公开(公告)号：US09958376B2

公开(公告)日：2018-05-01

申请号：US15302949

申请日：2015-02-19

Applicant: MITSUBISHI ELECTRIC CORPORATION

Inventor： Kenya Nakai ,  Nobuo Takeshita

IPC: G01N15/02 ,  G01N21/49 ,  G01S7/499 ,  G01S17/95 ,  G01N15/14 ,  G01N15/06 ,  G01N21/53 ,  H01S5/00 ,  H01S5/0683 ,  G01S7/491 ,  G01N15/00 ,  H01S5/042 ,  H01S5/06

CPC classification number: G01N15/1434 ,  G01N15/0211 ,  G01N15/06 ,  G01N21/49 ,  G01N21/53 ,  G01N2015/0046 ,  G01N2015/0693 ,  G01N2015/1454 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01S7/4916 ,  G01S7/499 ,  G01S17/95 ,  H01S5/0028 ,  H01S5/0427 ,  H01S5/0617 ,  H01S5/06832

Abstract: A floating particle detection device 1 is capable of accurately identifying the type of a floating particle while achieving simplification of a configuration of the device, the device includes: a laser light irradiator (10) that includes a laser light emitting element (11) and a back-monitor-use light receiving element (12); a scattered light receiver (20) that selectively receives light of a predetermined polarization component among scattered light generated when a floating particle (50) is irradiated and that generates a second detection signal; and an identification processor (30) that identifies the type of the floating particle on the basis of a first detection signal and the second detection signal. Incident light entering the back-monitor-use light receiving element (12) includes: a back-monitor-use laser beam (L0); and backscattered light (Lbs) travelling toward the laser light irradiator (10) among the scattered light (Ls).

公开(公告)号：US09952154B2

公开(公告)日：2018-04-24

申请号：US15402399

申请日：2017-01-10

Applicant: The Charles Stark Draper Laboratory, Inc.

Inventor： Matthew A. Sinclair ,  Adam Kelsey ,  Richard E. Stoner

IPC: G01B9/02 ,  G21K1/00 ,  G01N21/64

CPC classification number: G01N21/6404 ,  G01B9/02015 ,  G01B9/02061 ,  G01B2290/55 ,  G01C19/58 ,  G01N21/645 ,  G01N2021/6463 ,  G01N2201/06113 ,  G01V7/00 ,  G21K1/006

Abstract: An atomic interferometer and methods for measuring phase shifts in interference fringes using the same. The atomic interferometer has a laser beam traversing an ensemble of atoms along a first path and an optical components train with at least one alignment-insensitive beam routing element configured to reflect the laser beam along a second path that is anti-parallel with respect to the first laser beam path. Any excursion from parallelism of the second beam path with respect to the first is rigorously independent of variation of the first laser beam path in yaw parallel to an underlying plane.

公开(公告)号：US09952144B2

公开(公告)日：2018-04-24

申请号：US15046082

申请日：2016-02-17

Applicant: BATTELLE MEMORIAL INSTITUTE

Inventor： M. Lizabeth Alexander ,  James F. Kelly ,  Robert L. Sams ,  James J. Moran ,  Matthew K. Newburn ,  Thomas A. Blake

IPC: G01J3/30 ,  G01N21/3504 ,  G01N21/59 ,  G01J3/433 ,  G01N21/31 ,  G01N21/39 ,  G02B6/42 ,  G01N21/71 ,  G02B6/02 ,  G01N21/03 ,  G01N21/05 ,  G01N21/85

CPC classification number: G01N21/3504 ,  G01J3/4338 ,  G01N21/3103 ,  G01N21/39 ,  G01N21/59 ,  G01N21/718 ,  G01N2021/0346 ,  G01N2021/052 ,  G01N2021/3125 ,  G01N2021/399 ,  G01N2021/8578 ,  G01N2201/06113 ,  G02B6/02328 ,  G02B6/4296

Abstract: A capillary absorption spectrometer and process are described that provide highly sensitive and accurate stable absorption measurements of analytes in a sample gas that may include isotopologues of carbon and oxygen obtained from gas and biological samples. It further provides isotopic images of microbial communities that allow tracking of nutrients at the single cell level. It further targets naturally occurring variations in carbon and oxygen isotopes that avoids need for expensive isotopically labeled mixtures which allows study of samples taken from the field without modification. The process also permits sampling in vivo permitting real-time ambient studies of microbial communities.

公开(公告)号：US20180106715A1

公开(公告)日：2018-04-19

申请号：US15666477

申请日：2017-08-01

Applicant: Bruker Nano, Inc.

Inventor： Gregory O. Andreev ,  Chanmin Su

IPC: G01N21/17 ,  G01N21/3563 ,  G01Q30/02 ,  B82Y35/00 ,  G01Q30/20 ,  G01Q60/32

CPC classification number: G01N21/171 ,  B82Y35/00 ,  G01N21/3563 ,  G01N2201/06113 ,  G01N2201/10 ,  G01N2201/12 ,  G01Q30/02 ,  G01Q30/20 ,  G01Q60/32

Abstract: An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ω, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.

公开(公告)号：US09939390B2

公开(公告)日：2018-04-10

申请号：US14899840

申请日：2013-06-25

Applicant: Prysmian S.p.A.

Inventor： Antonio Faraldi ,  Gerardo Testa ,  Antonio Adigrat ,  Franco Cocchini

IPC: C03B37/025 ,  G01N21/954 ,  G01M11/00 ,  G01M11/08

CPC classification number: G01N21/954 ,  C03B37/025 ,  G01M11/088 ,  G01M11/37 ,  G01N2021/9548 ,  G01N2201/06113 ,  G01N2201/105

Abstract: A method for inspecting defects inside a rod-shaped transparent object by using a scanning beam of parallel light rays directed onto a rod-shaped transparent object orthogonally to the longitudinal axis of the object so that an inspection plane comprises an object's cross-section. The scanning beam is detected at an opposite side of the rod-shaped object that is interposed to intercept the parallel rays of the scanning beam. The electric output signal from the detector is processed to produce a first light intensity profile in a first scan direction, the light intensity profile comprising a shadow region delimited by first and second shadow edges, which is indicative of the outside diameter of the object across the inspection plane. The method comprises analyzing the first light intensity profile to determine the presence or absence of a peak of positive intensity within the shadow region and, if an intensity peak is determined to be present, to determine the presence or absence of a region of depressed intensity within the intensity peak. If, as a result of analyzing, an intensity peak within the shadow region is determined to be absent or a region of depressed intensity is determined to be present within the intensity peak, the presence of at least one structural defect within the object's cross-section is identified. In the preferred embodiments, the rod-shaped transparent object is a glass core rod for the production of a transmission optical fiber.

公开(公告)号：US20180095032A1

公开(公告)日：2018-04-05

申请号：US15285415

申请日：2016-10-04

Applicant: General Electric Company

Inventor： Nasr Eldine Alkadi ,  Dustin Michael Sharber ,  Ashraf Osama El-Messidi ,  Radislav Alexandrovich Potyrailo ,  John Andrew Westerheide

IPC: G01N21/39 ,  G01C21/20 ,  G01S17/89 ,  G06F17/30

CPC classification number: G01N21/39 ,  G01C21/20 ,  G01N2201/06113 ,  G01S17/89 ,  G06F17/30241 ,  G06F17/30268 ,  H04Q9/00

Abstract: An inspection apparatus includes a communication unit including a first transmitter and a second transmitter. The communication unit is coupled to an on-board computing device including at least one processor coupled to a memory device. The processor is configured to obtain a position of the inspection apparatus, unprocessed image data, and fluid concentration data for at least one fluid. The processor geotags the data with the position of the inspection apparatus and transmits the data to a remote processing device. The geotagged image data is transferred using the first transmitter and the geotagged fluid concentration data is transmitted using the second transmitter.

公开(公告)号：US20180080759A1

公开(公告)日：2018-03-22

申请号：US15826529

申请日：2017-11-29

Applicant: KLA-Tencor Corporation

Inventor： Rui-fang Shi ,  Alex Pokrovskiy ,  Abdurrahman Sezginer ,  Weston L. Sousa

IPC: G01B11/24 ,  G03F1/70 ,  G03F1/22 ,  G01B11/02 ,  G01N21/88

CPC classification number: G01B11/24 ,  G01B11/02 ,  G01B2210/56 ,  G01N21/8806 ,  G01N2201/06113 ,  G03F1/22 ,  G03F1/70

Abstract: Disclosed are methods and apparatus for facilitating an inspection of a sample using an inspection tool. An inspection tool is used to obtain an image or signal from an EUV reticle that specifies an intensity variation across the EUV reticle, and this intensity variation is converted to a CD variation that removes a flare correction CD variation so as to generate a critical dimension uniformity (CDU) map without the flare correction CD variation. This removed flare correction CD variation originates from design data for fabricating the EUV reticle, and such flare correction CD variation is generally designed to compensate for flare differences that are present across a field of view (FOV) of a photolithography tool during a photolithography process. The CDU map is stored in one or more memory devices and/or displayed on a display device, for example, of the inspection tool or a photolithography system.

公开(公告)号：US09915601B2

公开(公告)日：2018-03-13

申请号：US14423134

申请日：2013-08-23

Applicant: SATAKE CORPORATION

Inventor： Akiko Nakata ,  Shinya Fushida ,  Akira Eto ,  Masanori Matsuda ,  Yukio Hosaka

IPC: G01N1/00 ,  G01N15/00 ,  G01N21/00 ,  G01N15/14 ,  C12M1/34 ,  C12Q1/06 ,  G01N21/64

CPC classification number: G01N15/1456 ,  C12M41/36 ,  C12Q1/06 ,  G01N21/645 ,  G01N2015/0065 ,  G01N2015/035 ,  G01N2015/1486 ,  G01N2021/6471 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/068 ,  G01N2201/12

Abstract: An examination apparatus 1 for microorganisms for measuring an amount of microorganisms in a sample solution, the apparatus including stirring and mixing means 7 for stirring and mixing the sample solution into which a sample and a fluorescent staining reagent are added, in a sample container 5 formed of a material allowing light to pass through, an excitation light source 10 including a light source that irradiates an irradiation target surface of the sample container 5 with excitation light while the sample solution is being stirred by the stirring and mixing means 7, light receiving means 14 for detecting light and converting the light resulting from a fluorescent emission caused by excitation light from the excitation light source 10, into an electric signal, and control means 23 for detecting the number of emissions based on the electric signal from the light receiving means 14 and calculating the amount of the microorganisms contained in the sample in the sample container 5 based on the number of emissions.

公开(公告)号：US20180067051A1

公开(公告)日：2018-03-08

申请号：US15802505

申请日：2017-11-03

Applicant: STERIS Inc. ,  Institut National D'Optique / National Optics Institute

Inventor： Francois Baribeau

IPC: G01N21/64 ,  A61L2/28 ,  G01N21/94

CPC classification number: G01N21/6428 ,  A61L2/28 ,  A61L2202/24 ,  G01N21/6486 ,  G01N21/94 ,  G01N21/954 ,  G01N2021/6417 ,  G01N2021/6439 ,  G01N2201/06113 ,  G01N2201/068 ,  G01N2201/0697 ,  G01N2201/10 ,  G01N2201/105

Abstract: A method for optical detection of residual soil in lumens of lumened or cannulated devices such as surgical endoscopes, after undergoing a decontamination process (e.g., a washing or rinsing operation). A soil detection system provides an indication of the presence of residual soil within a lumen by detecting luminescent radiation emanating from the soil on the interior of the lumen in response to excitation light.

公开(公告)号：US09911634B2

公开(公告)日：2018-03-06

申请号：US15193502

申请日：2016-06-27

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Abner Bello ,  Stephanie Waite ,  William J. Fosnight ,  Thomas Beeg

IPC: G01J5/00 ,  H01L21/673 ,  H01L21/66 ,  G01N21/55 ,  G01N21/21 ,  G01J5/08

CPC classification number: G01J5/0096 ,  G01J5/0007 ,  G01J5/025 ,  G01J5/0825 ,  G01J5/0896 ,  G01N21/211 ,  G01N21/55 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01N2201/12 ,  G01R27/00 ,  H01L21/67253 ,  H01L21/6732 ,  H01L21/67353 ,  H01L21/67386 ,  H01L22/12

Abstract: A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.