公开(公告)号：US20240182357A1

公开(公告)日：2024-06-06

申请号：US18529626

申请日：2023-12-05

Applicant: UNIVERSITY OF MARYLAND, COLLEGE PARK

Inventor： Liangbing HU ,  Xinpeng ZHAO

IPC: C03C17/25 ,  C03C3/06 ,  C03C4/02

CPC classification number: C03C17/25 ,  C03C3/06 ,  C03C4/02 ,  C03C2201/40 ,  C03C2203/50 ,  C03C2204/00 ,  C03C2218/11 ,  C03C2218/32

Abstract: A structure can comprise a substrate and a composite coating. The composite coating can be formed over a surface of the substrate. The composite coating can include one or more nanoparticles within an oxide matrix. The nanoparticles can be formed of a temperature-dependent Mott insulator having a phase transition temperature. At a temperature below the phase transition temperature, the composite coating can transmit light in a first wavelength range, and at a temperature above the phase transition temperature, the composite coating can block light in the first wavelength range. For example, the structure can be used as a smart 10 window to help regulate heating of building interiors due to solar radiation. The composite coating can be formed via a short-duration, high-temperature heating pulse, for example, at least 1500 K for less than 60 seconds.

公开(公告)号：US20170240457A1

公开(公告)日：2017-08-24

申请号：US15432387

申请日：2017-02-14

Applicant: The Government of the United States of America, as represented by the Secretary of the Navy

Inventor： Brian L. Justus ,  Alan L. Huston ,  Barbara A. Marcheschi

IPC: C03C1/02 ,  C03C4/12 ,  C03C23/00 ,  C09K11/58 ,  C03C21/00 ,  C03C3/04 ,  C09K11/02

CPC classification number: C03C23/002 ,  C03C3/06 ,  C03C3/076 ,  C03C4/12 ,  C03C14/006 ,  C03C21/008 ,  C03C2201/40 ,  C09K11/025 ,  C09K11/582

Abstract: A copper dopant delivery powder comprising a fused silica powder and a Cu2S powder. A method of making the copper dopant delivery powder. A method of making a copper-doped glass comprising placing a target glass in a container, packing a composite SiO.CuS dopant powder around the target glass and heating the container and SiO.CuS dopant powder to a temperature of between 800° C. and 1150° C. A copper-doped glass comprising a glass comprising copper-doping wherein the copper-doped glass was formed by covering the glass with a fused silica powder and a Cu2S powder, wherein the fused silica powder and the Cu2S powder are mixed in varying ratios of Cu2S to silica represented by the formula (SiO2)(1-x)(Cu2S)x and heating to a temperature of between 800° C. and 1150° C.

公开(公告)号：US20160137545A1

公开(公告)日：2016-05-19

申请号：US14921487

申请日：2015-10-23

Applicant: Corning Incorporated

Inventor： Sezhian Annamalai ,  Carlos Alberto Duran ,  Kenneth Edward Hrdina

IPC: C03C3/06

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/12 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/10 ,  C03B2201/23 ,  C03B2201/30 ,  C03B2201/32 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/076 ,  C03C10/0009 ,  C03C2201/10 ,  C03C2201/23 ,  C03C2201/30 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2201/58 ,  C03C2203/54

Abstract: Ultralow expansion titania-silica glass. The glass has high hydroxyl content and optionally include one or more dopants. Representative optional dopants include boron, alkali elements, alkaline earth elements or metals such as Nb, Ta, Al, Mn, Sn Cu and Sn. The glass is prepared by a process that includes steam consolidation to increase the hydroxyl content. The high hydroxyl content or combination of dopant(s) and high hydroxyl content lowers the fictive temperature of the glass to provide a glass having a very low coefficient of thermal expansion (CTE), low fictive temperature (Tf), and low expansivity slope.

Abstract translation: 超低膨胀二氧化钛 - 二氧化硅玻璃。 玻璃具有高羟基含量，并且任选地包括一种或多种掺杂剂。 代表性的可选掺杂剂包括硼，碱元素，碱土金属元素或诸如Nb，Ta，Al，Mn，Sn Cu和Sn的金属。 玻璃通过包括蒸汽固结以增加羟基含量的方法制备。 高羟基含量或掺杂剂和高羟基含量的组合降低了玻璃的假想温度，以提供具有非常低的热膨胀系数（CTE），低假想温度（Tf）和低膨胀斜率的玻璃。

公开(公告)号：US08679994B2

公开(公告)日：2014-03-25

申请号：US13961499

申请日：2013-08-07

Applicant: Nikon Corporation

Inventor： Masafumi Mizuguchi

IPC: C03C3/06 ,  G01N23/00

CPC classification number: G01N21/64 ,  C03B11/08 ,  C03B23/0013 ,  C03B40/02 ,  C03B2201/03 ,  C03C3/06 ,  C03C23/0075 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2203/52 ,  G01N21/6402 ,  Y02P40/57

Abstract: A method of inspecting a synthetic silica glass molded body includes: irradiating the synthetic silica glass molded body with a spectrum line of an Hg lamp having a wavelength of 248 nm; measuring light emitted by the synthetic silica glass molded body; and a procedure which may include screening a portion which satisfies a condition that a ratio of the bright line intensity and the fluorescent light intensity is of a certain value or less, or which may include determining whether a condition that a ratio of a minimum value and a maximum value of a measured fluorescent light intensity is in a certain range is satisfied or not.

Abstract translation: 合成石英玻璃成型体的检查方法包括：用波长248nm的Hg灯的光谱线照射合成石英玻璃成型体; 测量由合成石英玻璃成型体发出的光; 以及可以包括筛选满足亮线强度和荧光强度的比例为一定值以下的条件的部分的处理，或者可以包括确定最小值和 测量的荧光强度的最大值在一定范围内是否满足。

公开(公告)号：US20130320219A1

公开(公告)日：2013-12-05

申请号：US13961499

申请日：2013-08-07

Applicant: Nikon Corporation

Inventor： Masafumi MIZUGUCHI

IPC: G01N21/64

CPC classification number: G01N21/64 ,  C03B11/08 ,  C03B23/0013 ,  C03B40/02 ,  C03B2201/03 ,  C03C3/06 ,  C03C23/0075 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2203/52 ,  G01N21/6402 ,  Y02P40/57

Abstract: A method of inspecting a synthetic silica glass molded body includes: irradiating the synthetic silica glass molded body with a spectrum line of an Hg lamp having a wavelength of 248 nm; measuring light emitted by the synthetic silica glass molded body; and a procedure which may include screening a portion which satisfies a condition that a ratio of the bright line intensity and the fluorescent light intensity is of a certain value or less, or which may include determining whether a condition that a ratio of a minimum value and a maximum value of a measured fluorescent light intensity is in a certain range is satisfied or not.

Abstract translation: 合成石英玻璃成型体的检查方法包括：用波长248nm的Hg灯的光谱线照射合成石英玻璃成型体; 测量由合成石英玻璃成型体发出的光; 以及可以包括筛选满足亮线强度和荧光强度的比例为一定值以下的条件的部分的处理，或者可以包括确定最小值和 测量的荧光强度的最大值在一定范围内是否满足。

公开(公告)号：US20130116108A1

公开(公告)日：2013-05-09

申请号：US13540204

申请日：2012-07-02

Applicant: Nathan J. Cassingham ,  Ben Matthew Gauthier ,  Martin Panchula ,  Robert Stephen Pavlik ,  Yan Zhou ,  Konstantin S. Zuyev

Inventor： Nathan J. Cassingham ,  Ben Matthew Gauthier ,  Martin Panchula ,  Robert Stephen Pavlik ,  Yan Zhou ,  Konstantin S. Zuyev

IPC: C03C3/06

CPC classification number: C03C1/02 ,  C03B1/00 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/23 ,  C03B2201/24 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/08 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/34 ,  C03C2201/40 ,  C03C2201/50

Abstract: The invention relates to a silica glass compound having improved physical and chemical properties. In one embodiment, the present invention relates to a silica glass having a desirable brittleness in combination with a desirable density while still yielding a glass composition having a desired hardness and desired strength relative to other glasses. In another embodiment, the present invention relates to a silica glass composition that contains at least about 85 mole percent silicon dioxide and up to about 15 mole percent of one or more dopants selected from F, B, N, Al, Ge, one or more alkali metals (e.g., Li, Na, K, etc.), one or more alkaline earth metals (e.g., Mg, Ca, Sr, Ba, etc.), one or more transition metals (e.g., Ti, Zn, Y, Zr, Hf, etc.), one or more lanthanides (e.g., Ce, etc.), or combinations of any two or more thereof.

Abstract translation: 本发明涉及具有改善的物理和化学性质的二氧化硅玻璃化合物。 在一个实施方案中，本发明涉及具有期望的脆性以及所需密度的二氧化硅玻璃，同时仍然产生相对于其它玻璃具有所需硬度和所需强度的玻璃组合物。 在另一个实施方案中，本发明涉及二氧化硅玻璃组合物，其含有至少约85摩尔％的二氧化硅和至多约15摩尔％的选自F，B，N，Al，Ge的一种或多种掺杂剂，一种或多种 碱金属（如Li，Na，K等），一种或多种碱土金属（如Mg，Ca，Sr，Ba等），一种或多种过渡金属（如Ti，Zn，Y， Zr，Hf等），一种或多种镧系元素（例如Ce等），或其任何两种或多种的组合。

公开(公告)号：US07989378B2

公开(公告)日：2011-08-02

申请号：US12824923

申请日：2010-06-28

Applicant: Akio Koike ,  Yasutomi Iwahashi ,  Shinya Kikugawa

Inventor： Akio Koike ,  Yasutomi Iwahashi ,  Shinya Kikugawa

IPC: C03C3/06 ,  C03C3/11 ,  C03C3/112

CPC classification number: C03B19/1453 ,  C03B19/1461 ,  C03B32/00 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/46 ,  C03C2203/54 ,  Y02P40/57

Abstract: The present invention is to provide a TiO2—SiO2 glass having suitable thermal expansion properties as an optical member of an exposure tool for EUVL. The present invention relates to a TiO2-containing silica glass having a temperature, at which a coefficient of thermal expansion is 0 ppb/° C., falling within the range of 23±4° C. and a temperature width, in which a coefficient of thermal expansion is 0±5 ppb/° C., of 5° C. or more.

Abstract translation: 本发明提供具有合适的热膨胀性能的TiO 2 -SiO 2玻璃作为EUVL用曝光工具的光学部件。 本发明涉及热膨胀系数为0ppb /℃的温度为23±4℃的温度范围的含TiO2的二氧化硅玻璃，其温度范围为 的热膨胀为0±5ppb /℃，为5℃以上。

公开(公告)号：US20110130265A1

公开(公告)日：2011-06-02

申请号：US11885510

申请日：2006-02-08

Applicant: Masafumi Mizuguchi ,  Tetsuya Abe

Inventor： Masafumi Mizuguchi ,  Tetsuya Abe

IPC: C03C3/04 ,  C03B11/12 ,  G01J1/58

CPC classification number: G01N21/64 ,  C03B11/08 ,  C03B23/0013 ,  C03B40/02 ,  C03B2201/03 ,  C03C3/06 ,  C03C23/0075 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2203/52 ,  G01N21/6402 ,  Y02P40/57

Abstract: A method of molding a synthetic silica glass molded body by accommodating a synthetic silica glass block in a mold provided with a pressing portion, and by pressing the block while heating, the method comprising: a step of washing the synthetic silica glass block so that a concentration of copper which is present on the surface of the synthetic silica glass block is 2 ng/cm2 or less, and so that a concentration of aluminium thereon is 10 ng/cm2 or less, before accommodating the synthetic silica glass block in the mold; a step of heating high purity carbon powders in which a content of copper is 40 wt.ppb or less and a content of aluminium is 100 wt.ppb or less at a temperature condition of 1200° C. to 1900° C.; a step of heating the mold at a temperature condition of 1700° C. to 1900° C.; a step of applying the high purity carbon powders after the heating step on the inner surface of the mold after the heating step, before accommodating the synthetic silica glass block in the mold; and a step of molding the synthetic silica glass block in a predetermined form by pressing the block by means of the pressing portion while heating so as to the temperature of the block can be within a hold temperature range of 1500° C. to 1700° C., after accommodating the washed synthetic silica glass block in the mold.

Abstract translation: 一种通过将合成石英玻璃块容纳在具有按压部分的模具中并通过在加热时加压块来成型合成石英玻璃成型体的方法，所述方法包括：洗涤合成石英玻璃块，使得 存在于合成石英玻璃块的表面上的铜的浓度在将合成石英玻璃块容纳在模具中之前为2ng / cm 2以下，使其上的铝浓度为10ng / cm 2以下。 在1200℃至1900℃的温度条件下，加热铜含量为40重量ppm以下，铝含量为100重量ppm以下的高纯度碳粉末的工序。 在1700℃至1900℃的温度条件下加热模具的步骤。 在将合成石英玻璃块容纳在模具中之后，在加热步骤之后将高纯度碳粉末加热到模具的内表面之后的步骤; 以及通过在加热的同时通过按压部分压块而使预定形式的合成石英玻璃块成型的步骤，使得块的温度可以在1500℃至1700℃的保持温度范围内 在将洗涤的合成石英玻璃块容纳在模具中之后。

公开(公告)号：US07687418B2

公开(公告)日：2010-03-30

申请号：US10589161

申请日：2004-12-28

Applicant: Ulrich Peuchert ,  Uwe Kolberg ,  Joern Besinger

Inventor： Ulrich Peuchert ,  Uwe Kolberg ,  Joern Besinger

IPC: C03C3/095 ,  C03C3/097 ,  C03C3/112 ,  C03C3/11 ,  C03C3/076 ,  C03C3/06 ,  C03C3/078 ,  C03C3/062 ,  C03C3/00 ,  C09K3/00

CPC classification number: C03C4/0007 ,  A61K6/0005 ,  A61K6/0008 ,  A61K6/0073 ,  A61K6/0215 ,  A61K6/024 ,  A61K6/0245 ,  A61K6/025 ,  A61K6/0255 ,  A61K6/0276 ,  C03C3/06 ,  C03C3/095 ,  C03C4/087 ,  C03C2201/3488 ,  C03C2201/40 ,  A61K6/087 ,  C08L63/00

Abstract: The X-ray opaque glass is characterized by a composition, in mol %, of SiO2, 75-98; Yb2O3, 0.1 to 40; and ZrO2, 0 to 40. Preferred embodiments of the glass are free of Al2O3 and B2O3. The glass is produced from the glass batch by melting at a temperature of at least 1500° C. in an iridium or iridium alloy vessel with the assistance of high-frequency radiation. In preferred embodiments of the glass production process at least one raw material ingredient is present in the batch as a nanoscale powder. The glass is useful in dental applications, optical applications, and biomedical applications, or for photovoltaics, or as a target material in PVD processes.

Abstract translation: X射线不透明玻璃的特征在于以摩尔％计的SiO 2，75-98的组成; Yb2O3，0.1〜40; 和ZrO 2，0至40.玻璃的优选实施方案不含Al 2 O 3和B 2 O 3。 在高频辐射的帮助下，通过在铱或铱合金容器中在至少1500℃的温度下熔融从玻璃批料中制造玻璃。 在玻璃制备方法的优选实施方案中，至少一种原料成分以批量存在于纳米级粉末中。 该玻璃可用于牙科应用，光学应用，生物医学应用，或光伏发电，或作为PVD工艺中的靶材料。

公开(公告)号：US20050178319A1

公开(公告)日：2005-08-18

申请号：US10512114

申请日：2003-04-03

Applicant: Gabriele Korus ,  Martin Arndt ,  Hilmar Laudahn ,  Manfred Schwarzbauer

Inventor： Gabriele Korus ,  Martin Arndt ,  Hilmar Laudahn ,  Manfred Schwarzbauer

IPC: C03B20/00 ,  C03B19/09 ,  C03C3/06 ,  C03C10/00 ,  C30B15/10 ,  C30B35/00 ,  C30B1/00

CPC classification number: C30B15/10 ,  C03B19/095 ,  C03C3/06 ,  C03C10/0009 ,  C03C2201/40 ,  C03C2201/54 ,  Y10T117/10

Abstract: A known quartz glass crucible for crystal pulling consists of a crucible wall, having an outer layer which is provided in an external area thereof with a crystallisation promoter which results in crystallisation of quartz glass, forming cristobalite when the quartz glass crucible is heated according to specified use in crystal pulling. The aim of the invention is to provide a quartz glass crucible which has a long service life. As a result, the crystallisation promoter contains, in addition to a silicon, a first component which acts as a reticulating agent in quartz glass and a second component which is free of alkali metals and which acts as an agent forming separating points in quartz glass. The above mentioned components are contained and incorporated into a doping area (8) of the outer layer (6) having a layer thickness of more than 0.2 mm.

Abstract translation: 已知的用于晶体拉制的石英玻璃坩埚由坩埚壁组成，外壁具有结晶促进剂，结晶促进剂导致石英玻璃结晶，当石英玻璃坩埚根据规定加热时形成方英石 用于水晶拉。 本发明的目的是提供一种使用寿命长的石英玻璃坩埚。 结果，除了硅之外，结晶促进剂还含有在石英玻璃中充当网状剂的第一组分和不含碱金属的第二组分，其作为在石英玻璃中形成分离点的试剂。 上述组分被包含并且结合到层厚度大于0.2mm的外层（6）的掺杂区域（8）中。