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    Fabrication of optical preforms by axial chemical vapor deposition
    93.
    发明授权
    Fabrication of optical preforms by axial chemical vapor deposition 失效
    通过轴向化学气相沉积制造光学预型件

    公开(公告)号：US4440558A

    公开(公告)日：1984-04-03

    申请号：US387983

    申请日：1982-06-14

    Applicant: Dilip K. Nath ,  Pablo C. Pureza ,  Shin M. Oh

    Inventor： Dilip K. Nath ,  Pablo C. Pureza ,  Shin M. Oh

    IPC: C03B37/018 ,  C03B8/04 ,  C03B37/014 ,  G02B6/00 ,  C03B19/06 ,  C03B37/025

    CPC classification number: C03B37/01426 ,  C03B2201/08 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/40 ,  C03B2201/42 ,  Y10S65/16

    Abstract: Hydroxyl free deposition with high efficiency and at a high deposition rate may be achieved, even with use of relatively inexpensive raw materials, by utilizing a ring-shaped plasma activated axial chemical vapor deposition obtaining 100% chemical conversion and fractional volatilization of impurities. The plasma is induced in an annular stream of a plasma-forming gaseous medium, and the reactant or reactants used in the axial chemical vapor deposition are introduced into the center of the ring-shaped plasma to be converted by the heat of the plasma flame into soot which is deposited on a bait. An annular stream of a cooling medium flows outwardly past the plasma flame and is circumferentially centered by an extension of the outer tubular element of a plasma torch in which the plasma is generated. An RF generator which induces the plasma is operated at a frequency exceeding 20 MHz to give the plasma flame the desired ring-sloped configuration.

    Abstract translation: 通过利用环状等离子体激活的轴向化学气相沉积获得100％的化学转化和杂质的分级挥发，即使使用相对便宜的原料，也可以实现高效率和高沉积速率的无羟基沉积。 在等离子体形成的气体介质的环形流中诱导等离子体，并且将用于轴向化学气相沉积的反应物引入环形等离子体的中心，以通过等离子体火焰的热量转化为 沉积在诱饵上的烟灰。 冷却介质的环形流向外流过等离子体火焰，并且由其中产生等离子体的等离子体焰炬的外部管状元件的延伸部周向居中。 诱导等离子体的RF发生器以超过20MHz的频率运行，以使等离子体火焰成为期望的环形倾斜结构。

    Method for producing high quality fused silica
    96.
    发明授权
    Method for producing high quality fused silica 失效
    生产高质量二氧化硅的方法

    公开(公告)号：US3806570A

    公开(公告)日：1974-04-23

    申请号：US23974272

    申请日：1972-03-30

    Applicant: CORNING GLASS WORKS

    Inventor： VOORHEES F ,  FLAMENBAUM J ,  SCHULTZ P

    IPC: C03B37/018 ,  C03B8/04 ,  C03B19/14 ,  C03B20/00 ,  C03B37/014 ,  C04B35/14 ,  C23C16/40 ,  G02B6/00 ,  F27B9/04

    CPC classification number: C23C16/402 ,  C03B19/1415 ,  C03B19/1492 ,  C03B37/01413 ,  C03B37/0142 ,  C03B37/01446 ,  C03B37/01493 ,  C03B2201/28 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/54 ,  C03B2207/62 ,  C03B2207/90 ,  C04B35/14 ,  C23C16/401

    Abstract: There is disclosed a method and apparatus for providing optically pure water-free fused silica blanks, tubing and crucibles for use in forming optical waveguides, lenses, prisms, filters, and high temperature lamp envelopes, in which soot is deposited on a high purity graphite bait or refractory low expansion glass, glass-ceramic or suitable crystalline ceramic bait by a flame hydrolysis method in which the burner is located close to the bait. This results in an exceptionally dense soot preform. The preform is later sintered in an inert dry atmosphere by slowly inserting the soot covered bait into a furnace in such a manner that entrapped gas is forced from the fused silica during the slow insertion into the furnace maintained at a temperature above 1,400*C. The formation of bubbles within the fused silica is prevented because of the inert atmosphere and because the gases in the preform escape through the unsintered portions of the preform, thereby providing a crucible or blank of fused silica of exceptionally high optical quality.

    Abstract translation: 公开了一种用于提供用于形成光波导，透镜，棱镜，过滤器和高温灯泡的光学纯净无水熔融石英毛坯，管和坩埚的方法和装置，其中烟灰沉积在高纯度石墨上 诱饵或耐火低膨胀玻璃，玻璃陶瓷或适宜的结晶陶瓷诱饵，其中燃烧器位于靠近诱饵的火焰水解方法。 这导致了非常密集的烟灰预制件。 将预制件随后在惰性干燥气氛中通过将烟炱覆盖的饵料慢慢地插入炉中以使得在缓慢插入保持在1400℃以上的炉中的熔融二氧化硅的方式被迫使气体被压制的惰性干燥气氛中烧结。 由于惰性气氛，因为预制件中的气体逸出预成型体的未烧结部分，因此可以防止熔融二氧化硅内的气泡的形成，从而提供极高的光学质量的熔融二氧化硅的坩埚或坯料。

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