Incorporated

Inventor： Sezhian Annamalai ,  Carlos Alberto Duran ,  Kenneth Edward Hrdina

IPC: C03C3/06 ,  C03B25/02 ,  C03B19/14 ,  C03C3/112 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/14 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/112 ,  C03C4/00 ,  C03C2201/12 ,  C03C2201/14 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2203/52

Abstract: A doped silica-titania glass article is provided that includes a glass article having a glass composition comprising (i) a silica-titania base glass, (ii) a fluorine dopant, and (iii) a second dopant. The fluorine dopant has a concentration of fluorine of up to 5 wt. % and the second dopant comprises one or more oxides selected from the group consisting of Al, Nb, Ta, B, Na, K, Mg, Ca and Li oxides at a total oxide concentration from 50 ppm to 6 wt. %. Further, the glass article has an expansivity slope of less than 0.5 ppb/K2 at 20° C. The second dopant can be optional. The composition of the glass article may also contain an OH concentration of less than 100 ppm.

Abstract translation: 提供掺杂二氧化硅 - 二氧化钛玻璃制品，其包括具有玻璃组合物的玻璃制品，所述玻璃组合物包含（i）二氧化硅 - 二氧化钛基底玻璃，（ii）氟掺杂剂和（iii）第二掺杂剂。 氟掺杂剂的氟浓度高达5wt。 ％，第二掺杂剂包含一种或多种选自Al，Nb，Ta，B，Na，K，Mg，Ca和Li氧化物的氧化物，其总氧化物浓度为50ppm至6wt。 ％。 此外，玻璃制品在20℃下具有小于0.5ppb / K 2的膨胀斜率。第二掺杂剂可以是任选的。 玻璃制品的组成也可以含有小于100ppm的OH浓度。

公开(公告)号：US20150331180A1

公开(公告)日：2015-11-19

申请号：US14133526

申请日：2013-12-18

Applicant: Shin-Etsu Chemical Co., Ltd.

Inventor： Hiroshi OYAMADA

IPC: G02B6/028 ,  G02B6/02 ,  G02B6/036

CPC classification number: G02B6/0283 ,  C03B37/01413 ,  C03B37/01453 ,  C03B2201/02 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2203/23 ,  C03B2203/26 ,  G02B6/02019 ,  G02B6/02214 ,  G02B6/0365 ,  G02B6/03694

Abstract: An optical fiber silica glass base material comprising a core formed of silica glass doped with a positive dopant that increases a refractive index; an intermediate layer adjacent to the core and surrounding the core on a radial outside thereof; a trench layer adjacent to the intermediate layer, surrounding the intermediate layer on a radial outside thereof, and formed of silica glass doped with a negative dopant that decreases a refractive index; and a cladding layer adjacent to the trench layer, surrounding the trench layer on a radial outside thereof, and formed of silica glass. Thickness of the intermediate layer in a radial direction is greater than thickness of the trench layer, and a region of the intermediate layer nearer the core is more heavily doped with the positive dopant and/or a region of the intermediate layer nearer the trench layer is more heavily doped with the negative dopant.

Abstract translation: 一种光纤石英玻璃基材，包括由掺杂有增加折射率的正掺杂剂的石英玻璃形成的芯; 邻近所述芯并在其径向外侧围绕所述芯的中间层; 与中间层相邻的沟槽层，在中间层的径向外侧包围中间层，并由掺杂有降低折射率的负掺杂剂的石英玻璃形成; 以及与沟槽层相邻的包层，在其径向外侧包围沟槽层，并由石英玻璃形成。 中间层在径向上的厚度大于沟槽层的厚度，并且更靠近芯的中间层的区域被更多地掺杂有正掺杂剂和/或更接近沟槽层的中间层的区域 更重掺杂负极掺杂剂。

公开(公告)号：US08987155B2

公开(公告)日：2015-03-24

申请号：US13973428

申请日：2013-08-22

Applicant: Corning Incorporated

Inventor： Sezhian Annamalai ,  Steven Bruce Dawes ,  Kenneth Edward Hrdina

IPC: C03C3/06 ,  C03C3/097 ,  C03C3/076 ,  C03C3/095 ,  C03C4/00 ,  C03B19/12

CPC classification number: C03C3/097 ,  C03B19/12 ,  C03B2201/075 ,  C03B2201/23 ,  C03B2201/40 ,  C03B2201/42 ,  C03C3/06 ,  C03C3/076 ,  C03C3/095 ,  C03C4/0085 ,  C03C2201/23 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/34 ,  C03C2203/42 ,  C03C2203/50

Abstract: This disclosure is directed to a silica-titania-niobia glass and to a method for making the glass. The composition of the silica-titania-niobia (SiO2—TiO2—Nb2O5) glass, determined as the oxides, is Nb2O5 in an amount in the range of 0.005 wt. % to 1.2 wt. %, TiO2 in an amount in the range of 5 wt. % to 10 wt. %, and the remainder of glass is SiO2. In the method, the STN glass precursor is consolidated into a glass by heating to a temperature of 1600° C. to 1700° C. in flowing helium for 6 hours to 10 hours. When this temperature is reached, the helium flow can be replaced by argon for the remainder of the time. Subsequently the glass is cooled to approximately 1050° C., and then from 1050° C. to 700° C. followed by turning off the furnace and cooling the glass to room temperature at the natural cooling rate of the furnace.

Abstract translation: 本公开涉及二氧化硅 - 二氧化钛 - 铌玻璃和制造该玻璃的方法。 作为氧化物测定的二氧化硅 - 二氧化钛 - 氧化铌（SiO2-TiO2-Nb2O5）玻璃的组成为Nb2O5，其量为0.005重量％ ％〜1.2重量％ ％，TiO 2的量为5wt。 ％〜10重量％ ％，玻璃的其余部分为SiO2。 在该方法中，通过在流动氦中加热至1600℃至1700℃的温度6小时至10小时，将STN玻璃前体固结成玻璃。 当达到这个温度时，氦气流可以在一段时间内用氩气代替。 随后将玻璃冷却至约1050℃，然后冷却至1050℃至700℃，随后关闭炉，并以炉的自然冷却速率将玻璃冷却至室温。

公开(公告)号：US08877662B2

公开(公告)日：2014-11-04

申请号：US13540204

申请日：2012-07-02

Applicant: Nathan J. Cassingham ,  Ben Matthew Gauthier ,  Martin Panchula ,  Robert Stephen Pavlik ,  Yan Zhou ,  Konstantin S. Zuyev

Inventor： Nathan J. Cassingham ,  Ben Matthew Gauthier ,  Martin Panchula ,  Robert Stephen Pavlik ,  Yan Zhou ,  Konstantin S. Zuyev

IPC: C03C3/06 ,  C03C3/087 ,  C03C1/02 ,  C03B1/00

CPC classification number: C03C1/02 ,  C03B1/00 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/23 ,  C03B2201/24 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/08 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/34 ,  C03C2201/40 ,  C03C2201/50

Abstract: The invention relates to a silica glass compound having improved physical and chemical properties. In one embodiment, the present invention relates to a silica glass having a desirable brittleness in combination with a desirable density while still yielding a glass composition having a desired hardness and desired strength relative to other glasses. In another embodiment, the present invention relates to a silica glass composition that contains at least about 85 mole percent silicon dioxide and up to about 15 mole percent of one or more dopants selected from F, B, N, Al, Ge, one or more alkali metals (e.g., Li, Na, K, etc.), one or more alkaline earth metals (e.g., Mg, Ca, Sr, Ba, etc.), one or more transition metals (e.g., Ti, Zn, Y, Zr, Hf, etc.), one or more lanthanides (e.g., Ce, etc.), or combinations of any two or more thereof.

Abstract translation: 本发明涉及具有改善的物理和化学性质的二氧化硅玻璃化合物。 在一个实施方案中，本发明涉及具有期望的脆性以及所需密度的二氧化硅玻璃，同时仍然产生相对于其它玻璃具有所需硬度和所需强度的玻璃组合物。 在另一个实施方案中，本发明涉及二氧化硅玻璃组合物，其含有至少约85摩尔％的二氧化硅和至多约15摩尔％的选自F，B，N，Al，Ge的一种或多种掺杂剂，一种或多种 碱金属（如Li，Na，K等），一种或多种碱土金属（如Mg，Ca，Sr，Ba等），一种或多种过渡金属（如Ti，Zn，Y， Zr，Hf等），一种或多种镧系元素（例如Ce等），或其任何两种或多种的组合。

公开(公告)号：US08820122B2

公开(公告)日：2014-09-02

申请号：US13223808

申请日：2011-09-01

Applicant: Shigeru Maida ,  Hisatoshi Otsuka ,  Osamu Sekizawa ,  Naoki Yanagisawa

Inventor： Shigeru Maida ,  Hisatoshi Otsuka ,  Osamu Sekizawa ,  Naoki Yanagisawa

IPC: C03B37/018

CPC classification number: C03C3/06 ,  C03B19/1423 ,  C03B19/1453 ,  C03B2201/23 ,  C03B2201/42 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/20 ,  C03B2207/62 ,  C03B2207/64 ,  C03C4/0085 ,  C03C2201/21 ,  C03C2201/42

Abstract: A titania-doped quartz glass suited as an EUV lithographic member is prepared by feeding a silicon-providing reactant gas and a titanium-providing reactant gas through a burner along with hydrogen and oxygen, subjecting the reactant gases to oxidation or flame hydrolysis to form synthetic silica-titania fine particles, depositing the particles on a rotating target, and concurrently melting and vitrifying the deposited particles to grow an ingot of titania-doped quartz glass. The target is retracted such that the growth front of the ingot may be spaced a distance of at least 250 mm from the burner tip.

Abstract translation: 通过将供氧反应气体和提供钛的反应气体与氢气和氧气一起通过燃烧器进行供给，使反应物气体进行氧化或火焰水解以形成合成物，制备适合作为EUV光刻元件的二氧化钛掺杂石英玻璃 二氧化硅 - 二氧化钛细颗粒，将颗粒沉积在旋转靶上，并同时熔化和玻璃化沉积的颗粒以生长掺杂二氧化钛的石英玻璃的锭。 目标被缩回，使得锭的生长前部可以与燃烧器尖端间隔至少250mm的距离。

公开(公告)号：US20140066286A1

公开(公告)日：2014-03-06

申请号：US13973428

申请日：2013-08-22

Applicant: CORNING INCORPORATED

Inventor： Sezhian Annamalai ,  Steven Bruce Dawes ,  Kenneth Edward Hrdina

IPC: C03C3/097 ,  C03B19/12 ,  C03C3/06

CPC classification number: C03C3/097 ,  C03B19/12 ,  C03B2201/075 ,  C03B2201/23 ,  C03B2201/40 ,  C03B2201/42 ,  C03C3/06 ,  C03C3/076 ,  C03C3/095 ,  C03C4/0085 ,  C03C2201/23 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/34 ,  C03C2203/42 ,  C03C2203/50

Abstract: This disclosure is directed to a silica-titania-niobia glass and to a method for making the glass. The composition of the silica-titania-niobia (SiO2—TiO2—Nb2O5) glass, determined as the oxides, is Nb2O5 in an amount in the range of 0.005 wt. % to 1.2 wt. %, TiO2 in an amount in the range of 5 wt. % to 10 wt. %, and the remainder of glass is SiO2. In the method, the STN glass precursor is consolidated into a glass by heating to a temperature of 1600° C. to 1700° C. in flowing helium for 6 hours to 10 hours. When this temperature is reached, the helium flow can be replaced by argon for the remainder of the time. Subsequently the glass is cooled to approximately 1050° C., and then from 1050° C. to 700° C. followed by turning off the furnace and cooling the glass to room temperature at the natural cooling rate of the furnace.

Abstract translation: 本公开涉及二氧化硅 - 二氧化钛 - 铌玻璃和制造该玻璃的方法。 作为氧化物测定的二氧化硅 - 二氧化钛 - 氧化铌（SiO2-TiO2-Nb2O5）玻璃的组成为Nb2O5，其量为0.005重量％ ％〜1.2重量％ ％，TiO 2的量为5wt。 ％〜10重量％ ％，玻璃的其余部分为SiO2。 在该方法中，通过在流动氦中加热至1600℃至1700℃的温度6小时至10小时，将STN玻璃前体固结成玻璃。 当达到这个温度时，氦气流可以在一段时间内用氩气代替。 随后将玻璃冷却至约1050℃，然后冷却至1050℃至700℃，随后关闭炉，并以炉的自然冷却速率将玻璃冷却至室温。

公开(公告)号：US08544299B2

公开(公告)日：2013-10-01

申请号：US12448998

申请日：2008-01-15

Applicant: Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

Inventor： Gerhard Schoetz ,  Karsten Braeuer ,  Jan Vydra

IPC: C03B37/018

CPC classification number: C03B37/01426 ,  C03B37/01211 ,  C03B37/01466 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2203/42 ,  C03C3/06

Abstract: To improve a known method for making a quartz glass tube as a semifinished product for the manufacture of optical fibers, the tube comprising an inner fluorine-doped quartz glass layer and an outer quartz glass layer, so as to achieve inexpensive manufacture and improved dimensional stability of the quartz glass tube, it is suggested according to the invention that the quartz glass of the inner layer should be produced in a first plasma deposition process with formation of an inner layer having a wall thickness of at least 1.5 mm, with a fluorine content of at least 1.5% by wt. being set in the quartz glass, and that the quartz glass of the outer layer should be produced in a second plasma deposition process and deposited directly or indirectly on the inner layer with formation of a composite tube, and that the composite tube should be elongated into the quartz glass tube.

Abstract translation: 为了改进用于制造石英玻璃管作为制造光纤的半成品的已知方法，该管包括内部掺氟石英玻璃层和外部石英玻璃层，以便实现便宜的制造和改善的尺寸稳定性 的石英玻璃管，根据本发明提出，内层的石英玻璃应该在第一等离子体沉积工艺中生产，形成壁厚至少为1.5mm的内层，氟含量 至少1.5重量％。 设置在石英玻璃中，并且外层的石英玻璃应该在第二等离子体沉积工艺中生产并直接或间接沉积在内层上，形成复合管，并且复合管应该被拉长成 石英玻璃管。

公开(公告)号：US20130148934A1

公开(公告)日：2013-06-13

申请号：US13706458

申请日：2012-12-06

Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.

Inventor： Tetsuya NAKANISHI ,  Tatsuya KONISHI ,  Kazuya KUWAHARA

IPC: G02B6/028 ,  C03B37/027

CPC classification number: G02B6/028 ,  C03B37/02718 ,  C03B37/02727 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2205/56 ,  C03C13/045 ,  C03C13/046

Abstract: Provided is an inexpensive low-loss optical fiber suitably used in an optical transmission network. An optical fiber includes a core, an optical cladding, and a jacket. The core has a relative refractive index difference between 0.2% and 0.32% and has a refractive index volume between 9%·μm2 and 18%·μm2. The jacket has a relative refractive index difference between 0.03% and 0.20%. Glass constituting the core has a fictive temperature between 1400° C. and 1560° C. Stress remaining in the core is compressive stress. A cutoff wavelength measured on a fiber having a length of 2 m is 1300 nm or more and a cutoff wavelength measured on a fiber having a length of 100 m is 1500 nm or less. An effective area at a wavelength of 1550 nm is 110 μm2 or more. A attenuation at a wavelength of 1550 nm is 0.19 dB/km or less.

Abstract translation: 提供了适用于光传输网络的便宜的低损耗光纤。 光纤包括芯，光学包层和外壳。 芯的相对折射率差在0.2％至0.32％之间，折射率体积在9％·mum2和18％·mum2之间。 护套的相对折射率差为0.03％至0.20％。 构成核心的玻璃具有1400℃至1560℃之间的假想温度。芯体中的应力是压应力。 在长度为2μm的光纤上测量的截止波长为1300nm以上，在长度为100μm的光纤上测定的截止波长为1500nm以下。 1550nm波长的有效面积为110m 2以上。 在1550nm波长处的衰减为0.19dB / km或更小。

公开(公告)号：US20120289393A1

公开(公告)日：2012-11-15

申请号：US13575290

申请日：2011-02-24

Applicant: Junichi Kushibiki ,  Mototaka Arakawa

Inventor： Junichi Kushibiki ,  Mototaka Arakawa

IPC: C03B20/00 ,  C03C3/04

CPC classification number: C03C3/06 ,  C03B19/14 ,  C03B2201/23 ,  C03B2201/42 ,  C03C2201/23 ,  G01N29/07 ,  G01N29/221 ,  G01N2291/0423

Abstract: A TiO2—SiO2 glass ingot having a desired TiO2 concentration is fabricated, a sample is cut from the TiO2—SiO2 glass ingot, OH concentration C(OH), TiO2 concentration C(TiO2) and fictive temperature TF of the sample are measured, and zero-CTE temperature T(zero-CTE) is calculated from the measured C(OH), C(TiO2) and TF. A judgment is made as to whether the difference ΔT between the zero-CTE temperature T(zero-CTE) and a target value is within a predetermined range. When the difference ΔT is within the predetermined range, it is judged that the TiO2—SiO2 glass ingot has a desired zero-CTE temperature; when the difference ΔT is not within the range, a production condition for the TiO2—SiO2 glass ingot is corrected on the basis of the difference ΔT.

Abstract translation: 制备具有所需TiO 2浓度的TiO 2 -SiO 2玻璃锭，从TiO 2 -SiO 2玻璃锭切割样品，测量样品的OH浓度C（OH），TiO 2浓度C（TiO 2）和假想温度TF， 零CTE温度T（零CTE）由测量的C（OH），C（TiO2）和TF计算。 判断零CTE温度T（零CTE）与目标值之间的差Dgr T是否在预定范围内。 当差值Dgr; T在预定范围内时，判断为TiO 2 -SiO 2玻璃锭具有所需的零CTE温度; 当差值Dgr; T不在该范围内时，基于差值Dgr; T来校正TiO 2 -SiO 2玻璃锭的生产条件。

公开(公告)号：US08178450B2

公开(公告)日：2012-05-15

申请号：US12868900

申请日：2010-08-26

Applicant: Akio Koike ,  Kenta Saito ,  Long Shao ,  Yasutomi Iwahashi ,  Shinya Kikugawa

Inventor： Akio Koike ,  Kenta Saito ,  Long Shao ,  Yasutomi Iwahashi ,  Shinya Kikugawa

IPC: C03C3/06 ,  C03C3/04 ,  C03B37/018

CPC classification number: C03B19/1453 ,  C03B19/1415 ,  C03B2201/075 ,  C03B2201/23 ,  C03B2201/42 ,  C03B2207/70 ,  C03B2207/81 ,  C03C3/06 ,  C03C3/076 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/44 ,  C03C2203/52 ,  C03C2203/54 ,  Y02P40/57

Abstract: The present invention provides a TiO2—SiO2 glass whose coefficient of linear thermal expansion in the range of the time of irradiation with EUV light is substantially zero when used as an optical member of an exposure tool for EUVL and which has extremely high surface smoothness. The present invention relates to a TiO2-containing silica glass having a TiO2 content of from 7.5 to 12% by mass, a temperature at which a coefficient of linear thermal expansion is 0 ppb/° C., falling within the range of from 40 to 110° C., and a standard deviation (σ) of a stress level of striae of 0.03 MPa or lower within an area of 30 mm×30 mm in at least one plane.

Abstract translation: 本发明提供一种TiO 2 -SiO 2玻璃，当用作EUVL的曝光工具的光学部件并且具有非常高的表面光滑度时，在EUV光的照射时间范围内的线性热膨胀系数基本上为零。 本发明涉及TiO 2含量为7.5〜12质量％，线膨胀系数为0ppb /℃的温度，在40〜 110℃，在至少一个平面内在30mm×30mm的区域内的条纹应力水平为0.03MPa以下的标准偏差（＆sgr）。