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    Non-axisymmetric charged-particle beam system
    103.
    发明授权
    Non-axisymmetric charged-particle beam system 失效
    非轴对称带电粒子束系统

    公开(公告)号：US07612346B2

    公开(公告)日：2009-11-03

    申请号：US11968833

    申请日：2008-01-03

    Applicant: Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

    Inventor： Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

    IPC: B01D59/44 ,  H01J49/00

    CPC classification number: H01J27/02 ,  G21K1/093 ,  H01J3/02 ,  H01J3/12 ,  H01J3/20 ,  H01J29/64

    Abstract: The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.

    Abstract translation: 带电粒子束系统包括非轴对称二极管形成具有椭圆截面的非轴对称束。 聚焦元件利用磁场来聚焦和传送非轴对称光束，其中非轴对称光束与聚焦元件的通道近似匹配。

    Electron emission device including dummy electrodes
    104.
    发明授权
    Electron emission device including dummy electrodes 失效
    电子发射器件包括虚拟电极

    公开(公告)号：US07385344B2

    公开(公告)日：2008-06-10

    申请号：US11020570

    申请日：2004-12-27

    Applicant: Seong-Yeon Hwang

    Inventor： Seong-Yeon Hwang

    IPC: H01J1/62

    CPC classification number: H01J3/02 ,  H01J29/94 ,  H01J31/127

    Abstract: An electron emission device having various functional electrodes in addition to the electrodes serving to emit electrons includes: first and second substrates facing each other, and cathode and gate electrodes arranged on the first substrate within an effective electron emission area and including an insulating layer interposed therebetween. The electron emission regions are electrically connected to the cathode electrodes. At least one dummy electrode is arranged external to the effective electron emission area. At least one anode electrode is arranged on the second substrate. Phosphor layers are arranged on one surface of the anode electrode.

    Abstract translation: 除了用于发射电子的电极之外，具有各种功能电极的电子发射装置包括：彼此面对的第一和第二基板，以及布置在有效电子发射区域内的第一基板上的包括绝缘层的阴极和栅电极 。 电子发射区域电连接到阴极电极。 至少一个虚拟电极布置在有效电子发射区域的外部。 在第二基板上设置至少一个阳极电极。 荧光体层布置在阳极电极的一个表面上。

    Electron gun
    105.
    发明申请
    Electron gun 有权
    电子枪

    公开(公告)号：US20070096620A1

    公开(公告)日：2007-05-03

    申请号：US11266032

    申请日：2005-11-02

    Applicant: Viktor Tymashov ,  Oleg Zhdanov ,  Sergiy Ryabenko ,  Andriy Tsepkalov ,  Steven Burns

    Inventor： Viktor Tymashov ,  Oleg Zhdanov ,  Sergiy Ryabenko ,  Andriy Tsepkalov ,  Steven Burns

    IPC: H01J29/46

    CPC classification number: H01J37/3053 ,  H01J3/02 ,  H01J3/027 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/14 ,  H01J2237/15 ,  H01J2237/3132

    Abstract: An electron gun includes the following: a primary thermionic electron source, a secondary thermionic electron source and a focusing electrode disposed within a first housing that includes one or more reference members adjustably attached to a housing support connected to a first platform; an anode and one or more focusing coils disposed within a second housing comprising one or more insulating members adjustably connected to the first platform; and one or more deflection coils disposed within a third housing connected to the second housing and located opposite said first housing.

    Abstract translation: 电子枪包括以下：初级热离子电子源，二次热离子电子源和聚焦电极，其设置在第一壳体内，该第一壳体包括一个或多个可调节地连接到连接到第一平台的壳体支撑件的参考构件; 阳极和设置在第二壳体内的一个或多个聚焦线圈，包括可调节地连接到第一平台的一个或多个绝缘构件; 以及设置在连接到第二壳体并且与第一壳体相对定位的第三壳体内的一个或多个偏转线圈。

    Electron gun and electron beam drawing apparatus using the same
    108.
    发明授权
    Electron gun and electron beam drawing apparatus using the same 有权
    电子枪和使用电子枪的电子束描绘装置

    公开(公告)号：US06593686B1

    公开(公告)日：2003-07-15

    申请号：US09537686

    申请日：2000-03-29

    Applicant: Yoshikiyo Yui

    Inventor： Yoshikiyo Yui

    IPC: H01J2946

    CPC classification number: H01J3/02 ,  H01J37/065 ,  H01J2237/06308

    Abstract: An electron gun according to this invention includes a cathode having a hemispherical electron-emitting surface, an anode which is arranged to face the cathode, and has a first aperture on the optical axis, and a bias electrode which is arranged between the anode and the cathode, receives a potential lower than one applied to the cathode, and has a second aperture larger than the electron-emitting surface of the cathode on the optical axis. The distal end of the electron-emitting surface of the cathode is arranged in contact with or outside a sphere whose diameter is equal to the diameter of the second aperture of the bias electrode.

    Abstract translation: 根据本发明的电子枪包括具有半球形电子发射表面的阴极，被布置为面向阴极的阳极，并且在光轴上具有第一孔，并且偏置电极设置在阳极和 阴极，接收低于施加到阴极的电位的电位，并且具有大于阴极在光轴上的电子发射表面的第二孔径。 阴极的电子发射表面的远端布置成与其直径等于偏置电极的第二孔直径的球体接触或外侧。

    RF modulated electron gun
    109.
    发明授权
    RF modulated electron gun 有权

    公开(公告)号：US06593579B2

    公开(公告)日：2003-07-15

    申请号：US09866418

    申请日：2001-05-25

    Applicant: Kenneth Whithman

    Inventor： Kenneth Whithman

    IPC: H03F358

    CPC classification number: H01J3/02

    Abstract: A radio frequency (RF) modulated electron gun includes a cathode, electrically coupled to operate as a source of charged particles, and a grid, positioned apart from the cathode. The grid and the cathode are electrically coupled to a grid voltage source and to a RF source. The grid voltage source places the grid at a first potential, and the RF source places the grid at a second potential selected to produce groups of the charged particles. The groups of charged particles are produced with each period of a signal received from the RF source.

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