Pyroelectric sensor
    91.
    发明授权

    公开(公告)号:US10914638B2

    公开(公告)日:2021-02-09

    申请号:US16566643

    申请日:2019-09-10

    Inventor: Takamichi Fujii

    Abstract: Provided is a pyroelectric sensor including: an Si substrate; a laminated portion in which a heat absorption layer formed of an inorganic material, a lower electrode, a piezoelectric film, and an upper electrode are laminated in this order from one surface side of the Si substrate on the one surface; and an optical filter that is provided at a position of the other surface of the Si substrate corresponding to the laminated portion and selectively transmits an infrared ray, in which an infrared ray incident to the laminated portion from the optical filter side through the Si substrate is sensed.

    Rapid thermal dynamic image capture devices

    公开(公告)号:US10909835B1

    公开(公告)日:2021-02-02

    申请号:US16994174

    申请日:2020-08-14

    Abstract: One or more temperature measuring devices are described that comprise; thermal imaging cameras capable of detection and provision of an exact location of at least one created dynamic image scanned by and triangulated with at least two thermal imaging cameras, and a gate that provides a constrained targeted pathway through which at least one person must travel so that dynamic thermal data of the person is captured as the person is moving through the gate and wherein thermal imaging cameras are geometrically arranged in positions such that the thermal imaging cameras field of view exist on or within the gate and wherein the person is scanned and provides targeted dynamic thermal data that is converted into one or more temperature readings that measure and transmit the temperature readings from one or more photodetectors that sense thermal radiation naturally emitted by people passing through.

    Apparatus and method for online and real-time detection of temperature of epitaxial wafer

    公开(公告)号:US10908024B2

    公开(公告)日:2021-02-02

    申请号:US16317024

    申请日:2014-08-19

    Abstract: An apparatus and a method for online and real-time detection of a temperature of an epitaxial wafer (4) belong to the technical field of semiconductor detection. The apparatus comprises a MOCVD reaction chamber (1), a light source (6), a beam splitter (7), a reference light detector (8), a reflected light detector (9) and a data acquisition unit (10). The method, on the basis of the apparatus, can obtain a thermal radiation attenuation factor caused by a coating of a reactor chamber window and a reflectance attenuation factor caused by the coating of the reactor chamber window for the epitaxial wafer (4). The apparatus and method can eliminate influence of the coating of the reactor chamber window on an online and real-time temperature detection value, thereby improving the accuracy of the online and real-time temperature detection value.

    Infrared sensor and phononic crystal

    公开(公告)号:US10890489B2

    公开(公告)日:2021-01-12

    申请号:US16566868

    申请日:2019-09-10

    Abstract: An infrared sensor according to the present disclosure includes base substrate, infrared receiver, and beam. The beam includes connective portion connecting with the base substrate and/or a member on the base substrate, and separated portion separated from the base substrate. The infrared receiver and the beam are joined with each other at the separated portion. The infrared receiver is supported by the beam in a state where the infrared receiver is separated from the base substrate. The beam includes junction part joined to the infrared receiver, and section positioned between junction part and the connective portion, and section includes a phononic crystal structure defined by a plurality of through holes orderly arranged. The crystal structure includes a first domain and a second domain that are phononic crystal domains. The first domain includes, in a plan view, a plurality of through holes arranged orderly in a first direction, while the second domain includes, in a plan view, a plurality of through holes arranged orderly in a second direction that is different from the first direction. The infrared sensor according to the present disclosure has enhanced responsivity.

    Method and system for calibrating imaging system

    公开(公告)号:US20210003454A1

    公开(公告)日:2021-01-07

    申请号:US16459340

    申请日:2019-07-01

    Abstract: A method comprises capturing outputs of a VLC and an infrared array sensor (IAS). A memory includes a calibration based on a position of a laser pointer relative to the IAS. The method includes the laser pointer outputting a light beam to produce a laser dot on a target. The output of the VLC includes a representation of the laser dot. The output of the IAS includes values indicative of infrared radiation from the target. The method includes determining a temperature based on a portion of the values indicative of infrared radiation from the target. The portion of the values includes values associated with a portion of the target at which the laser dot is produced. The method includes displaying, on the display, the output of the VLC and the temperature. Displaying the output of the VLC includes displaying a visible light image showing the laser dot and at least a portion of the target.

    Method and system for calibrating imaging system

    公开(公告)号:US20210003453A1

    公开(公告)日:2021-01-07

    申请号:US16459283

    申请日:2019-07-01

    Abstract: A method includes capturing and scaling VLC and an IAS outputs to generate a scaled VLC output and a scaled thermal output (STO), aligning the scaled VLC output to the STO to generate an aligned image based on the scaled VLC output and the STO, determining alignment value(s) based on the aligned image, a laser pointer outputting a light beam to produce a laser dot on a target, and capturing a further output of the VLC. The method includes displaying the further output of the VLC (including a representation of the laser dot (RLD)), and an alignment marker, shifting the alignment marker and/or the RLD to a common position; determining coordinate(s) of the output of the IAS based on coordinate(s) of the further output of the VLC where the alignment marker and the RLD are shown at the common position; and storing the coordinate(s) of the output of the IAS.

    Mobile gas and chemical imaging camera

    公开(公告)号:US10834338B2

    公开(公告)日:2020-11-10

    申请号:US16138823

    申请日:2018-09-21

    Abstract: In one embodiment, an infrared (IR) imaging system for determining a concentration of a target species in an object is disclosed. The imaging system can include an optical system including an optical focal plane array (FPA) unit. The optical system can have components defining at least two optical channels thereof, said at least two optical channels being spatially and spectrally different from one another. Each of the at least two optical channels can be positioned to transfer IR radiation incident on the optical system towards the optical FPA. The system can include a processing unit containing a processor that can be configured to acquire multispectral optical data representing said target species from the IR radiation received at the optical FPA. Said optical system and said processing unit can be contained together in a data acquisition and processing module configured to be worn or carried by a person.

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