公开(公告)号：US06900593B2

公开(公告)日：2005-05-31

申请号：US10712019

申请日：2003-11-14

Applicant: Yoshiya Imoto

Inventor： Yoshiya Imoto

IPC: H01J61/06 ,  H01J61/067 ,  H01J61/70 ,  H01J61/92 ,  H01J61/95 ,  H01J65/00 ,  H01J65/04 ,  H04N1/04 ,  H05B41/24 ,  H05B41/36 ,  H01J13/46

CPC classification number: H05B41/24 ,  H01J61/06 ,  H01J61/067 ,  H01J61/70 ,  H01J61/95 ,  H01J65/046 ,  H05B41/36

Abstract: A light source of the invention includes: a cylinder having disposed therein a phosphor material that emits light by ultraviolet rays which are radiated due to discharge; a pair of internal electrodes disposed inside the cylinder; a pair of external electrodes a and b disposed outside the cylinder; and a lamp controller that switches between an external electrode lighting mode resulting from the application of a voltage to the pair of external electrodes and an internal electrode lighting mode resulting from the application of a voltage to the pair of internal electrodes, wherein the lamp controller controls, in the external electrode lighting mode, an electric potential VIN with respect to the pair of internal electrodes and an electric potential VH of the electrode of the higher electric potential of the pair of external electrodes to a condition where VIN>VH or VIN≈VH.

Abstract translation: 本发明的光源包括：在其中设置有由于放电而辐射的紫外线发光的荧光体材料的圆筒; 设置在所述气缸内的一对内部电极; 设置在气缸外部的一对外部电极a和b; 以及灯控制器，其在由所述一对外部电极施加电压引起的外部电极点亮模式和由所述一对内部电极施加电压而产生的内部电极点亮模式之间切换，其中所述灯控制器控制 在外部电极点亮模式中，相对于一对内部电极的电位V IN IN和电位较高的电极的电位V H H 该一对外部电极处于其中V IN H IN或V IN IN H≈V H a。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。。

公开(公告)号：US06885015B2

公开(公告)日：2005-04-26

申请号：US10334680

申请日：2002-12-30

Applicant: Neil Wester

Inventor： Neil Wester

IPC: G03F7/20 ,  H01J1/15 ,  H01J65/04 ,  H05G2/00

CPC classification number: B82Y10/00 ,  G03F7/70033 ,  H05G2/003

Abstract: A source of soft x-rays in an Extreme Ultraviolet (EUV) lithography system may include a pre-ionization unit to pre-ionize a source material, e.g., a Xenon plasma. The pre-ionization unit may be integrated with a discharge unit, and may use Lanthanum Hexaboride (LaB6) as a thermionic emitter material.

Abstract translation: 极紫外（EUV）光刻系统中的软X射线源可以包括用于预先电离源材料例如氙等离子体的预电离单元。 预电离单元可以与放电单元集成，并且可以使用六硼化镧（LaB 6 N 6）作为热离子发射极材料。

公开(公告)号：US20050083671A1

公开(公告)日：2005-04-21

申请号：US10964747

申请日：2004-10-14

Applicant: Hae-Il Park ,  Sang-Yu Lee ,  Jin-Seob Byun ,  Hyoung-Joo Kim

Inventor： Hae-Il Park ,  Sang-Yu Lee ,  Jin-Seob Byun ,  Hyoung-Joo Kim

IPC: G02F1/13357 ,  G01D11/28 ,  H01J61/30 ,  H01J65/04

CPC classification number: H01J65/046 ,  H01J61/305

Abstract: A planar-light source device includes a light source body, partition members, a movement restriction member and an electrode. The light source body has a discharge space. The partition members are disposed in the discharge space to divide the discharge space into sub-spaces connected to each other. The movement restriction member is disposed at one of or both the side portions of the respective partition members to restrict plasma movement between the sub-spaces of the discharge space. The electrode surrounds the light source body, and is overlapped with the movement restriction member.

Abstract translation: 平面光源装置包括光源体，分隔构件，移动限制构件和电极。 光源体具有放电空间。 分隔构件设置在放电空间中以将放电空间分成彼此连接的子空间。 移动限制构件设置在各分隔构件的侧部的一侧或两侧，以限制放电空间的子空间之间的等离子体移动。 电极围绕光源体，与移动限制部件重叠。

公开(公告)号：US20050057186A1

公开(公告)日：2005-03-17

申请号：US10940044

申请日：2004-09-14

Applicant: Toshiaki Kurachi ,  Satoshi Kominami ,  Kiyoshi Hashimotodani

Inventor： Toshiaki Kurachi ,  Satoshi Kominami ,  Kiyoshi Hashimotodani

IPC: H01J5/50 ,  H01J65/04 ,  H05B41/24 ,  H05B41/16

CPC classification number: H05B41/24

Abstract: An electrodeless discharge lamp is disclosed that comprises a bulb with a substance for electric discharge sealed therein, the bulb having a reentrant portion protruding inwardly along a Z-axis direction; an induction coil arranged in the reentrant portion, the induction coil having a magnetic core and a winding wound around the magnetic core; and a drive circuit for supplying the induction coil with a power from 50 kHz to 1 MHz. The bulb has an outer diameter from 65 mm to 75 mm in a direction orthogonal to the Z-axis direction, and the magnetic core has a length L in the Z-axis direction that is 1.05 times or more a length L′ of the winding in the Z-axis direction, the length L being set to 41 mm or less.

Abstract translation: 公开了一种无电极放电灯，其包括具有密封在其中的放电物质的灯泡，灯泡具有沿Z轴方向向内突出的折入部分; 布置在所述凹陷部分中的感应线圈，所述感应线圈具有磁芯和缠绕在所述磁芯上的绕组; 以及用于向所述感应线圈提供50kHz至1MHz的功率的驱动电路。 灯泡在与Z轴方向正交的方向上的外径为65mm〜75mm，Z轴方向的长度L为绕组的长度L'的1.05倍以上 在Z轴方向上，长度L设定为41mm以下。

公开(公告)号：US20050047139A1

公开(公告)日：2005-03-03

申请号：US10754838

申请日：2004-01-08

Applicant: Seong-Tae Seo

Inventor： Seong-Tae Seo

IPC: F21V29/00 ,  F21K2/00 ,  F21S2/00 ,  F21Y101/02 ,  H01J61/04 ,  H01J61/54 ,  H01J65/00 ,  H01J65/04

CPC classification number: H01J61/54 ,  H01J65/044

Abstract: An electrodeless lighting system includes: a resonator installed at an outlet of a waveguide guiding microwave energy generated from a magnetron and defining a cavity allowing light to pass therethrough while resonating microwave therein; a bulb positioned in the resonator and enclosing a radiation material for emitting light by the microwave energy; and one or plural microwave concentrating units installed at the inner circumferential surface of the resonator and concentrating microwave energy discharged from the outlet of the waveguide to the bulb. By concentrating microwave to electrodeless plasma bulb positioned inside the resonator, a stability in an initial lighting and light efficiency can be enhanced.

Abstract translation: 无电极照明系统包括：谐振器，安装在波导的出口处，引导从磁控管产生的微波能量，并且限定允许光通过的空腔，同时在其中谐振微波; 位于谐振器中并包围用于通过微波能量发射光的辐射材料的灯泡; 以及一个或多个微波聚焦单元，其安装在谐振器的内圆周表面，并将从波导的出口排出的微波能量集中到灯泡。 通过将微波聚焦到位于谐振器内的无电极等离子体灯泡，可以提高初始照明和光效率的稳定性。

公开(公告)号：US06858988B1

公开(公告)日：2005-02-22

申请号：US10284113

申请日：2002-10-30

Applicant: Mounir Laroussi

Inventor： Mounir Laroussi

IPC: H01J7/24 ,  H01J65/00 ,  H01J65/04

CPC classification number: H01J65/046

Abstract: An electrodeless excimer UV lamp, comprising an enclosed chamber with a gas sealed within the enclosed chamber, wherein the gas is capable of being used to generate a plasma discharge, a first electrode wrapped around the outer surface of the chamber at a first location, a second electrode wrapped around the outer surface of the chamber at second location, and a power supply configured to apply a voltage to the first electrode and the second electrode. During operation of the UV lamp, a plasma discharge is generated by applying a voltage to the electrodes wrapped around the outer surface of the chamber to ignite the gas or gas mixture inside the chamber and generate a plasma discharge within the chamber, such that a specific wavelength of UV radiation will be generated by the particular gas within the chamber.

Abstract translation: 一种无电极准分子UV灯，包括密封在封闭室内的气体的封闭室，其中气体能够用于产生等离子体放电，第一电极在第一位置周围缠绕在腔室的外表面上， 在第二位置处缠绕在腔室的外表面的第二电极，以及被配置为向第一电极和第二电极施加电压的电源。 在UV灯的操作期间，通过向围绕室的外表面缠绕的电极施加电压来产生等离子体放电，以点燃室内的气体或气体混合物，并在室内产生等离子体放电，使得特定 UV辐射的波长将由腔室内的特定气体产生。

公开(公告)号：US06858979B2

公开(公告)日：2005-02-22

申请号：US10301634

申请日：2002-11-22

Applicant: Hyoung-bin Park ,  Gi-young Kim ,  Ji-hyun Hong

Inventor： Hyoung-bin Park ,  Gi-young Kim ,  Ji-hyun Hong

IPC: H01J65/00 ,  H01J1/62 ,  H01J17/49 ,  H01J61/30 ,  H01J61/35 ,  H01J61/62 ,  H01J63/04 ,  H01J65/04

CPC classification number: H01J65/046

Abstract: A plasma flat lamp includes an upper plate, a lower plate separated a predetermined distance from the upper plate, a wall portion for forming a sealed discharge space between the upper and lower plates, a discharge gas filled in the discharge space, a first pair of electrodes including a first upper plate electrode and a first lower plate electrode arranged to face each other on each of the upper and lower plates with the discharge space interposed therebetween, and a second pair of electrodes including a second upper plate electrode separated a predetermined distance from the first upper plate electrode and a second lower plate electrode separated a predetermined distance from the first lower plate electrode arranged to face each other on each of the upper and lower plates with the discharge space interposed therebetween. Thus, the plasma flat lamp according to the present invention has a stable discharge feature which is a merit of the conventional electrodes discharge flat lamp and a high luminance of light emission which is a feature of the facing surfaces discharging type, while not having a low luminance and unstable discharge feature of the conventional surface discharge type flat lamp and facing electrodes discharging flat lamp, respectively.

Abstract translation: 一种等离子体平板灯包括上板，与上板分隔预定距离的下板，用于在上板和下板之间形成密封排放空间的壁部，填充在放电空间中的放电气体，第一对 包括第一上板电极和第一下电极板的电极，所述第一上板电极和第一下电极板布置成在每个上板和下板之间彼此面对，其间插有放电空间;以及第二对电极，包括与第一上板电极隔开预定距离 所述第一上板电极和第二下板电极，其与所述上板和下板之间彼此相对配置的与所述第一下板电极隔开预定距离，并且所述第一上板电极和所述第二下板电极之间具有放电空间。 因此，根据本发明的等离子体平板灯具有稳定的放电特征，这是常规电极放电扁平灯的优点和作为面对放电类型的特征的高发光亮度，同时不具有低 传统表面放电型平板灯和面对电极分别放电平板灯的亮度和不稳定放电特征。

公开(公告)号：US06847157B2

公开(公告)日：2005-01-25

申请号：US10130604

申请日：2001-09-24

Applicant: Rainer Kling ,  Reinhold Wittkoetter

Inventor： Rainer Kling ,  Reinhold Wittkoetter

IPC: H01J5/50 ,  H01J5/54 ,  H01J65/00 ,  H01J65/04

CPC classification number: H01J65/046 ,  H01J5/54

Abstract: A dielectric barrier discharge lamp having a cap (2), an elongate discharge vessel (1) and strip-like outer electrodes (5a-5f) has a corresponding contact spring (7a-7f) for each outer electrode. These contact springs are arranged in the interior of the cap. The cap also includes a cap sleeve (6), which surrounds one end of the discharge vessel (1) in such a manner that the or each strip-like outer electrode (5a-5f) is in electrically conductive contact with the or a corresponding contact spring (7a-7f). Preferably, the transverse extent of the individual contact springs, at least in the region of the contact, is less than or equal to the width of the corresponding strip-like outer electrode. This design combines ease of installation of the cap with a reliable contact and a high lamp efficiency.

Abstract translation: 具有盖（2），细长放电容器（1）和条状外电极（5a-5f）的电介质阻挡放电灯具有用于每个外电极的对应接触弹簧（7a-7f）。 这些接触弹簧设置在盖的内部。 盖子还包括盖套筒（6），其围绕放电容器（1）的一端，使得每个条状外部电极（5a-5f）与该或相应的 接触弹簧（7a-7f）。 优选地，至少在接触区域中，单个接触弹簧的横向程度小于或等于相应的带状外部电极的宽度。 该设计结合了容易安装的盖与可靠的接触和高的灯效率。

公开(公告)号：US20050001533A1

公开(公告)日：2005-01-06

申请号：US10852126

申请日：2004-05-25

Applicant: Gunter Huber ,  Frank Jermann ,  Ulrich Muller ,  Martin Zachau

Inventor： Gunter Huber ,  Frank Jermann ,  Ulrich Muller ,  Martin Zachau

IPC: H01J65/00 ,  C09K11/08 ,  C09K11/63 ,  C09K11/64 ,  C09K11/66 ,  C09K11/77 ,  C09K11/80 ,  C09K11/81 ,  H01J1/62 ,  H01J61/35 ,  H01J61/44 ,  H01J61/48 ,  H01J63/04 ,  H01J65/04

CPC classification number: H01J61/48 ,  C09K11/0883 ,  C09K11/666 ,  C09K11/7721 ,  C09K11/7734 ,  C09K11/7739 ,  C09K11/7774 ,  C09K11/7777 ,  C09K11/778 ,  C09K11/7787 ,  C09K11/7792 ,  H01J61/44 ,  H01J65/046

Abstract: Discharge lamp with phosphor A discharge lamp (1) having a discharge vessel (2) which surrounds a discharge medium which emits electromagnetic radiation in the VUV region when the lamp is operating has, on the inner side of the discharge vessel wall, a first phosphor layer, which faces the discharge medium and comprises a UVA component which can be excited by the VUV radiation and is intended to emit electromagnetic radiation in the UVA region. Moreover, the discharge lamp (1) has a second phosphor layer, which can be excited by the UVA radiation and is intended to emit electromagnetic radiation in the visible region. This second phosphor layer either lies beneath the first phosphor layer or is applied to the outer side of the discharge vessel wall. This results in a lower color locus shift compared to a conventional phosphor mixture which can be excited directly by VUV radiation. (FIG. 1a)

Abstract translation: 具有荧光体的放电灯具有放电容器（2）的放电灯（1）在灯工作时在VUV区域内发射电磁辐射的放电介质周围，在放电容器壁的内侧具有第一荧光体 层，其面向放电介质并且包括可被VUV辐射激发并且旨在在UVA区域中发射电磁辐射的UVA分量。 此外，放电灯（1）具有第二荧光体层，其可以被UVA辐射激发，并且旨在在可见区域中发射电磁辐射。 该第二荧光体层位于第一荧光体层下方或者被施加到放电容器壁的外侧。 与可以通过VUV辐射直接激发的常规荧光体混合物相比，这导致较低的颜色轨迹位移。 （图1a）

公开(公告)号：US6157141A

公开(公告)日：2000-12-05

申请号：US163532

申请日：1998-09-30

Applicant: Walter P. Lapatovich ,  Joanne M. Browne ,  Fred L. Palmer ,  A. Bowman Budinger ,  Nancy H. Chen

Inventor： Walter P. Lapatovich ,  Joanne M. Browne ,  Fred L. Palmer ,  A. Bowman Budinger ,  Nancy H. Chen

IPC: H01J61/12 ,  H01J65/04 ,  H05B41/24 ,  H05B41/16

CPC classification number: H01J61/125 ,  H01J65/044

Abstract: An electrodeless high intensity discharge lamp with a lamp fill material including gallium iodide has been found to be more efficient in generating light in general, and more efficient in generating blue light. The very small size of the lamp, in combination with the high intensity in a relatively narrow blue spectral range make the lamp particularly useful in supplying blue light to a fiber optic. The relative efficiency of the lamp increases its value. In combination, the lamp provides a useful, efficient source of blue light as an input source for optical fiber, and other systems for medical and other processes using blue light as a process element.

Abstract translation: 已经发现具有包括碘化镓的灯填充材料的无电极高强度放电灯通常在产生光线方面更有效，并且更有效地产生蓝光。 灯的非常小的尺寸与相对窄的蓝色光谱范围内的高强度组合使得该灯在向光纤提供蓝光时特别有用。 灯的相对效率提高了其价值。 结合起来，灯提供了一种有用的，有效的蓝光源作为光纤的输入源，以及用于医疗和其他使用蓝光作为过程元件的工艺的系统。