Abstract:
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.
Abstract:
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
Abstract:
This application describes designs, implementations, and techniques for controlling propagation mode or modes of light in a common optical path, which may include one or more waveguides, to sense a sample.
Abstract:
OCT apparatus includes an interferometer, having an input beam splitter and a 50/50 output splitter. The splitting ratio of the input splitter may be optimized depending on the source power of light source and on the mismatch of the balanced receiver. The input splitter is a plate beam-splitter to minimize the stray reflected light in the interferometer and allow sequential operation of the apparatus in the OCT or in the confocal regime. The switching between the two regimes may be at will, or synchronous with the en-face scanning which results in quasi-simultaneous OCT/confocal imaging or in alternatives frames, confocal and OCT. By using polarization sensitive elements, two channels are provided in each regime, OCT and confocal. The two confocal polarization sensitive channels may allow adjustments of compensators prior to OCT measurements or OCT imaging.
Abstract:
In a low coherent interference fringe analysis method, a light intensity distribution of interference fringes formed by object light and reference light in a sample is represented by a light intensity distribution function using an envelope function. Subsequently, phase shifting is carried out, so as to measure the light intensity at each shift stage. According to thus measured light intensities at respective shift stages, unknowns of the light intensity distribution function are computed. Then, according to the computed unknowns, a peak position of a curve of the envelope function is determined. According to thus determined peak position, phase information of the sample is determined.
Abstract:
A phase-sensitive interferometric broadband reflectometer includes an illumination source for generating an optical beam. A beam splitter or other optical element splits the optical beam into probe beam and reference beam portions. The probe beam is reflected by a subject under test and then rejoined with the reference beam. The combination of the two beams creates an interference pattern that may be modulated by changing the length of the path traveled by the probe or reference beams. The combined beam is received and analyzed by a spectrometer.
Abstract:
One embodiment of the present invention is a method for suppressing artifacts in frequency-domain OCT images, which method includes (a) providing sample and reference paths with a significant difference in their chromatic dispersion (b) correcting for the effects of the mismatch in chromatic dispersion, for the purpose of making artifacts in the OCT image readily distinguishable from the desired image.
Abstract:
A method including: generating a sequence of phase-shifted interferometry images of an object surface relative to a reference surface; and calculating an unequally weighted average of the phase-shifted interferometry images to produce a final image. The final image can be useful as a lateral metrology image. The method may further include calculating a surface topography image from the sequence of phase-shifted interferometry images. Embodiments further include apparatus related to the method.
Abstract:
Apparatus for splitting, imaging, and measuring wavefronts with a reference wavefront and an object wavefront. A wavefront-combining element receives and combines into a combined wavefront an object wavefront from an object and a reference wavefront. A wavefront-splitting element splits the combined wavefront into a plurality of sub-wavefronts in such a way that each of the sub-wavefronts is substantially contiguous with at least one other sub-wavefront. The wavefront-splitting element may shift the relative phase between the reference wavefront and the object wavefront of the sub-wavefronts to yield a respective plurality of phase-shifted sub-wavefronts. The wavefront-splitting element may then interfering the reference and object wavefronts of the phase-shifted sub-wavefronts to yield a respective plurality of phase-shifted interferograms. An imaging element receives and images the phase-shifted interferograms. A computer connected to the imaging element measures various parameters of the objects based on the phase-shifted interferograms. Examples of measurements include flow parameters such as the concentrations of selected gaseous species, temperature distributions, particle and droplet distributions, density, and so on. In addition to flow parameters, the displacement (e.g., the vibration) and the profile of an object may be measured.
Abstract:
The present invention discloses simple and yet highly efficient configurations of optical coherence domain reflectometry systems. The combined use of a polarizing beam splitter with one or two polarization manipulator(s) that rotate the returned light wave polarization to an orthogonal direction, enables one to achieve high optical power delivery efficiency as well as fixed or predetermined output polarization state of the interfering light waves reaching a detector or detector array, which is especially beneficial for spectral domain optical coherence tomography. In addition, the system can be made insensitive to polarization fading resulting from the birefringence change in the sample and reference arms. Dispersion matching can also be easily achieved between the sample and the reference arm for high resolution longitudinal scanning.